JPWO2009110632A1 - SiGeフォトダイオード - Google Patents
SiGeフォトダイオード Download PDFInfo
- Publication number
- JPWO2009110632A1 JPWO2009110632A1 JP2010501996A JP2010501996A JPWO2009110632A1 JP WO2009110632 A1 JPWO2009110632 A1 JP WO2009110632A1 JP 2010501996 A JP2010501996 A JP 2010501996A JP 2010501996 A JP2010501996 A JP 2010501996A JP WO2009110632 A1 JPWO2009110632 A1 JP WO2009110632A1
- Authority
- JP
- Japan
- Prior art keywords
- layer
- sige
- electrode layer
- photodiode
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910000577 Silicon-germanium Inorganic materials 0.000 title claims abstract description 205
- 238000010521 absorption reaction Methods 0.000 claims abstract description 135
- 230000003287 optical effect Effects 0.000 claims abstract description 81
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 36
- 239000002184 metal Substances 0.000 claims abstract description 28
- 230000002441 reversible effect Effects 0.000 claims abstract description 22
- 239000004065 semiconductor Substances 0.000 claims description 181
- 239000000758 substrate Substances 0.000 claims description 61
- 230000000737 periodic effect Effects 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 17
- 229910052710 silicon Inorganic materials 0.000 abstract description 9
- 229910052732 germanium Inorganic materials 0.000 abstract description 5
- 239000010410 layer Substances 0.000 description 750
- 229910004298 SiO 2 Inorganic materials 0.000 description 82
- 239000012792 core layer Substances 0.000 description 65
- 230000001681 protective effect Effects 0.000 description 44
- 238000000034 method Methods 0.000 description 31
- 230000031700 light absorption Effects 0.000 description 28
- 238000005530 etching Methods 0.000 description 24
- 238000005253 cladding Methods 0.000 description 23
- 230000001902 propagating effect Effects 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 15
- 230000008878 coupling Effects 0.000 description 13
- 238000010168 coupling process Methods 0.000 description 13
- 238000005859 coupling reaction Methods 0.000 description 13
- 230000006870 function Effects 0.000 description 13
- 238000005468 ion implantation Methods 0.000 description 12
- 230000008569 process Effects 0.000 description 12
- 238000002161 passivation Methods 0.000 description 10
- 239000007789 gas Substances 0.000 description 9
- 239000012212 insulator Substances 0.000 description 9
- 239000000203 mixture Substances 0.000 description 9
- 238000000038 ultrahigh vacuum chemical vapour deposition Methods 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- 238000001994 activation Methods 0.000 description 6
- 239000000969 carrier Substances 0.000 description 6
- 238000009429 electrical wiring Methods 0.000 description 6
- 239000007943 implant Substances 0.000 description 6
- 238000004891 communication Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000013307 optical fiber Substances 0.000 description 5
- 230000004044 response Effects 0.000 description 5
- 230000007704 transition Effects 0.000 description 5
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000004913 activation Effects 0.000 description 4
- 238000000137 annealing Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 230000006798 recombination Effects 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 239000002800 charge carrier Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000005215 recombination Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- 229910004205 SiNX Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000010365 information processing Effects 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 230000036211 photosensitivity Effects 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 238000004151 rapid thermal annealing Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910020751 SixGe1-x Inorganic materials 0.000 description 1
- 229910008484 TiSi Inorganic materials 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007850 degeneration Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/105—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PIN type
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/028—Inorganic materials including, apart from doping material or other impurities, only elements of Group IV of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
- H01L31/03529—Shape of the potential jump barrier or surface barrier
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Optics & Photonics (AREA)
- Light Receiving Elements (AREA)
Abstract
Description
M. Oehme, J. Werner, E. Kasper, M. Jutzi, and M. Berroth, "High bandwidth Ge p-i-n photodetector integrated on Si", Applied Physics Letters Vol.89, 07117 (2006) (第071117−1頁、Fig.1) T. Yin, R. Cohen, M. M. Morse, G. Sarid, Y. Chetrit, D. Rubin, and M. J. Paniccia, "31GHz Ge n-i-p waveguide photodetectors on Silicon-on-Insulator substrate", Optics Express Vol.15, 13965, (2007) (第13967頁、Fig.1) J. Liu, D. D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. T. Danielson, J. Michel, and L. C. Kimerling, "Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications", Applied Physics Letters Vol.87, 011110, (2005) (第011110−1頁、Fig.1,第011110−2頁、Fig.2)
SixGe1−x半導体吸収層と、その上部に設ける上部電極層および下部に設ける下部電極層とで構成されるp−i−n型フォトダイオードであって、
該p−i−n型フォトダイオードは、
Si層の一部に形成される溝中に、前記SixGe1−x半導体吸収層が埋め込まれた構造を有し、
溝下部に形成された、p型あるいはn型にドーピングされた下部電極層と、
溝下部および側壁に形成された、Si真性半導体層およびSiGeバッファ層の積層構造と、
該積層構造の上の形成された、矩形形状あるいは逆テーパ形状からなる前記SixGe1−x半導体吸収層と、
溝上部に形成された、n型あるいはp型にドーピングされた上部電極層とを具えている
ことを特徴とするSiGeフォトダイオードである。
前記上部電極層の面積サイズSupper-electrode layerと、前記SixGe1−x半導体吸収層の下部面の面積サイズSbottom surfaceを、Sbottom surface>Supper-electrode layerの関係を満たすように選択していることが望ましい。
該p−i−n型フォトダイオードは、Si導波路と光接続されており、
前記Si真性半導体層およびSiGeバッファ層の積層構造を介して、SixGe1−x半導体吸収層は、Si導波路と光接続する際、
該光接続部位におけるインピーダンス整合がなされている形態を選択することが好ましい。
前記上部電極層と上部メタル電極層の電気的な接続は、多結晶Siからなるブリッジ構造により達成されている構造を採用することが好ましい。
該多結晶Siブリッジアレイは、複数の多結晶Siブリッジが周期的に配置される構造を有しており、
該周期的な構造により、波長領域の選択がなされている構造とすることも可能である。
上記の構成を有する本発明にかかるSiGeフォトダイオードを受光部に備えるLSI上の光配線システムでる。
上記の構成を有する本発明にかかるSiGeフォトダイオードが形成されたSi基板と、前記Si基板上に前記フォトダイオードとモノリシックに形成されたLSI電子回路とを具える光インタコネクションモジュールである。
2 溝部
3 n型あるいはp型下部電極層
4 i−Si層
5 SiGeバッファ層
6 SiGe光吸収層
7 p型あるいはn型上部電極層
8 上部電極規定SiO2膜
9 SiO2保護膜
10 上クラッド層
11 埋め込み酸化層
12 Si支持基板
13 Si導波路コア層
14 多結晶Siブリッジ
15 メタル電極層
16 SOI層
17 SiNxマスク
18 SiO2酸化層
19 n+ドープ層
20 電極規定SiO2マスク
21 光ファイバー
22 信号光
23 本発明にかかるフォトダイオード
24 モジュール筐体
25 電気配線
26 プリアンプIC
27 チップキャリア
28 VCSEL光源
29 光源および変調用電気配線ビア
30 フォトダイオード用電気配線ビア
31 LSIパーケージ
32 光源変調用電気配線層
33 フォトダイオード用電気配線層
34 光信号出力ファイバー
35 光信号入力ファイバー
36 LSI搭載ボード
37 凹面鏡
38 フォトダイオード/光源搭載ボード
溝下部に形成された、p型あるいはn型にドーピングされた下部電極層と、
溝下部および側壁に形成された、Si真性半導体層およびSiGeバッファ層の積層構造と、
該積層構造の上の形成された、矩形形状あるいは逆テーパ形状からなる前記SixGe1−x半導体吸収層と、
溝上部に形成された、n型あるいはp型にドーピングされた上部電極層とを具えている構造を選択している。
本発明の第一の形態にかかるSiGeフォトダイオードについて、具体例として、図4に示す構造を有する第一の実施形態のSiGeフォトダイオードを挙げて、詳しく説明する。
本発明の第二の形態にかかるSiGeフォトダイオードについて、具体例として、図6に示す構造を有する第二の実施形態のSiGeフォトダイオードを挙げて、詳しく説明する。
i−Si層4は、Si1-xGex半導体吸収層を導波路コアとした導波路におけるクラッドとして捉えることが可能であり、下部電極層3の膜厚と合せて膜厚を最適化することが望ましい。
本発明の第三の形態にかかるSiGeフォトダイオードについて、具体例として、図7に示す構造を有する第三の実施形態のSiGeフォトダイオードを挙げて、詳しく説明する。
図9は、本発明のpin型SiGeフォトダイオードを搭載した、40Gbps(ギガビット毎秒)伝送用光受信モジュールを示す。
図10は、本発明のフォトダイオードを搭載したLSIチップ間光インターコネクト構成を示す。
同様の構成を有する光インターコネクトにおいて、波長1300nmの光を用いる場合、フォトダイオードの半導体材料はSiGeである。SiGe製のフォトダイオードは、Si導波路コア層を伝送される光パワーを、ポリSiブリッジアレイにより波数マッチングして光結合させることにより、光電流を発生することで、フォトダイオード配線層26を通してLSIに光信号に対応した電流を流す。また、導波路端面をテーパ形状に囲うことにより、凹面鏡とフォトダイオードの位置に関する結合トレランスは、±1μm以上にとることが可能である。
Claims (7)
- SixGe1−x半導体吸収層と、その上部に設ける上部電極層および下部に設ける下部電極層とで構成されるp−i−n型フォトダイオードであって、
該p−i−n型フォトダイオードは、
Si層の一部に形成される溝中に、前記SixGe1−x半導体吸収層が埋め込まれた構造を有し、
溝下部に形成された、p型あるいはn型にドーピングされた下部電極層と、
溝下部および側壁に形成された、Si真性半導体層およびSiGeバッファ層の積層構造と、
該積層構造の上の形成された、矩形形状あるいは逆テーパ形状からなる前記SixGe1−x半導体吸収層と、
溝上部に形成された、n型あるいはp型にドーピングされた上部電極層とを具えている
ことを特徴とするSiGeフォトダイオード。 - 前記上部電極層は、前記SixGe1−x半導体吸収層の上部面上に形成され、
前記上部電極層の面積サイズSupper-electrode layerと、前記SixGe1−x半導体吸収層の下部面の面積サイズSbottom surfaceを、Sbottom surface>Supper-electrode layerの関係を満たすように選択している
ことを特徴とする請求項1に記載のSiGeフォトダイオード。 - 該p−i−n型フォトダイオードは、Si導波路と光接続されており、
前記Si真性半導体層およびSiGeバッファ層の積層構造を介して、SixGe1−x半導体吸収層は、Si導波路と光接続する際、
該光接続部位におけるインピーダンス整合がなされている
ことを特徴とする請求項1に記載のSiGeフォトダイオード。 - 前記上部電極層は、上部メタル電極層と電気的に接続されており、
前記上部電極層と上部メタル電極層の電気的な接続は、多結晶Siからなるブリッジ構造により達成されている
ことを特徴とする請求項1−3のいずれか一項に記載のSiGeフォトダイオード。 - 前記多結晶Siからなるブリッジ構造は、多結晶Siブリッジアレイにより構成されており、
該多結晶Siブリッジアレイは、複数の多結晶Siブリッジが周期的に配置される構造を有しており、
該周期的な構造により、波長領域の選択がなされている
ことを特徴とする請求項4に記載のSiGeフォトダイオード。 - 請求項1〜5のいずれか一項に記載のSiGeフォトダイオードを受光部に具えるLSI上の光配線システム。
- 請求項1〜5のいずれか一項に記載のSiGeフォトダイオードが形成されたSi基板と、前記Si基板上に前記フォトダイオードとモノリシックに形成されたLSI電子回路とを具える光インタコネクションモジュール。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010501996A JP5232981B2 (ja) | 2008-03-07 | 2009-03-09 | SiGeフォトダイオード |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008057961 | 2008-03-07 | ||
JP2008057961 | 2008-03-07 | ||
PCT/JP2009/054429 WO2009110632A1 (ja) | 2008-03-07 | 2009-03-09 | SiGeフォトダイオード |
JP2010501996A JP5232981B2 (ja) | 2008-03-07 | 2009-03-09 | SiGeフォトダイオード |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2009110632A1 true JPWO2009110632A1 (ja) | 2011-07-14 |
JP5232981B2 JP5232981B2 (ja) | 2013-07-10 |
Family
ID=41056179
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010501996A Active JP5232981B2 (ja) | 2008-03-07 | 2009-03-09 | SiGeフォトダイオード |
Country Status (3)
Country | Link |
---|---|
US (1) | US8269303B2 (ja) |
JP (1) | JP5232981B2 (ja) |
WO (1) | WO2009110632A1 (ja) |
Families Citing this family (59)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110084308A1 (en) * | 2007-08-08 | 2011-04-14 | Ter-Hoe Loh | Semiconductor arrangement and a method for manufacturing the same |
US7902620B2 (en) * | 2008-08-14 | 2011-03-08 | International Business Machines Corporation | Suspended germanium photodetector for silicon waveguide |
CN101666919B (zh) * | 2009-09-21 | 2012-06-27 | 浙江大学 | 一种具有刻蚀容差的硅狭缝波导电极 |
SG169922A1 (en) * | 2009-09-24 | 2011-04-29 | Taiwan Semiconductor Mfg | Improved semiconductor sensor structures with reduced dislocation defect densities and related methods for the same |
KR101683770B1 (ko) * | 2010-07-28 | 2016-12-08 | 삼성전자주식회사 | 광검출기 구조체 형성방법 |
JP2012231026A (ja) * | 2011-04-26 | 2012-11-22 | Toshiba Corp | 固体撮像装置 |
JP5969811B2 (ja) | 2011-05-09 | 2016-08-17 | アイメックImec | シリコン・フォトニクスプラットフォーム上でのフォトニックデバイスの共集積化方法 |
US8399949B2 (en) | 2011-06-30 | 2013-03-19 | Micron Technology, Inc. | Photonic systems and methods of forming photonic systems |
US8682129B2 (en) | 2012-01-20 | 2014-03-25 | Micron Technology, Inc. | Photonic device and methods of formation |
JP5917978B2 (ja) * | 2012-03-29 | 2016-05-18 | 株式会社日立製作所 | 半導体装置及びその製造方法 |
US8995805B2 (en) | 2012-04-20 | 2015-03-31 | Micron Technology, Inc. | Method and apparatus providing a coupled photonic structure |
US9122003B2 (en) * | 2012-07-18 | 2015-09-01 | Sumitomo Electric Industries, Ltd. | Semiconductor optical device |
US10119857B2 (en) * | 2012-08-17 | 2018-11-06 | Oracle International Corporation | Reflection-enhanced photo-detector |
WO2014041674A1 (ja) * | 2012-09-14 | 2014-03-20 | 株式会社日立製作所 | 半導体受光素子 |
CN106062970B (zh) | 2013-03-11 | 2018-05-08 | 英特尔公司 | 用于硅基光子集成电路的具有凹角镜的低电压雪崩光电二极管 |
JP6318468B2 (ja) * | 2013-05-01 | 2018-05-09 | 富士通株式会社 | 導波路型半導体受光装置及びその製造方法 |
KR102124207B1 (ko) * | 2013-06-03 | 2020-06-18 | 삼성전자주식회사 | 반도체 소자 및 그 제조 방법 |
EP3296805B1 (en) | 2013-06-12 | 2021-03-03 | Massachusetts Institute Of Technology | Optical modulator from standard fabrication processing |
FR3015114B1 (fr) * | 2013-12-13 | 2016-01-01 | Commissariat Energie Atomique | Procede de fabrication d'un photo-detecteur |
US9231131B2 (en) | 2014-01-07 | 2016-01-05 | International Business Machines Corporation | Integrated photodetector waveguide structure with alignment tolerance |
US9627575B2 (en) | 2014-09-11 | 2017-04-18 | International Business Machines Corporation | Photodiode structures |
US10571631B2 (en) | 2015-01-05 | 2020-02-25 | The Research Foundation For The State University Of New York | Integrated photonics including waveguiding material |
US9362444B1 (en) * | 2015-03-18 | 2016-06-07 | International Business Machines Corporation | Optoelectronics and CMOS integration on GOI substrate |
US11105974B2 (en) * | 2015-06-30 | 2021-08-31 | Massachusetts Institute Of Technology | Waveguide-coupled silicon-germanium photodetectors and fabrication methods for same |
WO2017058319A2 (en) * | 2015-06-30 | 2017-04-06 | Massachusetts Institute Of Technology | Waveguide-coupled silicon-germanium photodetectors and fabrication methods for same |
US10644187B2 (en) | 2015-07-24 | 2020-05-05 | Artilux, Inc. | Multi-wafer based light absorption apparatus and applications thereof |
WO2017019632A1 (en) * | 2015-07-24 | 2017-02-02 | Artilux Corporation | Multi-wafer based light absorption apparatus and applications thereof |
WO2017019013A1 (en) * | 2015-07-27 | 2017-02-02 | Hewlett Packard Enterprise Development Lp | Doped absorption devices |
US9647165B2 (en) * | 2015-08-20 | 2017-05-09 | GlobalFoundries, Inc. | Germanium photodetector with SOI doping source |
WO2017038072A1 (ja) * | 2015-08-28 | 2017-03-09 | 日本電信電話株式会社 | 光検出器 |
KR102421068B1 (ko) * | 2015-09-16 | 2022-07-14 | 엘지이노텍 주식회사 | 먼지 센서 |
KR102295386B1 (ko) * | 2015-10-01 | 2021-08-30 | 엘지이노텍 주식회사 | 유기 박막 포토다이오드 및 그를 포함하는 광 검출 장치 |
GB2552264B (en) | 2016-07-13 | 2021-06-02 | Rockley Photonics Ltd | Integrated structure and manufacturing method thereof |
JP2018056288A (ja) | 2016-09-28 | 2018-04-05 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
US10976491B2 (en) | 2016-11-23 | 2021-04-13 | The Research Foundation For The State University Of New York | Photonics interposer optoelectronics |
US10698156B2 (en) | 2017-04-27 | 2020-06-30 | The Research Foundation For The State University Of New York | Wafer scale bonded active photonics interposer |
US11126020B2 (en) * | 2017-11-23 | 2021-09-21 | Rockley Photonics Limited | Electro-optically active device |
EP3490000B1 (en) * | 2017-11-24 | 2023-01-04 | ams AG | Near-infrared photodetector semiconductor device |
KR102630173B1 (ko) * | 2017-12-27 | 2024-01-26 | 엘지디스플레이 주식회사 | 엑스레이검출장치 |
SG11202009807UA (en) | 2018-04-04 | 2020-11-27 | Univ New York State Res Found | Heterogeneous structure on an integrated photonics platform |
US10816724B2 (en) | 2018-04-05 | 2020-10-27 | The Research Foundation For The State University Of New York | Fabricating photonics structure light signal transmission regions |
US11550099B2 (en) | 2018-11-21 | 2023-01-10 | The Research Foundation For The State University Of New York | Photonics optoelectrical system |
US11029466B2 (en) | 2018-11-21 | 2021-06-08 | The Research Foundation For The State University Of New York | Photonics structure with integrated laser |
EP3754730B1 (en) * | 2019-06-18 | 2023-01-18 | ams AG | Semiconductor device for infrared detection, method of manufacturing semiconductor device for infrared detection and infrared detector |
US12015384B2 (en) | 2019-08-22 | 2024-06-18 | Artilux, Inc. | Photo-current amplification apparatus |
US11777049B2 (en) | 2019-08-28 | 2023-10-03 | Artilux, Inc. | Photo-detecting apparatus with low dark current |
US11393940B2 (en) * | 2019-09-20 | 2022-07-19 | Taiwan Semiconductor Manufacturing Co., Ltd. | Photodetector and method for forming the same |
US11393939B2 (en) * | 2019-09-20 | 2022-07-19 | Taiwan Semiconductor Manufacturing Company Ltd. | Photo sensing device and method of fabricating the photo sensing device |
US11404590B2 (en) * | 2019-09-20 | 2022-08-02 | Taiwan Semiconductor Manufacturing Company Ltd. | Photo sensing device and method of fabricating the photo sensing device |
US11067751B2 (en) * | 2019-10-09 | 2021-07-20 | Globalfoundries U.S. Inc. | Trench-based optical components for photonics chips |
US11610927B2 (en) * | 2020-02-27 | 2023-03-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Capping structure along image sensor element to mitigate damage to active layer |
US11837613B2 (en) * | 2020-05-29 | 2023-12-05 | Taiwan Semiconductor Manufacturing Company Limited | Germanium-containing photodetector and methods of forming the same |
KR102475560B1 (ko) * | 2020-11-12 | 2022-12-09 | 한국과학기술원 | 향상된 성능을 갖는 박막화된 초격자 광검출기 및 그의 제조 방법 |
US11742451B2 (en) * | 2020-11-24 | 2023-08-29 | Cisco Technology, Inc. | Integrate stressor with Ge photodiode using a substrate removal process |
US11769989B2 (en) * | 2021-02-24 | 2023-09-26 | Mellanox Technologies, Ltd. | Long wavelength VCSEL and integrated VCSEL systems on silicon substrates |
CN115084304A (zh) * | 2021-03-10 | 2022-09-20 | 中芯国际集成电路制造(上海)有限公司 | 半导体结构及其形成方法 |
JP6970845B1 (ja) * | 2021-03-29 | 2021-11-24 | 技術研究組合光電子融合基盤技術研究所 | 光半導体素子及びその製造方法 |
US20220359770A1 (en) * | 2021-05-04 | 2022-11-10 | Artilux, Inc. | Optical sensing apparatus |
US11927819B2 (en) * | 2021-11-10 | 2024-03-12 | Hewlett Packard Enterprise Development Lp | Optical device having a light-emitting structure and a waveguide integrated capacitor to monitor light |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4555622A (en) | 1982-11-30 | 1985-11-26 | At&T Bell Laboratories | Photodetector having semi-insulating material and a contoured, substantially periodic surface |
JPH0794806A (ja) | 1993-09-20 | 1995-04-07 | Sony Corp | 量子箱集合素子及び光入出力方法 |
JP2701754B2 (ja) | 1994-10-03 | 1998-01-21 | 日本電気株式会社 | シリコン受光素子の製造方法 |
JP2705757B2 (ja) | 1995-01-23 | 1998-01-28 | 工業技術院長 | 受光素子 |
JP2666888B2 (ja) | 1995-01-23 | 1997-10-22 | 工業技術院長 | 光素子の製造方法 |
JP2748914B2 (ja) | 1996-01-25 | 1998-05-13 | 日本電気株式会社 | 光検出用半導体装置 |
JP2910696B2 (ja) | 1996-09-20 | 1999-06-23 | 日本電気株式会社 | 半導体光検出器 |
JP2867983B2 (ja) | 1996-12-03 | 1999-03-10 | 日本電気株式会社 | フォトディテクタおよびその製造方法 |
JP3016371B2 (ja) | 1997-03-26 | 2000-03-06 | 日本電気株式会社 | 光検出器の製造方法 |
JPH11238902A (ja) * | 1998-02-19 | 1999-08-31 | Nec Corp | 半導体光検出装置及び半導体光検出装置の製造方法 |
JP2000298218A (ja) | 1999-04-13 | 2000-10-24 | Hitachi Ltd | 光インターコネクト装置およびその製造方法 |
JP2003163361A (ja) * | 2001-11-29 | 2003-06-06 | Mitsubishi Electric Corp | 受光素子および光通信デバイス |
JP2004172609A (ja) | 2002-11-05 | 2004-06-17 | Alps Electric Co Ltd | 光電変換素子およびその製造方法 |
US6897498B2 (en) | 2003-03-31 | 2005-05-24 | Sioptical, Inc. | Polycrystalline germanium-based waveguide detector integrated on a thin silicon-on-insulator (SOI) platform |
US7138697B2 (en) | 2004-02-24 | 2006-11-21 | International Business Machines Corporation | Structure for and method of fabricating a high-speed CMOS-compatible Ge-on-insulator photodetector |
JP2006133723A (ja) | 2004-10-08 | 2006-05-25 | Sony Corp | 光導波モジュール及び光・電気複合デバイス、並びにこれらの製造方法 |
WO2007105593A1 (ja) * | 2006-03-13 | 2007-09-20 | Nec Corporation | フォトダイオード、およびその製造方法、ならびに光通信デバイスおよび光インタコネクションモジュール |
-
2009
- 2009-03-09 JP JP2010501996A patent/JP5232981B2/ja active Active
- 2009-03-09 WO PCT/JP2009/054429 patent/WO2009110632A1/ja active Application Filing
- 2009-03-09 US US12/919,638 patent/US8269303B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20110012221A1 (en) | 2011-01-20 |
WO2009110632A1 (ja) | 2009-09-11 |
US8269303B2 (en) | 2012-09-18 |
JP5232981B2 (ja) | 2013-07-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5232981B2 (ja) | SiGeフォトダイオード | |
US9530905B2 (en) | Microstructure enhanced absorption photosensitive devices | |
US7800193B2 (en) | Photodiode, method for manufacturing such photodiode, optical communication device and optical interconnection module | |
JP5282887B2 (ja) | フォトダイオード、光通信デバイスおよび光インタコネクションモジュール | |
US7728366B2 (en) | Photodiode and method for fabricating same | |
CN108447938B (zh) | 光电探测器 | |
JP6793786B1 (ja) | 半導体受光素子、光電融合モジュール及びアバランシェフォトダイオードの製造方法 | |
JP2008526003A (ja) | ゲルマニウムオンシリコンの光検出器 | |
JP2017076651A (ja) | 半導体受光装置 | |
JPWO2008136479A1 (ja) | 導波路結合型フォトダイオード | |
JP2019212820A (ja) | 光半導体素子及び光伝送装置 | |
JP6527611B1 (ja) | 半導体受光素子、光電融合モジュール、半導体受光素子の製造方法 | |
US20190019903A1 (en) | SILICON WAVEGUIDE INTEGRATED WITH SILICON-GERMANIUM (Si-Ge) AVALANCHE PHOTODIODE DETECTOR | |
WO2019089437A1 (en) | Microstructure enhanced absorption photosensitive devices | |
CN109075219B (zh) | 光波导集成光接收元件及其制造方法 | |
US20130113064A1 (en) | Photodetector, optical communication device equipped with the same, method for making of photodetector, and method for making of optical communication device | |
Colace et al. | Waveguide photodetectors for the near-infrared in polycrystalline germanium on silicon | |
WO2008080428A1 (en) | Waveguide photodetector in germanium on silicon | |
JP6115566B2 (ja) | 導波路結合msm型フォトダイオード | |
JP6726248B2 (ja) | 半導体受光素子、及び光電融合モジュール | |
US20230085007A1 (en) | Photodetector and photonic integrated device | |
CN117038776A (zh) | 暗电流消除的硅基锗pin探测器及半导体设备 | |
CN117038773A (zh) | 一种基于微环结构的多通道光电探测器 | |
Lyszczarz et al. | Jurgen Michel, Steven J. Koester, Jifeng Liu, Xiaoxin Wang, Michael W. Geis, Steven J. Spector, Matthew E. Grein, Jung U. Yoon |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120208 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130205 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130218 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5232981 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20160405 Year of fee payment: 3 |