JP5969811B2 - シリコン・フォトニクスプラットフォーム上でのフォトニックデバイスの共集積化方法 - Google Patents
シリコン・フォトニクスプラットフォーム上でのフォトニックデバイスの共集積化方法 Download PDFInfo
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- JP5969811B2 JP5969811B2 JP2012106604A JP2012106604A JP5969811B2 JP 5969811 B2 JP5969811 B2 JP 5969811B2 JP 2012106604 A JP2012106604 A JP 2012106604A JP 2012106604 A JP2012106604 A JP 2012106604A JP 5969811 B2 JP5969811 B2 JP 5969811B2
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 109
- 229910052710 silicon Inorganic materials 0.000 title claims description 104
- 239000010703 silicon Substances 0.000 title claims description 102
- 238000000034 method Methods 0.000 title claims description 73
- 239000000758 substrate Substances 0.000 claims description 31
- 230000008569 process Effects 0.000 claims description 27
- 239000002184 metal Substances 0.000 claims description 21
- 230000010354 integration Effects 0.000 claims description 16
- 238000005530 etching Methods 0.000 claims description 15
- 230000007547 defect Effects 0.000 claims description 13
- 208000012868 Overgrowth Diseases 0.000 claims description 12
- 238000010521 absorption reaction Methods 0.000 claims description 11
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 3
- 238000000137 annealing Methods 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 3
- 230000008901 benefit Effects 0.000 description 12
- 230000003287 optical effect Effects 0.000 description 12
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 7
- 229910052732 germanium Inorganic materials 0.000 description 5
- 230000004043 responsiveness Effects 0.000 description 5
- 238000004088 simulation Methods 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 4
- 238000011065 in-situ storage Methods 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 239000012212 insulator Substances 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000007943 implant Substances 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 238000004886 process control Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/105—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PIN type
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Optics & Photonics (AREA)
- Light Receiving Elements (AREA)
- Optical Integrated Circuits (AREA)
Description
Claims (14)
- シリコンベースのフォトニクスプラットフォーム上で、フォトニックデバイス、Ge導波路一体型光検出器、およびハイブリッドIII−V/Siレーザの共集積化のための方法であって、
・パターン化したシリコン導波路構造を含むシリコンデバイスを備えた、平坦化したシリコンベースのフォトニクス基板を用意することと、
・誘電体層、例えば、SiO2層を、平坦化したシリコンベースのフォトニクス基板の上部に堆積することと、
・適切なエッチング深さで溝を前記誘電体層にエッチング形成して、前記フォトニクス基板のパターン化したシリコン導波路構造を露出させることと、
・露出した導波路を選択エッチングして、Ge成長用のテンプレートを作成し、薄いシリコン層をGe成長用のシード層として残すことと、
・意図的なGe過成長を伴って、前記シード層からGeを選択成長させることと、
・Ge表面を平坦化し、減少した厚さを持つGe層を残すことと、を含む方法。 - 前記Ge表面を平坦化する前に、成長後アニールを行って、Ge層中の欠陥密度を減少させることをさらに含む請求項1記載の方法。
- 減少した厚さを持つ前記Ge層は、100nm〜500nmの厚さを有する請求項1または2記載の方法。
- 前記Ge表面を平坦化することは、CMPプロセスを含む請求項1〜3のいずれかに記載の方法。
- Ge光検出器の処理をさらに含む請求項1〜4のいずれかに記載の方法。
- Ge光検出器への金属コンタクトを、光学活性領域からある距離に設けて、その結果、コンタクトでの吸収損失を所定の閾値未満に制限することをさらに含む請求項1〜5のいずれかに記載の方法。
- 「反転リブ」(T字状)Ge層が得られるように、Ge成長用のテンプレートを選択することをさらに含む請求項1〜6のいずれかに記載の方法。
- 前記「反転リブ」は、250nm〜300nm厚の光学活性領域を備え、光学活性領域は、より薄い横方向張り出し部を備え、横方向張り出し部の上に金属コンタクトが設けられる請求項7記載の方法。
- Ge成長用のテンプレートは、「横方向過成長」(L字状)Ge層が得られるように選択され、
Ge内の光学活性領域は、シリコン導波路上での横方向過成長によって形成される請求項1〜8のいずれかに記載の方法。 - Ge成長用のテンプレートは、Geの光学活性領域がシード層から横方向に配置されるように選択され、こうしてシード層近くの欠陥から充分に大きな横方向距離に配置され、暗電流を所定の閾値未満に低減している請求項9記載の方法。
- ハイブリッドIII−Vシリコン・レーザの集積化のための基板に、III−V層を接合することをさらに含む請求項1〜10のいずれかに記載の方法。
- 前記III−V層は、前記フォトニクス基板のシリコン導波路構造から、100nm未満の垂直距離に設けられる請求項11記載の方法。
- 単一の一般的なBEOL(Back-End Of Line)プロセスを実施して、ハイブリッドIII−Vシリコンレーザ、Ge光検出器およびシリコンデバイスを接触させることをさらに含む請求項11または12記載の方法。
- 前記平坦化したシリコンベースのフォトニクス基板を用意することは、ダミー構造を前記シリコンベースのフォトニクス基板の上に設けることと、前記シリコンベースのフォトニクス基板をCMPによって平坦化することとを含み、
前記ダミー構造は、Ge成長用のシード層として使用され、これによりGeベースのダミー構造を作成でき、CMPを用いてGe層の良好な平坦化を可能にする請求項1〜13のいずれかに記載の方法。
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US201161484064P | 2011-05-09 | 2011-05-09 | |
US61/484,064 | 2011-05-09 |
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JP2012256869A JP2012256869A (ja) | 2012-12-27 |
JP5969811B2 true JP5969811B2 (ja) | 2016-08-17 |
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US (1) | US8741684B2 (ja) |
EP (1) | EP2523026B1 (ja) |
JP (1) | JP5969811B2 (ja) |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9368579B2 (en) | 2012-02-07 | 2016-06-14 | The Board Of Trustees Of The Leland Stanford Junior University | Selective area growth of germanium and silicon-germanium in silicon waveguides for on-chip optical interconnect applications |
US20140270629A1 (en) * | 2013-03-15 | 2014-09-18 | Apic Corporation | Optical waveguide network of an interconnecting ic module |
JP6020295B2 (ja) * | 2013-03-28 | 2016-11-02 | 富士通株式会社 | Si光集積回路装置及びその製造方法 |
US9407066B2 (en) | 2013-07-24 | 2016-08-02 | GlobalFoundries, Inc. | III-V lasers with integrated silicon photonic circuits |
US9048371B2 (en) * | 2013-10-03 | 2015-06-02 | Globalfoundries Singapore Pte. Ltd. | Semiconductor devices including avalanche photodetector diodes integrated on waveguides and methods for fabricating the same |
US9442259B2 (en) | 2013-11-11 | 2016-09-13 | Sumitomo Electric Industries, Ltd. | Method for producing optical assembly and optical assembly |
US9231131B2 (en) | 2014-01-07 | 2016-01-05 | International Business Machines Corporation | Integrated photodetector waveguide structure with alignment tolerance |
US9766484B2 (en) | 2014-01-24 | 2017-09-19 | Cisco Technology, Inc. | Electro-optical modulator using waveguides with overlapping ridges |
US9461090B2 (en) | 2014-07-03 | 2016-10-04 | Globalfoundries Inc. | Photodetector and method of forming the photodetector on stacked trench isolation regions |
US9627575B2 (en) | 2014-09-11 | 2017-04-18 | International Business Machines Corporation | Photodiode structures |
US10571631B2 (en) | 2015-01-05 | 2020-02-25 | The Research Foundation For The State University Of New York | Integrated photonics including waveguiding material |
US9372307B1 (en) * | 2015-03-30 | 2016-06-21 | International Business Machines Corporation | Monolithically integrated III-V optoelectronics with SI CMOS |
US10288804B2 (en) | 2015-07-06 | 2019-05-14 | University Of Houston System | Method to fabricate chip-scale electronic photonic (plasmonic)-integrated circuits |
JP2017022175A (ja) * | 2015-07-07 | 2017-01-26 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
JP6641765B2 (ja) * | 2015-08-05 | 2020-02-05 | 富士通オプティカルコンポーネンツ株式会社 | 光通信装置、及び、光モジュール |
JP6533131B2 (ja) * | 2015-09-04 | 2019-06-19 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP6545608B2 (ja) * | 2015-11-30 | 2019-07-17 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
JP2017146364A (ja) * | 2016-02-15 | 2017-08-24 | 富士通株式会社 | 光半導体装置及び光半導体モジュール |
CN105655417B (zh) | 2016-02-29 | 2017-07-28 | 华为技术有限公司 | 光波导探测器与光模块 |
US9711662B1 (en) * | 2016-04-21 | 2017-07-18 | Globalfoundries Singapore Pte. Ltd. | Integrated circuits with optical modulators and photodetectors and methods for producing the same |
CN109642985B (zh) * | 2016-07-13 | 2021-03-12 | 洛克利光子有限公司 | 模式转换器及其制造方法 |
US10976491B2 (en) | 2016-11-23 | 2021-04-13 | The Research Foundation For The State University Of New York | Photonics interposer optoelectronics |
US9927572B1 (en) | 2017-01-04 | 2018-03-27 | Hewlett Packard Enterprise Development Lp | Hybrid photonic device structures |
US10698156B2 (en) | 2017-04-27 | 2020-06-30 | The Research Foundation For The State University Of New York | Wafer scale bonded active photonics interposer |
FR3067866B1 (fr) * | 2017-06-19 | 2022-01-14 | Commissariat Energie Atomique | Composant laser semiconducteur hybride et procede de fabrication d'un tel composant |
CN108461629A (zh) * | 2018-03-02 | 2018-08-28 | 福建省福芯电子科技有限公司 | 硅基射频电容及其制备方法 |
FR3078826B1 (fr) * | 2018-03-07 | 2022-01-14 | St Microelectronics Crolles 2 Sas | Photodiode verticale |
EP3776074B1 (en) | 2018-04-04 | 2023-11-22 | The Research Foundation for the State University of New York | Heterogeneous structure on an integrated photonics platform |
US10816724B2 (en) | 2018-04-05 | 2020-10-27 | The Research Foundation For The State University Of New York | Fabricating photonics structure light signal transmission regions |
FR3082354B1 (fr) * | 2018-06-08 | 2020-07-17 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Puce photonique traversee par un via |
US10690853B2 (en) | 2018-06-25 | 2020-06-23 | International Business Machines Corporation | Optoelectronics integration using semiconductor on insulator substrate |
KR102601212B1 (ko) | 2018-10-10 | 2023-11-10 | 삼성전자주식회사 | 광전 소자를 포함하는 집적 회로 소자 |
US11550099B2 (en) * | 2018-11-21 | 2023-01-10 | The Research Foundation For The State University Of New York | Photonics optoelectrical system |
TWI829761B (zh) | 2018-11-21 | 2024-01-21 | 紐約州立大學研究基金會 | 具有積體雷射的光學結構 |
CN114830332A (zh) * | 2019-10-18 | 2022-07-29 | 光量子计算公司 | 在衬底上制造并包含在衬底上外延生长的铁电层的电光装置 |
US11810986B2 (en) * | 2019-11-15 | 2023-11-07 | Institute of Microelectronics, Chinese Academy of Sciences | Method for integrating surface-electrode ion trap and silicon photoelectronic device, integrated structure, and three-dimensional structure |
US11581452B2 (en) * | 2020-01-10 | 2023-02-14 | Newport Fab, Llc | Semiconductor structure having group III-V device on group IV substrate and contacts with precursor stacks |
US11233159B2 (en) | 2020-01-10 | 2022-01-25 | Newport Fab, Llc | Fabrication of semiconductor structure having group III-V device on group IV substrate with separately formed contacts using different metal liners |
US11349280B2 (en) | 2020-01-10 | 2022-05-31 | Newport Fab, Llc | Semiconductor structure having group III-V device on group IV substrate |
US11296482B2 (en) | 2020-01-10 | 2022-04-05 | Newport Fab, Llc | Semiconductor structure having group III-V chiplet on group IV substrate and cavity in proximity to heating element |
US11545587B2 (en) | 2020-01-10 | 2023-01-03 | Newport Fab, Llc | Semiconductor structure having group III-V device on group IV substrate and contacts with liner stacks |
US11929442B2 (en) | 2020-01-10 | 2024-03-12 | Newport Fab, Llc | Structure and method for process control monitoring for group III-V devices integrated with group IV substrate |
US11256114B2 (en) * | 2020-02-11 | 2022-02-22 | Taiwan Semiconductor Manufacturing Company Limited | Semiconductor device and method of making |
US11764543B2 (en) | 2020-04-23 | 2023-09-19 | Mellanox Technologies, Ltd. | Integration of modulator and laser in a single chip |
WO2021227912A1 (zh) * | 2020-05-14 | 2021-11-18 | 上海新微技术研发中心有限公司 | 基于硅光转接板技术的硅基光电子器件及制备方法 |
CN112186075B (zh) * | 2020-10-10 | 2023-05-23 | 中国科学院微电子研究所 | 一种波导型光电探测器及制造方法 |
US20230091834A1 (en) * | 2021-09-22 | 2023-03-23 | Intel Corporation | Optical waveguide formed within in a glass layer |
CN114400236B (zh) * | 2022-01-16 | 2024-04-26 | Nano科技(北京)有限公司 | 集成硅光调制器和锗硅探测器的硅光集成芯片及制备方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1998008077A1 (de) * | 1996-08-16 | 1998-02-26 | Novartis Ag | Optische detektionsvorrichtung |
JPH10290023A (ja) | 1997-04-15 | 1998-10-27 | Nec Corp | 半導体光検出器 |
US7453132B1 (en) | 2002-06-19 | 2008-11-18 | Luxtera Inc. | Waveguide photodetector with integrated electronics |
US7012314B2 (en) * | 2002-12-18 | 2006-03-14 | Agere Systems Inc. | Semiconductor devices with reduced active region defects and unique contacting schemes |
US6897498B2 (en) | 2003-03-31 | 2005-05-24 | Sioptical, Inc. | Polycrystalline germanium-based waveguide detector integrated on a thin silicon-on-insulator (SOI) platform |
US7209623B2 (en) | 2005-05-03 | 2007-04-24 | Intel Corporation | Semiconductor waveguide-based avalanche photodetector with separate absorption and multiplication regions |
JP4621081B2 (ja) * | 2005-07-07 | 2011-01-26 | Okiセミコンダクタ株式会社 | 半導体装置の製造方法 |
FR2896337A1 (fr) * | 2006-01-17 | 2007-07-20 | St Microelectronics Crolles 2 | Procede de realisation d'une couche monocristalline sur une couche dielectrique |
US7613369B2 (en) | 2006-04-13 | 2009-11-03 | Luxtera, Inc. | Design of CMOS integrated germanium photodiodes |
FR2910700B1 (fr) * | 2006-12-21 | 2009-03-20 | Commissariat Energie Atomique | PROCEDE DE FABRICATION D'UN SUBSTRAT SOI ASSOCIANT DES ZONES A BASE DE SILICIUM ET DES ZONES A BASE DE GaAs |
US7790495B2 (en) * | 2007-10-26 | 2010-09-07 | International Business Machines Corporation | Optoelectronic device with germanium photodetector |
US8269303B2 (en) | 2008-03-07 | 2012-09-18 | Nec Corporation | SiGe photodiode |
US7972922B2 (en) * | 2008-11-21 | 2011-07-05 | Freescale Semiconductor, Inc. | Method of forming a semiconductor layer |
JP5204059B2 (ja) * | 2009-09-04 | 2013-06-05 | 日本電信電話株式会社 | 光検出器の製造方法 |
WO2011104317A1 (en) * | 2010-02-24 | 2011-09-01 | Universiteit Gent | Laser light coupling into soi cmos photonic integrated circuit |
-
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US20120288971A1 (en) | 2012-11-15 |
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