JPWO2012111520A1 - 積層セラミックコンデンサ及び積層セラミックコンデンサの製造方法 - Google Patents
積層セラミックコンデンサ及び積層セラミックコンデンサの製造方法 Download PDFInfo
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- JPWO2012111520A1 JPWO2012111520A1 JP2012557914A JP2012557914A JPWO2012111520A1 JP WO2012111520 A1 JPWO2012111520 A1 JP WO2012111520A1 JP 2012557914 A JP2012557914 A JP 2012557914A JP 2012557914 A JP2012557914 A JP 2012557914A JP WO2012111520 A1 JPWO2012111520 A1 JP WO2012111520A1
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- 239000003985 ceramic capacitor Substances 0.000 title claims abstract description 42
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 238000000034 method Methods 0.000 title description 7
- 239000013078 crystal Substances 0.000 claims abstract description 53
- 150000001875 compounds Chemical class 0.000 claims abstract description 31
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 27
- 229910052788 barium Inorganic materials 0.000 claims abstract description 26
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 17
- 229910052791 calcium Inorganic materials 0.000 claims abstract description 16
- 239000000203 mixture Substances 0.000 claims abstract description 16
- 229910052749 magnesium Inorganic materials 0.000 claims abstract description 9
- 229910052748 manganese Inorganic materials 0.000 claims abstract description 9
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 9
- 229910052720 vanadium Inorganic materials 0.000 claims abstract description 9
- 239000000919 ceramic Substances 0.000 claims description 31
- 239000000843 powder Substances 0.000 claims description 27
- 238000010304 firing Methods 0.000 claims description 9
- 239000002002 slurry Substances 0.000 claims description 7
- 239000003990 capacitor Substances 0.000 claims description 2
- 239000002904 solvent Substances 0.000 claims description 2
- 239000011575 calcium Substances 0.000 description 29
- 239000000523 sample Substances 0.000 description 20
- 239000002245 particle Substances 0.000 description 19
- 239000002994 raw material Substances 0.000 description 6
- 230000005684 electric field Effects 0.000 description 4
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- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000010532 solid phase synthesis reaction Methods 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JXDXDSKXFRTAPA-UHFFFAOYSA-N calcium;barium(2+);oxygen(2-);titanium(4+) Chemical compound [O-2].[Ca+2].[Ti+4].[Ba+2] JXDXDSKXFRTAPA-UHFFFAOYSA-N 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000004993 emission spectroscopy Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
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- 229910052735 hafnium Inorganic materials 0.000 description 1
- 238000001027 hydrothermal synthesis Methods 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
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Abstract
Description
(A)誘電体セラミックの原料粉末の作製
まず、主成分であるチタン酸バリウム(以下BT)粉末とチタン酸バリウムカルシウム(以下BCT)粉末を用意した。具体的には、BaCO3粉末、CaCO3粉末、及びTiO2粉末を、Tiに対するBaとCaの合計含有量のモル比がm、BaとCaの含有量のモル比がBa:Ca=1−x:xとなるように秤量した。この秤量した粉末を、ボールミルにより24時間混合した後、熱処理を行い、主成分のBT粉末とBCT粉末を得た。BaCO3、CaCO3、及びTiO2の粒径と、熱処理温度を制御することにより、BT粉末とBCT粉末の平均粒径を約100nmに制御した。
まず、誘電体層となるべきセラミックグリーンシートを形成した。具体的には、上記の原料粉末に、ポリビニルブチラール系バインダと、エタノール等の有機溶媒を加えて、ボールミルにより湿式混合してセラミックスラリーを調製した。そして、このセラミックスラリーを、焼成後の誘電体層の厚さが所定の厚さとなるように、ダイコータによりシート状に成形して、セラミックグリーンシートを得た。
まず、結晶粒子の表面から4nm内側の位置でのDyの存在確率を算出した。
2 誘電体層
3、4 内部電極
5 積層体
6、7 外部電極
Claims (5)
- 結晶粒子と結晶粒界とを備えた積層されている複数の誘電体層と、前記誘電体層間の界面に沿って形成されている複数の内部電極と、を有する積層体と、前記積層体の外表面に形成され、前記内部電極と電気的に接続されている複数の外部電極と、を備える積層セラミックコンデンサにおいて、
前記積層体の組成が、Ba、Tiを含み、かつCaを任意で含むペロブスカイト型化合物を主成分とし、さらに希土類元素Rと、Mn、Mg、V、Siとを含み、
前記Tiを100モル部としたとき、
前記Baと前記Caの合計含有量(100×m)モル部が、0.950≦m<1.000であり、
前記Rの含有量aモル部が、0.3≦a≦2.5であり、
前記Mnの含有量bモル部が、0.05≦b≦0.5であり、
前記Mgの含有量cモル部が、0.5≦c≦2.0であり、
前記Vの含有量dモル部が、0.05≦d≦0.25であり、
前記Siの含有量eモル部が、0.5≦e≦3.0であり、
さらに、Ca/(Ba+Ca)のモル比xが、0≦x≦0.10であり、
さらに、前記結晶粒子の表面から4nm内側の位置での、前記希土類元素Rの存在確率が20%以上であることを特徴とする積層セラミックコンデンサ。 - 結晶粒子と結晶粒界とを備えた積層されている複数の誘電体層と、前記誘電体層間の界面に沿って形成されている複数の内部電極と、を有する積層体と、前記積層体の外表面に形成され、前記内部電極と電気的に接続されている複数の外部電極と、を備える積層セラミックコンデンサにおいて、
前記積層体の組成が、Ba、Tiを含み、かつCaを任意で含むペロブスカイト型化合物を主成分とし、さらに希土類元素Rと、Mn、Mg、V、Siとを含み、
前記積層体を溶剤により溶解したときの、前記Tiを100モル部としたとき、
前記Baと前記Caの合計含有量(100×m)モル部が、0.950≦m<1.000であり、
前記Rの含有量aモル部が、0.3≦a≦2.5であり、
前記Mnの含有量bモル部が、0.05≦b≦0.5であり、
前記Mgの含有量cモル部が、0.5≦c≦2.0であり、
前記Vの含有量dモル部が、0.05≦d≦0.25であり、
前記Siの含有量eモル部が、0.5≦e≦3.0であり、
さらに、Ca/(Ba+Ca)のモル比xが、0≦x≦0.10であり、
さらに、前記結晶粒子の表面から4nm内側の位置での、前記希土類元素Rの存在確率が20%以上であることを特徴とする積層セラミックコンデンサ。 - 結晶粒子と結晶粒界とを備えた積層されている複数の誘電体層と、前記誘電体層間の界面に沿って形成されている複数の内部電極と、を有する積層体と、前記積層体の外表面に形成され、前記内部電極と電気的に接続されている複数の外部電極と、を備える積層セラミックコンデンサにおいて、
前記誘電体層の組成が、Ba、Tiを含み、かつCaを任意で含むペロブスカイト型化合物を主成分とし、さらに希土類元素Rと、Mn、Mg、V、Siとを含み、
前記Tiを100モル部としたとき、
前記Baと前記Caの合計含有量(100×m)モル部が、0.950≦m<1.000であり、
前記Rの含有量aモル部が、0.3≦a≦2.5であり、
前記Mnの含有量bモル部が、0.05≦b≦0.5であり、
前記Mgの含有量cモル部が、0.5≦c≦2.0であり、
前記Vの含有量dモル部が、0.05≦d≦0.25であり、
前記Siの含有量eモル部が、0.5≦e≦3.0であり、
さらに、Ca/(Ba+Ca)のモル比xが、0≦x≦0.10であり、
さらに、前記結晶粒子の表面から4nm内側の位置での、前記希土類元素Rの存在確率が20%以上であることを特徴とする積層セラミックコンデンサ。 - 前記誘電体層の厚さが0.4μm以上1.5μm以下である、請求項1ないし3のいずれか1項に記載の積層セラミックコンデンサ。
- Ba、Tiを含み、かつCaを任意で含むペロブスカイト型化合物を主成分とする主成分粉末を用意する工程と、
希土類元素Rの化合物と、Mn化合物、Mg化合物、V化合物、Si化合物とを用意する工程と、
前記主成分粉末と、前記希土類元素Rの化合物と、前記Mn化合物、前記Mg化合物、前記V化合物、前記Si化合物とを混合し、その後、セラミックスラリーを得る工程と、
前記セラミックスラリーからセラミックグリーンシートを得る工程と、
前記セラミックグリーンシートと、内部電極層と、を積み重ねて焼成前の積層体を得る工程と、
前記焼成前の積層体を焼成して、誘電体層間に内部電極が形成された積層体を得る工程と、を備える積層セラミックコンデンサの製造方法であって、
前記Tiを100モル部としたとき、
前記Baと前記Caの合計含有量(100×m)モル部が、0.950≦m<1.000であり、
前記Rの含有量aモル部が、0.3≦a≦2.5であり、
前記Mnの含有量bモル部が、0.05≦b≦0.5であり、
前記Mgの含有量cモル部が、0.5≦c≦2.0であり、
前記Vの含有量dモル部が、0.05≦d≦0.25であり、
前記Siの含有量eモル部が、0.5≦e≦3.0であり、
さらに、Ca/(Ba+Ca)のモル比xが、0≦x≦0.10であり、
さらに、前記誘電体層は結晶粒子と結晶粒界とを備え、前記結晶粒子の表面から4nm内側の位置での、前記希土類元素Rの存在確率が20%以上であることを特徴とする積層セラミックコンデンサの製造方法。
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JP2017109904A (ja) * | 2015-12-17 | 2017-06-22 | 株式会社村田製作所 | ペロブスカイト型磁器組成物、ペロブスカイト型磁器組成物を含む配合組成物、ペロブスカイト型磁器組成物の製造方法、および積層セラミックコンデンサの製造方法 |
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JP2019134098A (ja) * | 2018-01-31 | 2019-08-08 | Tdk株式会社 | 積層セラミックコンデンサ |
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