JPS5334459B2 - - Google Patents

Info

Publication number
JPS5334459B2
JPS5334459B2 JP1127976A JP1127976A JPS5334459B2 JP S5334459 B2 JPS5334459 B2 JP S5334459B2 JP 1127976 A JP1127976 A JP 1127976A JP 1127976 A JP1127976 A JP 1127976A JP S5334459 B2 JPS5334459 B2 JP S5334459B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1127976A
Other languages
Japanese (ja)
Other versions
JPS5295177A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1127976A priority Critical patent/JPS5295177A/en
Publication of JPS5295177A publication Critical patent/JPS5295177A/en
Publication of JPS5334459B2 publication Critical patent/JPS5334459B2/ja
Granted legal-status Critical Current

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  • Electron Beam Exposure (AREA)
JP1127976A 1976-02-06 1976-02-06 Electronic beam mask and manufacture Granted JPS5295177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1127976A JPS5295177A (en) 1976-02-06 1976-02-06 Electronic beam mask and manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1127976A JPS5295177A (en) 1976-02-06 1976-02-06 Electronic beam mask and manufacture

Publications (2)

Publication Number Publication Date
JPS5295177A JPS5295177A (en) 1977-08-10
JPS5334459B2 true JPS5334459B2 (en) 1978-09-20

Family

ID=11773541

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1127976A Granted JPS5295177A (en) 1976-02-06 1976-02-06 Electronic beam mask and manufacture

Country Status (1)

Country Link
JP (1) JPS5295177A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0520305Y2 (en) * 1986-05-26 1993-05-26

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61183926A (en) * 1985-02-08 1986-08-16 Toshiba Corp Charged beam irradiation unit

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
IBM TECHNICAL DISCLOSURE BULLETIN#N11=1973 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0520305Y2 (en) * 1986-05-26 1993-05-26

Also Published As

Publication number Publication date
JPS5295177A (en) 1977-08-10

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