JPWO2015198911A1 - 半導体装置および半導体装置の製造方法 - Google Patents
半導体装置および半導体装置の製造方法 Download PDFInfo
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- JPWO2015198911A1 JPWO2015198911A1 JP2016529356A JP2016529356A JPWO2015198911A1 JP WO2015198911 A1 JPWO2015198911 A1 JP WO2015198911A1 JP 2016529356 A JP2016529356 A JP 2016529356A JP 2016529356 A JP2016529356 A JP 2016529356A JP WO2015198911 A1 JPWO2015198911 A1 JP WO2015198911A1
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Abstract
Description
本技術は、半導体装置の反りを抑制するための技術である。尚、本技術の半導体装置の構成を説明する前に、一般的な半導体装置の構成について説明する。
図2は、本技術を適用した半導体装置の構成を示している。尚、図1における構成と同一の機能を備えた構成については、同一の名称および符号を付しており、その説明は適宜省略するものとする。
以上においては、離型剤101を上チップ11の側面部にのみ塗布する例について説明してきたが、側面部に離型剤101が塗布されれば良いので、図3で示されるように、離型剤101は、上チップ11の側面部のみならず、上面部にも塗布されるようにしてもよい。
次に、図5のフローチャートを参照して、第1の製造処理について説明する。
以上においては、上チップ11の側面部に離型剤101を塗布し、封止樹脂31の付着を防止することで、フィレット状の封止樹脂31による応力の発生を抑制するようにした半導体装置の構成例について説明してきた。しかしながら、フィレット状の封止樹脂31の収縮により、上チップ11の側面部と、下チップ12の上面部との間に応力が発生しないようにする限り、空隙111は、封止樹脂31のいずれかに設けられればよい。そこで、例えば、図6で示されるように、離型剤101を下チップ12の上面に塗布し、フィレット状の封止樹脂31の底面部と、下チップ12の上面との間に空隙111が設けられるような構成にするようにしても良い。
次に、図7のフローチャートを参照して、図6の半導体装置の製造処理について説明する。
以上においては、上チップ11の側面部や、下チップ12の上面部に離型剤101を塗布することで、空隙111を形成する例について説明してきた。しかしながら、フィレット状の封止樹脂31が硬化する際の収縮による応力の発生を抑制できるように空隙111が形成されれば、その他の構成であってもよく、例えば、離型剤101が塗布された仕切り板をフィレット状の封止樹脂31のいずれかに設けて、封止樹脂31が硬化した後、取り除くようにすることで空隙111が形成されるようにしても良い。
次に、図9のフローチャートを参照して、図8の半導体装置の製造処理について説明する。
以上においては、フィレット状に形成された封止樹脂31の乾燥による硬化に伴った応力が発生する方向に対して所定の角を成すように空隙111を1カ所形成する例について説明してきた。しかしながら、応力が発生しないように空隙111が設けられればよいので、空隙111は、1カ所のみならず、複数箇所設けるようにしてもよく、例えば、図11で示されるように、下チップ12の上面部であって、バンプ21が設けられる周辺部に、離型剤101を塗布すると共に、上チップ11の上面部および側面部に離型剤101を塗布するようにしても良い。
以上においては、上チップ11の上面部および側面部に離型剤101を塗布し、さらに、下チップ12の上面部であって、バンプ21の周辺部に離型剤101を塗布する例について説明した。しかしながら、応力の発生が抑制できればよいので、封止樹脂31がフィレット状にならないようにすることで、応力の発生を抑制しても良い。
以上においては、下チップ12上に1枚の上チップ11が積層される例について説明してきたが、下チップ12上に複数のチップが積層される構成であっても、封止樹脂31の乾燥および硬化に伴った収縮により発生する応力を抑制できるように空隙111が形成されればよい。
(1) 上部半導体チップと、
下部半導体チップと、
前記上部半導体チップと前記下部半導体チップとを接続するバンプと、
前記バンプを保護する封止樹脂と、
前記封止樹脂における、前記バンプの存在する領域よりはみ出したフィレット状の範囲であって、前記上面半導体チップの側面部と、前記下部半導体チップの上面部との間のいずれかに形成された空隙と
を含む半導体装置。
(2) 前記空隙は、前記封止樹脂を塗布する前に、前記封止樹脂が塗布されたとき、前記バンプの存在する領域よりはみ出したフィレット状の範囲であって、前記上面半導体チップの側面部と、前記下部半導体チップの上面部との間のいずれかの位置に仕切り板を配置した後、前記封止樹脂を塗布し、その後、前記仕切り板を除去することで形成される
(1)に記載の半導体装置。
(3) 前記仕切り板は、前記封止樹脂と接触する部位に離型剤が塗布されている板状のもの、または、前記封止樹脂を乾燥する際の熱により蒸発、または昇華する材質よりなる板状のものである
(2)に記載の半導体装置。
(4) 前記空隙は、前記上部半導体チップの側面部と、前記フィレット状の前記封止樹脂との間に形成される
(1)に記載の半導体装置。
(5) 前記上部半導体チップの側面部には、離型剤が塗布されており、
前記空隙は、前記上部半導体チップの側面部に塗布された離型剤により、前記フィレット状の前記封止樹脂が、前記上部半導体チップの側面部より離型されることで形成される
(4)に記載の半導体装置。
(6) 前記離型剤は、前記上部半導体チップの側面部に加えて、上面部にも塗布されている
(5)に記載の半導体装置。
(7) 前記空隙は、前記下部半導体チップであって、前記上部半導体チップと対向する範囲以外の上面部と、前記フィレット状の前記封止樹脂との間に形成される
(1)に記載の半導体装置。
(8) 前記下部半導体チップであって、前記上部半導体チップと対向する範囲以外の上面部には、離型剤が塗布されており、
前記空隙は、前記下部半導体チップであって、前記上部半導体チップと対向する範囲以外の上面部に塗布された離型剤により、前記フィレット状の前記封止樹脂が、前記下部半導体チップであって、前記上部半導体チップと対向する範囲以外の上面部より離型されることで形成される
(7)に記載の半導体装置。
(9) 前記上部半導体チップは、複数枚数が、前記バンプにより接続された状態で積層されて、前記バンプを介して前記下部半導体チップと接続され、
前記空隙は、前記バンプの存在する領域よりはみ出したフィレット状の前記封止樹脂における、積層された複数の前記上面半導体チップの側面部と、前記下部半導体チップの上面部との間のいずれかに形成される
(1)に記載の半導体装置。
(10) 複数枚数の前記上部半導体チップが積層された第1の構成と、前記第1の構成とは異なる前記上部半導体チップからなる第2の構成とが、隣接する位置に、それぞれ前記バンプを介して前記下部半導体チップと接続され、
前記空隙は、前記第1の構成と、前記第2の構成とが、隣接しない領域の、それぞれの前記バンプの存在する領域よりはみ出したフィレット状の前記封止樹脂における、前記第1の構成の側面部と、前記下部半導体チップの上面部との間のいずれか、および前記第2の構成の側面部と、前記下部半導体チップの上面部との間のいずれかに形成される
(1)に記載の半導体装置。
(11) 上部半導体チップと、
下部半導体チップと、
前記上部半導体チップと前記下部半導体チップとを接続するバンプと、
前記バンプを保護する封止樹脂と、
前記封止樹脂における、前記バンプの存在する領域よりはみ出したフィレット状の範囲であって、前記上面半導体チップの側面部と、前記下部半導体チップの上面部との間のいずれかに形成された空隙と
を含む半導体装置の製造方法であって、
前記空隙を形成するための処理が、前記封止樹脂が塗布される前に施される
半導体装置の製造方法。
(12) 前記空隙を形成するための前記処理は、前記封止樹脂が塗布されたとき、前記バンプの存在する領域よりはみ出したフィレット状の範囲であって、前記上面半導体チップの側面部と、前記下部半導体チップの上面部との間のいずれかの位置に仕切り板を配置する処理であり、
前記封止樹脂が塗布された後、前記仕切り板が除去される
(11)に記載の半導体装置の製造方法。
(13) 前記仕切り板は、前記封止樹脂と接触する部位に離型剤が塗布されている板状のもの、または、前記封止樹脂を乾燥する際の熱により蒸発、または昇華する材質よりなる板状のものである
(12)に記載の半導体装置の製造方法。
(14) 前記空隙を形成するための前記処理は、前記上部半導体チップの側面部に離型剤を塗布する処理である
(11)に記載の半導体装置の製造方法。
(15) 前記空隙を形成するための前記処理は、前記下部半導体チップの上面部であって、前記上部半導体チップと対向しない範囲に離型剤を塗布する処理である
(11)に記載の半導体装置の製造方法。
Claims (15)
- 上部半導体チップと、
下部半導体チップと、
前記上部半導体チップと前記下部半導体チップとを接続するバンプと、
前記バンプを保護する封止樹脂と、
前記封止樹脂における、前記バンプの存在する領域よりはみ出したフィレット状の範囲であって、前記上面半導体チップの側面部と、前記下部半導体チップの上面部との間のいずれかに形成された空隙と
を含む半導体装置。 - 前記空隙は、前記封止樹脂を塗布する前に、前記封止樹脂が塗布されたとき、前記バンプの存在する領域よりはみ出したフィレット状の範囲であって、前記上面半導体チップの側面部と、前記下部半導体チップの上面部との間のいずれかの位置に仕切り板を配置した後、前記封止樹脂を塗布し、その後、前記仕切り板を除去することで形成される
請求項1に記載の半導体装置。 - 前記仕切り板は、前記封止樹脂と接触する部位に離型剤が塗布されている板状のもの、または、前記封止樹脂を乾燥する際の熱により蒸発、または昇華する材質よりなる板状のものである
請求項2に記載の半導体装置。 - 前記空隙は、前記上部半導体チップの側面部と、前記フィレット状の前記封止樹脂との間に形成される
請求項1に記載の半導体装置。 - 前記上部半導体チップの側面部には、離型剤が塗布されており、
前記空隙は、前記上部半導体チップの側面部に塗布された離型剤により、前記フィレット状の前記封止樹脂が、前記上部半導体チップの側面部より離型されることで形成される
請求項4に記載の半導体装置。 - 前記離型剤は、前記上部半導体チップの側面部に加えて、上面部にも塗布されている
請求項5に記載の半導体装置。 - 前記空隙は、前記下部半導体チップであって、前記上部半導体チップと対向する範囲以外の上面部と、前記フィレット状の前記封止樹脂との間に形成される
請求項1に記載の半導体装置。 - 前記下部半導体チップであって、前記上部半導体チップと対向する範囲以外の上面部には、離型剤が塗布されており、
前記空隙は、前記下部半導体チップであって、前記上部半導体チップと対向する範囲以外の上面部に塗布された離型剤により、前記フィレット状の前記封止樹脂が、前記下部半導体チップであって、前記上部半導体チップと対向する範囲以外の上面部より離型されることで形成される
請求項7に記載の半導体装置。 - 前記上部半導体チップは、複数枚数が、前記バンプにより接続された状態で積層されて、前記バンプを介して前記下部半導体チップと接続され、
前記空隙は、前記バンプの存在する領域よりはみ出したフィレット状の前記封止樹脂における、積層された複数の前記上面半導体チップの側面部と、前記下部半導体チップの上面部との間のいずれかに形成される
請求項1に記載の半導体装置。 - 複数枚数の前記上部半導体チップが積層された第1の構成と、前記第1の構成とは異なる前記上部半導体チップからなる第2の構成とが、隣接する位置に、それぞれ前記バンプを介して前記下部半導体チップと接続され、
前記空隙は、前記第1の構成と、前記第2の構成とが、隣接しない領域の、それぞれの前記バンプの存在する領域よりはみ出したフィレット状の前記封止樹脂における、前記第1の構成の側面部と、前記下部半導体チップの上面部との間のいずれか、および前記第2の構成の側面部と、前記下部半導体チップの上面部との間のいずれかに形成される
請求項1に記載の半導体装置。 - 上部半導体チップと、
下部半導体チップと、
前記上部半導体チップと前記下部半導体チップとを接続するバンプと、
前記バンプを保護する封止樹脂と、
前記封止樹脂における、前記バンプの存在する領域よりはみ出したフィレット状の範囲であって、前記上面半導体チップの側面部と、前記下部半導体チップの上面部との間のいずれかに形成された空隙と
を含む半導体装置の製造方法であって、
前記空隙を形成するための処理が、前記封止樹脂が塗布される前に施される
半導体装置の製造方法。 - 前記空隙を形成するための前記処理は、前記封止樹脂が塗布されたとき、前記バンプの存在する領域よりはみ出したフィレット状の範囲であって、前記上面半導体チップの側面部と、前記下部半導体チップの上面部との間のいずれかの位置に仕切り板を配置する処理であり、
前記封止樹脂が塗布された後、前記仕切り板が除去される
請求項11に記載の半導体装置の製造方法。 - 前記仕切り板は、前記封止樹脂と接触する部位に離型剤が塗布されている板状のもの、または、前記封止樹脂を乾燥する際の熱により蒸発、または昇華する材質よりなる板状のものである
請求項12に記載の半導体装置の製造方法。 - 前記空隙を形成するための前記処理は、前記上部半導体チップの側面部に離型剤を塗布する処理である
請求項11に記載の半導体装置の製造方法。 - 前記空隙を形成するための前記処理は、前記下部半導体チップの上面部であって、前記上部半導体チップと対向しない範囲に離型剤を塗布する処理である
請求項11に記載の半導体装置の製造方法。
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US20170162404A1 (en) | 2017-06-08 |
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