JPWO2016009652A1 - 半導体モジュール、電気的接続体、及び検査装置 - Google Patents
半導体モジュール、電気的接続体、及び検査装置 Download PDFInfo
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Abstract
Description
プローバは、被検査デバイスを供給するとともに電気接続体に対して相対的に位置決めしプローブカードのプローブと被検査デバイスのパッドとを接触させる機構を備えている。
実装基板16上において、複数の半導体チップ20は、搭載されている2つのパワーMOSトランジスタの並び方向に並んで配列されている。すなわち、本実施形態では、複数の半導体チップ20は、その2つのパワーMOSトランジスタがY方向に並ぶ向きで、Y方向に沿って配列されている。図3では、Y方向に沿った半導体チップ20の列が10個設けられている。すなわち、実装基板16上において、半導体チップ20が10列になって配置されている。換言すると、実装基板16には、10列のチップ列が設けられている。ここで、実装基板16の左端に配置された半導体チップ20の一列を第1チップ列12とし、その隣の一列を第2チップ列14とする。
図8は、制御IC11の制御スイッチ61、62と、半導体チップ20の回路構成の変形例1を示す回路図である。図7では、制御スイッチ61、62から半導体チップ20に向かう配線63を外部に出さない構成としていたが、図8では、配線63が抵抗78を介して外部と接続する構成となっている。すなわち、外部からの第2の電位Vssが抵抗78を介してゲート電極Gに供給されている。
なお、図7では、第1トランジスタ21、第2トランジスタ22として、NチャネルパワーMOSFETを用いたが、図9に示すように、PチャネルパワーMOSFETを用いることも可能である。このような構成を用いることで、図7と同様の効果を得ることができる。
なお、図8では、第1トランジスタ21、第2トランジスタ22として、NチャネルパワーMOSFETを用いたが、図10に示すように、PチャネルパワーMOSFETを用いることも可能である。このような構成を用いることで、図8と同様の効果を得ることができる。
なお、半導体モジュール10において、実施の形態1と、変形例1〜3を組み合わせることも可能である。例えば、半導体モジュール10において、PチャネルMOSFETの半導体チップ20とNチャネルMOSFETの半導体チップ20とを混載してもよい。
第3トランジスタ23、第4トランジスタ24を含む半導体チップ20の回路構成については、第1トランジスタ21、第2トランジスタ22を含む半導体チップ20の回路構成と同様になるため、説明を省略する。なお、上記の実施の形態では、第1トランジスタ21、第2トランジスタ22とのドレイン電位を共通としたが、ソース電位を共通としてもよい。すなわち、直列接続した第1トランジスタ21と第2トランジスタ22とのソース電極Sが向かい合うように構成してもよい。また、上記の実施の形態では、パワーMOSトランジスタが縦型構造のものとしてプレーナ型のパワーMOSトランジスタを用いたが、他の縦型構造のパワーMOSトランジスタであってもよく、例えば、トレンチ型パワーMOSトランジスタ、スーパージャンクション型MOSトランジスタ、高速ボディダイオード型パワーMOSトランジスタを用いてもよい。また、横型構造のパワーMOSトランジスタであってもよい。
3 コネクタ
4 スティフナ
5 中間接続体
6 プローブ基板
10 半導体モジュール
11 制御IC
12 第1チップ列
13 パッド列
14 第2チップ列
16 実装基板
17 ワイヤ
18 電源入力端子
19 電源出力端子
20 半導体チップ
21 第1トランジスタ
22 第2トランジスタ
23 第3トランジスタ
24 第4トランジスタ
30 パッド
31 パッド
50 半導体ウェーハ
51 端子
52 検査対象デバイス
61 制御スイッチ
62 制御スイッチ
G ゲート電極
S ソース電極
D ドレイン電極
100 プローブカード
Claims (11)
- 検査対象デバイスの電極とテスタの電源チャネルとの間に電気的に介在する電気的接続体に用いられる半導体モジュールであって、
配線を有する実装基板と、
前記実装基板上に実装された制御ICと、
前記実装基板上に実装された複数の半導体チップと、を備え、
前記複数の半導体チップのそれぞれが、前記検査対象デバイスの電極側と前記テスタの電源チャネル側との間に直列に接続された第1及び第2トランジスタを備え、
前記第1トランジスタの第1電極と前記第2トランジスタの第1電極とが、前記半導体チップの基板側で共通し、
前記第1トランジスタの第2電極が前記テスタの電源チャネル側に接続し、前記第2トランジスタの第2電極が前記検査対象デバイスの電極側に接続し、
前記第1及び第2トランジスタの制御電極に、前記制御ICからの制御信号が前記配線を介して供給されることで、前記テスタの電源チャネル側と前記検査対象デバイスの電極側との接続を制御する半導体モジュール。 - 前記第1及び第2トランジスタがパワーMOSトランジスタであり、
前記第1電極がドレイン電極であり、前記第2電極がソース電極であり、前記制御電極がゲート電極である請求項1に記載の半導体モジュール。 - 前記制御ICは、CMOSを備え、
前記制御ICからの制御信号は、前記CMOSからの出力である請求項1、又は2に記載の半導体モジュール。 - 前記実装基板上において、2以上の前記半導体チップが第1の方向に沿って配列されたチップ列が設けられ、
前記チップ列に含まれる2以上の前記半導体チップのそれぞれにおいて、前記第1及び第2トランジスタが前記第1の方向に沿って並んでいる請求項1〜3のいずれか1項に記載の半導体モジュール。 - 前記半導体チップの前記第2電極及び前記制御電極と接続されるパッドが、前記実装基板上に設けられ、
前記実装基板上には、第1の方向に沿って配列された複数の前記パッドを有するパッド列が設けられ、
2つの前記チップ列の間に前記パッド列が配置され、
前記2つのチップ列に含まれる前記半導体チップの前記第2電極及び前記制御電極には、前記パッド列に含まれる前記パッドと接続されている請求項4に記載の半導体モジュール。 - 前記半導体チップの前記制御電極及び前記第2電極の間にはゲート保護回路が設けられていない請求項1〜5のいずれか1項に記載の半導体モジュール。
- 前記制御ICの出力端子から前記半導体チップの前記制御電極までの配線は、その半導体チップの第1電極及び第2電極に接続されていない請求項6に記載の半導体モジュール。
- 配線、入力端子、及び出力端子を有する実装基板と、
前記実装基板上に実装された制御ICと、
前記実装基板上に実装された複数の半導体チップと、を備え、
前記複数の半導体チップのそれぞれが、直列に接続された第1及び第2トランジスタを備え、
前記第1トランジスタの第1電極と前記第2トランジスタの第1電極とが、前記半導体チップの基板側で共通し、
前記第1トランジスタの第2電極が前記入力端子に接続し、前記第2トランジスタの第2電極が前記出力端子に接続し、
前記第1及び第2トランジスタの制御電極に、前記制御ICからの制御信号が前記配線を介して供給されることで、前記入力端子と前記出力端子との接続を制御する半導体モジュール。 - 請求項1〜8のいずれか1項に記載の半導体モジュールと、
前記半導体モジュールが実装されたインターフェース基板と、
前記第2トランジスタの前記第2電極と接続されたプローブを複数備えたプローブ基板と、を備えた電気的接続体。 - 前記半導体モジュールの真下に、その半導体モジュールに接続されているプローブの接続端子が位置している請求項9に記載の電気的接続体。
- 請求項9、又は10に記載の電気的接続体と、
前記電気的接続体に電源チャネルからテスト電源を供給するテスタと、を備えた検査装置。
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