JPWO2009057373A1 - 誘電体磁器および積層セラミックコンデンサ - Google Patents
誘電体磁器および積層セラミックコンデンサ Download PDFInfo
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- JPWO2009057373A1 JPWO2009057373A1 JP2009538968A JP2009538968A JPWO2009057373A1 JP WO2009057373 A1 JPWO2009057373 A1 JP WO2009057373A1 JP 2009538968 A JP2009538968 A JP 2009538968A JP 2009538968 A JP2009538968 A JP 2009538968A JP WO2009057373 A1 JPWO2009057373 A1 JP WO2009057373A1
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- dielectric
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- barium titanate
- crystal
- dielectric ceramic
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- 239000003985 ceramic capacitor Substances 0.000 title claims abstract description 27
- 229910052573 porcelain Inorganic materials 0.000 title claims abstract description 9
- 239000013078 crystal Substances 0.000 claims abstract description 174
- 239000000919 ceramic Substances 0.000 claims abstract description 110
- 239000002245 particle Substances 0.000 claims abstract description 84
- 229910002113 barium titanate Inorganic materials 0.000 claims abstract description 64
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims abstract description 64
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 50
- 239000011575 calcium Substances 0.000 claims abstract description 28
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229910052720 vanadium Inorganic materials 0.000 claims abstract description 20
- 229910052749 magnesium Inorganic materials 0.000 claims abstract description 18
- 239000011777 magnesium Substances 0.000 claims abstract description 18
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 claims abstract description 17
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims abstract description 16
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910052791 calcium Inorganic materials 0.000 claims abstract description 16
- 229910052788 barium Inorganic materials 0.000 claims description 20
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims description 18
- 239000011572 manganese Substances 0.000 claims description 16
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims description 14
- 229910052769 Ytterbium Inorganic materials 0.000 claims description 14
- 229910052748 manganese Inorganic materials 0.000 claims description 14
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 claims description 14
- 238000002441 X-ray diffraction Methods 0.000 claims description 13
- 229910052727 yttrium Inorganic materials 0.000 claims description 13
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 13
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 11
- 229910052691 Erbium Inorganic materials 0.000 claims description 11
- 229910052689 Holmium Inorganic materials 0.000 claims description 11
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 claims description 11
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 claims description 11
- KJZYNXUDTRRSPN-UHFFFAOYSA-N holmium atom Chemical compound [Ho] KJZYNXUDTRRSPN-UHFFFAOYSA-N 0.000 claims description 11
- 229910052771 Terbium Inorganic materials 0.000 claims description 7
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 claims description 7
- 238000009413 insulation Methods 0.000 abstract description 45
- 238000012360 testing method Methods 0.000 abstract description 21
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 abstract description 2
- 239000000843 powder Substances 0.000 description 101
- 238000010304 firing Methods 0.000 description 19
- 239000003990 capacitor Substances 0.000 description 16
- 239000000203 mixture Substances 0.000 description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 12
- 230000001965 increasing effect Effects 0.000 description 11
- 238000004458 analytical method Methods 0.000 description 10
- 230000007423 decrease Effects 0.000 description 10
- 239000000654 additive Substances 0.000 description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 239000001301 oxygen Substances 0.000 description 8
- 229910052760 oxygen Inorganic materials 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 239000011258 core-shell material Substances 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- 238000005245 sintering Methods 0.000 description 6
- 101100513612 Microdochium nivale MnCO gene Proteins 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 230000000996 additive effect Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 239000006104 solid solution Substances 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 238000000921 elemental analysis Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000010953 base metal Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 239000002003 electrode paste Substances 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000012046 mixed solvent Substances 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 238000010405 reoxidation reaction Methods 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910018068 Li 2 O Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000001479 atomic absorption spectroscopy Methods 0.000 description 1
- 239000012752 auxiliary agent Substances 0.000 description 1
- 150000001553 barium compounds Chemical class 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000009824 pressure lamination Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 239000012086 standard solution Substances 0.000 description 1
- LLZRNZOLAXHGLL-UHFFFAOYSA-J titanic acid Chemical compound O[Ti](O)(O)O LLZRNZOLAXHGLL-UHFFFAOYSA-J 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
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- H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
- H01G4/1218—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates
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- C04B35/4682—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates based on BaTiO3 perovskite phase
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- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/02—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances
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Abstract
Description
<積層セラミックコンデンサの作製>
まず、原料粉末として、BT粉末、BCT粉末(組成は(Ba1−xCax)TiO3、 X=0.05)、MgO粉末、Y2O3粉末、Dy2O3粉末、Ho2O3粉末、Er2O3粉末、Tb4O7粉末(第2希土類元素)、MnCO3粉末およびV2O5粉末を準備し、これらの各種粉末を表1に示す割合で混合した。これらの原料粉末は純度が99.9%のものを用いた。
<評価>
得られた積層セラミックコンデンサについて以下の評価を行った。評価はいずれも試料数10個とし、その平均値を求めた。
(1)比誘電率
静電容量を温度25℃、周波数1.0kHz、測定電圧1Vrmsの測定条件で測定し、得られた静電容量から誘電体層の厚み、内部電極層の全面積および真空の誘電率をもとに換算して求めた。
(2)誘電損失
静電容量と同条件で測定した。
(3)比誘電率の温度特性
静電容量を温度−55〜125℃の範囲で測定して求めた。
(4)絶縁抵抗
直流電圧3.15V/μmおよび12.5V/μmの条件にて評価した。絶縁抵抗は直流電圧を印加1分後の値を読み取った
(5)高温負荷試験
温度170℃において、印加電圧30V(15V/μm)の条件で行った。高温負荷試験での試料数は各試料20個とした。
(6)第1の結晶群を構成する結晶粒子および第2の結晶群を構成する結晶粒子からなる結晶粒子の平均粒径
誘電体磁器の断面を透過電子顕微鏡にて観察可能となる状態まで研磨(イオンミリング)した研磨面について、透過電子顕微鏡にて映し出されている画像をコンピュータに取り込んで、その画面上で対角線を引き、その対角線上に存在する結晶粒子の輪郭を画像処理し、各粒子の面積を求め、同じ面積をもつ円に置き換えたときの直径を算出し、算出した結晶粒子約50個の平均値として求めた。また、誘電体粉末からの粒成長の割合を{(結晶粒子の平均粒径)/(誘電体粉末の平均粒径)}×100(%)として評価した。
(7)b/(a+b)の測定
結晶粒子中のCa濃度について、積層セラミックコンデンサの積層方向の断面を研磨した誘電体層の研磨面に存在する約30個の結晶粒子に対して、元素分析機器を付設した透過型電子顕微鏡を用いて元素分析を行った。このとき電子線のスポットサイズは5nmとし、分析する箇所は、結晶粒子の粒界付近から中央部へ向けて引いた直線上のほぼ等間隔に位置する点とした。分析する箇所は結晶粒子の粒界付近から中央部の中心の位置までの範囲で、その中心へ向けて引いた直線上のほぼ等間隔に位置する点とし、分析値は粒界付近と中心との間で4〜5点ほど分析した値の平均値とし、結晶粒子の各測定点から検出されるBa、Ti、Ca、V、Mg、希土類元素およびMnの全量を100%として、そのときのCaの濃度を求めた。
(8)試料の組成分析
得られた焼結体である試料の組成分析はICP分析もしくは原子吸光分析により行った。この場合、得られた誘電体磁器を硼酸と炭酸ナトリウムと混合し溶融させたものを塩酸に溶解させて、まず、原子吸光分析により誘電体磁器に含まれる元素の定性分析を行い、次いで、特定した各元素について標準液を希釈したものを標準試料として、ICP発光分光分析にかけて定量化した。また、各元素の価数を周期表に示される価数として酸素量を求めた。
[実施例2]
実施例1に示した本発明の試料である各組成に、さらにイッテルビウムをYb2O3換算で0.35モル添加して、実施例1と同様の方法で試料を作製し評価した(試料No.2−1〜24)。
Claims (7)
- チタン酸バリウムを主成分とし、
該チタン酸バリウムを構成するバリウム100モルに対して、
バナジウムをV2O5換算で0.05〜0.3モル、
マグネシウムをMgO換算で0〜0.1モル、
マンガンをMnO換算で0〜0.5モル、
イットリウム,ジスプロシウム,ホルミウムおよびエルビウムから選ばれる1種の希土類元素(RE)をRE2O3換算で0.5〜1.5モル含み、
さらにカルシウムを含むとともに、
結晶粒子として、
前記チタン酸バリウムを主体とし、前記カルシウムの濃度が0.2原子%以下の結晶粒子からなる第1の結晶群と、
前記チタン酸バリウムを主体とし、前記カルシウムの濃度が0.4原子%以上の結晶粒子からなる第2の結晶群と
を有する誘電体磁器であって、
該誘電体磁器のX線回折チャートにおいて、正方晶系のチタン酸バリウムを示す(004)面の回折強度が、立方晶系のチタン酸バリウムを示す(004)面の回折強度よりも大きく、
かつ前記誘電体磁器の研磨面に見られる前記第1の結晶群を構成する結晶粒子の面積をa、前記第2の結晶群を構成する結晶粒子の面積をbとしたときに、b/(a+b)が0.4〜0.7であるとともに、
前記第1の結晶群を構成する結晶粒子および前記第2の結晶群を構成する結晶粒子の平均粒径が0.21〜0.28μmであることを特徴とする誘電体磁器。 - 前記マグネシウムがMgO換算で0モルであることを特徴とする請求項1に記載の誘電体磁器。
- 前記マンガンがMnO換算で0モルであることを特徴とする請求項2に記載の誘電体磁器。
- 前記チタン酸バリウムを構成するバリウム100モルに対して、さらにテルビウムをTb4O7換算で0.3モル以下含有することを特徴とする請求項1乃至3のうちいずれかに記載の誘電体磁器。
- 前記チタン酸バリウムを構成するバリウム100モルに対して、さらにイッテルビウムをYb2O3換算で0.3〜0.7モル含有することを特徴とする請求項1乃至4のうちいずれかに記載の誘電体磁器。
- 前記正方晶系のチタン酸バリウムを示す(004)面の回折強度をIxt、前記立方晶系のチタン酸バリウムを示す(004)面の回折強度をIxcとしたときに、Ixt/Ixc比が1.4以上であることを特徴とする請求項1乃至5のうちいずれかに記載の誘電体磁器。
- 請求項1乃至6のうちいずれかに記載の誘電体磁器からなる誘電体層と内部電極層とを交互に積層した積層体と、該積層体の両端面に設けられ、前記内部電極層に接続された外部電極とから構成されていることを特徴とする積層セラミックコンデンサ。
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