JPWO2007069703A1 - 含フッ素重合体、ネガ型感光性組成物及び隔壁 - Google Patents
含フッ素重合体、ネガ型感光性組成物及び隔壁 Download PDFInfo
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- JPWO2007069703A1 JPWO2007069703A1 JP2007550230A JP2007550230A JPWO2007069703A1 JP WO2007069703 A1 JPWO2007069703 A1 JP WO2007069703A1 JP 2007550230 A JP2007550230 A JP 2007550230A JP 2007550230 A JP2007550230 A JP 2007550230A JP WO2007069703 A1 JPWO2007069703 A1 JP WO2007069703A1
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- USHAGKDGDHPEEY-UHFFFAOYSA-L potassium persulfate Chemical compound [K+].[K+].[O-]S(=O)(=O)OOS([O-])(=O)=O USHAGKDGDHPEEY-UHFFFAOYSA-L 0.000 description 1
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- CHQMHPLRPQMAMX-UHFFFAOYSA-L sodium persulfate Substances [Na+].[Na+].[O-]S(=O)(=O)OOS([O-])(=O)=O CHQMHPLRPQMAMX-UHFFFAOYSA-L 0.000 description 1
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- 239000010409 thin film Substances 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- URAYPUMNDPQOKB-UHFFFAOYSA-N triacetin Chemical class CC(=O)OCC(OC(C)=O)COC(C)=O URAYPUMNDPQOKB-UHFFFAOYSA-N 0.000 description 1
- QQQSFSZALRVCSZ-UHFFFAOYSA-N triethoxysilane Chemical compound CCO[SiH](OCC)OCC QQQSFSZALRVCSZ-UHFFFAOYSA-N 0.000 description 1
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- 239000006097 ultraviolet radiation absorber Substances 0.000 description 1
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- 238000005406 washing Methods 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F20/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide or nitrile thereof
- C08F20/02—Monocarboxylic acids having less than ten carbon atoms, Derivatives thereof
- C08F20/10—Esters
- C08F20/22—Esters containing halogen
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/22—Esters containing halogen
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/22—Esters containing halogen
- C08F220/24—Esters containing halogen containing perhaloalkyl radicals
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F8/00—Chemical modification by after-treatment
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F8/00—Chemical modification by after-treatment
- C08F8/14—Esterification
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
- C08G18/40—High-molecular-weight compounds
- C08G18/62—Polymers of compounds having carbon-to-carbon double bonds
- C08G18/6275—Polymers of halogen containing compounds having carbon-to-carbon double bonds; halogenated polymers of compounds having carbon-to-carbon double bonds
- C08G18/6279—Polymers of halogen containing compounds having carbon-to-carbon double bonds; halogenated polymers of compounds having carbon-to-carbon double bonds containing fluorine atoms
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
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Abstract
Description
一方、レジスト組成物は、カラーフィルタの画素間の隔壁、液晶表示素子のITO電極の隔壁、有機EL表示素子の画素間の隔壁、回路配線基板の隔壁等の永久膜を形成する材料としても注目されている。
そこで本発明は、低露光量であっても、隔壁上のインクの残渣が少なく、膜厚均一性の高いインク層を形成しうる含フッ素重合体及びネガ型感光性組成物を提供することを課題とする。
また本発明は、上記の組成物の塗膜硬化物からなる隔壁を提供する。
また、ドットは親水親油性に優れるので、インクはドット内に均一に濡れ拡がりやすく、形成されるインク層の膜厚の均一性が高くなる。
隔壁上部表面には未反応の残存分子が残りにくいので、デバイス形成後の長期間にわたってマイグレートすることなく、デバイスの信頼性を低下させることがない。
−CF3、−CF2CF3、−CF2CHF2、−(CF2)2CF3、−(CF2)3CF3、−(CF2)4CF3、−(CF2)5CF3、−(CF2)6CF3、−(CF2)7CF3、−(CF2)8CF3、−(CF2)9CF3、−(CF2)11CF3、−(CF2)15CF3、−CF(CF3)O(CF2)5CF3、
−CF2O(CF2CF2O)pCF3(pは1〜8の整数)、
−CF(CF3)O(CF2CF(CF3)O)qC6F13(qは1〜4の整数)、
−CF(CF3)O(CF2CF(CF3)O)rC3F7(rは1〜5の整数)。
酸性基としては、カルボキシ基、フェノール性水酸基及びスルホン酸基からなる群から選ばれる1以上の酸性基が好ましい。
酸性基を有する側鎖は、酸性基を有する単量体(a3)の重合反応によって形成してもよいし、重合反応後の化学変換によって形成してもよい。
CH2=CH(R1)COOXRf ・・・式1
式中、R1は水素原子、メチル基又はトリフルオロメチル基を示し、Xは単結合又は炭素数1〜8のフッ素原子を含まない2価有機基を示し、Rfは本フルオロアルキル基を示す。
CH2=CH(R1)COOR2Rf
CH2=CH(R1)COOR2NR3SO2Rf
CH2=CH(R1)COOR2NR3CORf
CH2=CH(R1)COOCH2CH(OH)Rf
ここで、R1は水素原子、メチル基又はトリフルオロメチル基を示し、R2は炭素数1〜6のアルキレン基を示し、R3は水素原子又はメチル基を示し、Rfは本フルオロアルキル基を示す。
−CH2CH2CH2−、−C(CH3)2−、−CH(CH2CH3)−、
−CH2CH2CH2CH2−、−CH(CH2CH2CH3)−、−CH2(CH2)3CH2−、−CH(CH2CH(CH3)2)−等が挙げられる。
また、上記の単量体は単独で用いてもよく、2種以上を併用してもよい。
エポキシ基を有する単量体の具体例としては、グリシジル(メタ)アクリレート、3,4−エポキシシクロヘキシルメチルアクリレートが挙げられる。
なお、上記の単量体は単独で用いてもよく、2種以上を併用してもよい。特に、組成物から形成される隔壁の耐熱性に優れるので、(メタ)アクリル酸エステル類、(メタ)アクリルアミド類が好ましい。
反応性基と、当該反応性基と結合し得る官能基と2つ以上のエチレン性二重結合とを有する化合物(z1)との組み合わせとして、例えば以下の組み合わせが挙げられる。
(1)水酸基に対し、2つ以上のエチレン性二重結合を有する酸無水物(z1)、
(2)水酸基に対し、イソシアネート基と2つ以上のエチレン性二重結合を有する化合物(z1)、
(3)水酸基に対し、塩化アシル基と2つ以上のエチレン性二重結合を有する化合物(z1)、
(4)酸無水物に対し、水酸基と2つ以上のエチレン性二重結合を有する化合物(z1)、
(5)カルボキシ基に対し、エポキシ基と2つ以上のエチレン性二重結合を有する化合物(z1)、
(6)エポキシ基に対し、カルボキシ基と2つ以上のエチレン性二重結合を有する化合物(z1)。
反応性の観点から上記(2)の組み合わせが好ましい。
また、重合禁止剤を配合することが好ましい。重合禁止剤としては、公知公用の重合禁止剤を使用することができ、具体的には、2,6−ジ−t−ブチル−p−クレゾールが挙げられる。
感光性樹脂(B)の数平均分子量は、500以上20000未満が好ましく、2000以上15000未満がより好ましい。この範囲であるとアルカリ溶解性、現像性が良好である。
また、カーボンブラックとしては、感度の点から、フタル酸ジブチルの吸油量が120cc/100g以下のものが好ましく、少ないものほどより好ましい。
青色顔料としては、例えばC.I.Pigment Blue 15、15:1、15:2、15:3、15:4、15:6、16、22、60、64、80等を用いることができる。
緑色顔料としては、例えばC.I.Pigment Green 7、36、等を用いることができる。
また、ネガ型感光性組成物には、エチレン性二重結合を有する単量体の2種以上の共重合体であって、下式4で表されるシリコーン基を有する側鎖と、エチレン性二重結合を有する側鎖とを有する含シリコン重合体が含まれていてもよい。組成物の塗膜硬化物からなる隔壁のインク転落性を向上できる。
−(SiR4R5−O)u−SiR4R5R6 ・・・式4
式中、R4、R5は独立に水素原子、アルキル基、シクロアルキル基又はアリール基を示し、R6は水素原子又は炭素数1〜10の有機基を示し、uは1〜200の整数を示す。上記含シリコン重合体の具体例としては、国際公開第2004/079454号パンフレットの第38頁表2に記載される樹脂(A3−1)、樹脂(A3−2)、樹脂(A3−3)が挙げられる。
(塗布工程)まず、基材に本発明の組成物を塗布する。基材としては、その材質は特に限定されるものではないが、例えば、各種ガラス板、ポリエチレンテレフタレート等のポリエステル、ポリプロピレン、ポリエチレン等のポリオレフィン、ポリカーボネート、ポリメチルメタクリレート、ポリスルホン、ポリイミド、ポリ(メタ)アクリル樹脂等の熱可塑性プラスチックシート、エポキシ樹脂、ポリエステル樹脂等の熱硬化性プラスチックシート等を挙げることができる。特に、耐熱性の点からガラス板、ポリイミド等の耐熱性プラスチックが好ましく用いられる。
塗膜の形成方法としては、スプレー法、ロールコート法、回転塗布法、バー塗布法などが挙げられる。
現像時間は、5〜180秒間が好ましい。また現像方法は液盛り法、ディッピング法などのいずれでもよい。現像後、流水洗浄を行い、圧縮空気や圧縮窒素で風乾させることによって、基材上の水分を除去する。
本発明の隔壁を用いてカラーフィルタまたは有機EL表示素子が得られる。
(カラーフィルタの製造)本発明の隔壁を用いてカラーフィルタを製造する場合、上記フォトリソグラフィ工程によって隔壁を形成した後、インクジェット法を用いて隔壁間のドットに画素を形成する。
このような画素の形成に用いられるインクジェット装置としては、特に限定されるものではないが、帯電したインクを連続的に噴射し磁場によって制御する方法、圧電素子を用いて間欠的にインクを噴射する方法、インクを加熱しその発泡を利用して間欠的に噴射する方法等の各種の方法を用いたインクジェット装置を用いることができる。
また、形成される画素の形状は、ストライプ型、モザイク型、トライアングル型、4画素配置型等の公知のいずれの配列とすることも可能である。
画素の形成に用いられるインクは、主に着色成分と、バインダー樹脂成分と、溶媒成分とを含む。
水性のインクは、溶剤が水および必要に応じて水溶性有機溶媒からなり、バインダー樹脂成分として水溶性または水分散性樹脂を含有し、必要に応じて各種助剤を含有する。
また、油性のインクは、溶剤が有機溶剤であり、バインダー樹脂成分として有機溶剤に可溶な樹脂を含有し、必要に応じて各種助剤を含有する。
着色成分としては、耐熱性、耐光性などに優れた顔料および染料を用いることが好ましい。
バインダー樹脂成分としては、透明で耐熱性に優れた樹脂が好ましく、アクリル樹脂、メラミン樹脂、ウレタン樹脂などが挙げられるが、これに限定されるものでない。
またインクジェット法によりインクを注入した後、必要により、乾燥工程や加熱硬化工程、紫外線硬化工程を行うことが好ましい。
画素形成後、必要に応じて、保護膜層を形成する。保護膜層は表面平坦性を上げる目的と隔壁や画素部のインクからの溶出物が液晶層に到達するのを遮断する目的で形成することが好ましい。保護膜層を形成する場合は、事前に隔壁の撥液性を除去することが好ましい。撥液性を除去しない場合、オーバーコート用塗布液をはじき、均一な膜厚が得られないため好ましくない。隔壁の撥液性を除去する方法としては、プラズマアッシング処理や光アッシング処理等が挙げられる。
さらに必要に応じて、カラーフィルタを用いて製造される液晶パネルの高品位化のためにフォトスペーサーをブラックマトリックス上に形成することが好ましい。
(有機EL表示素子の製造)本発明の隔壁を用いて有機EL表示素子を製造する場合、最初に酸化インジウム錫(ITO)等の透明電極をガラス等の透明基材にスパッタ法等によって製膜し、必要に応じて所望のパターンに透明電極をエッチングする。次に、本発明の隔壁を上記フォトリソグラフィ工程によって形成する。その後、インクジェット法を用いて隔壁間のドットに正孔輸送材料、発光材料の溶液を順次塗布、乾燥して、正孔輸送層、発光層を形成し、その後アルミニウム等の電極を蒸着法等によって形成することによって、有機EL表示素子の画素が得られる。
フッ素原子の含有率は、以下の手法で測定した。得られた含フッ素重合体(A)を1200℃で完全に燃焼分解させ、発生したガスを50gの水に吸収させた。得られた水溶液のフッ化物イオン量を定量し、含フッ素重合体(A)に含まれるフッ素原子の含有率を算出した。
酸価(mgKOH/g)及び1分子中のエチレン性二重結合の数は、原料である単量体の配合割合から算出した理論値である。
C4FMA:CH2=C(CH3)COOCH2CH2(CF2)4F、
C6FMA:CH2=C(CH3)COOCH2CH2(CF2)6F、
MAA:メタクリル酸、
2−HEMA:2−ヒドロキシエチルメタクリレート、
CHMA:シクロヘキシルメタクリレート、
IBMA:イソボルニルメタクリレート、
V−70:2,2’−アゾビス(4−メトキシ−2,4−ジメチルバレロニトリル)(和光純薬社製、商品名V−70)、
2−ME:2−メルカプトエタノール、
BEI:1,1−ビス(アクリロイルオキシメチル)エチルイソシアネート(昭和電工社製、商品名カレンズBEI)、
AOI:2−アクリロイルオキシエチルイソシアネート(昭和電工社製、商品名カレンズAOI)、
DBTDL:ジブチル錫ジラウレート、
BHT:2,6−ジ−t−ブチル−p−クレゾール、
IR907:ラジカル開始剤(チバ−ガイギー社製、商品名IRGACURE−907)、
OXE01:1,2−オクタンジオン 1−[4−(フェニルチオ)−,2−(o−ベンゾイルオキシム)](チバスペシャルティケミカルズ社製、商品名OXE01)、
OXE02:エタノン 1−[9−エチル−6−(2−メチルベンゾイル)−9H−カルバゾイル−3−イル]−1−(o−アセチルオキシム)(チバスペシャルティケミカルズ社製、商品名OXE02)、
DEAB:4,4’−ビス(ジエチルアミノ)ベンゾフェノン、
DETX−S:イソプロピルチオキサンソン(日本化薬社製、商品名DETX−S)、
CCR1115:クレゾールノボラック型エポキシアクリレート(日本化薬社製、商品名CCR−1115、固形分60質量%。)、
ZFR1492H:ビスフェノールF型エポキシアクリレート(日本化薬社製、商品名ZFR−1492H、固形分65質量%。)、
D310:ジペンタエリスリトールペンタアクリレート:(日本化薬社製、商品名KAYARAD D−310)、
157S65:ビスフェノールAノボラック型エポキシ樹脂(ジャパンエポキシレジン社製、商品名エピコート157S65)、
KBM403:3−グリシドキシプロピルトリメトキシシラン(信越化学工業社製、商品名KBM−403)、
DEGDM:ジエチレングリコールジメチルエーテル、
CB:カーボンブラック(平均粒径=120nm(二次粒径)、プロピレングリコールモノメチルエーテルアセテート溶液、CB分20質量%、固形分25質量%)。
(共重合)
撹拌機を備えた内容積1Lのオートクレーブに、アセトン(556.0g)、C6FMA(96.0g)、MAA(28.8g)、2−HEMA(96.0g)、IBMA(19.2g)、連鎖移動剤2−ME(7.8g)及び重合開始剤V−70(3.6g)を仕込み、窒素雰囲気下に撹拌しながら、40℃で18時間重合させ、共重合体1の溶液を得た。該溶液のガスクロマトグラフィー分析を行い、各モノマーの残存割合を調べたところ、各モノマーの転化率は、C6FMAが86%、MAAが87%、2−HEMAが91%、IBMAが83%であった。得られた共重合体1のアセトン溶液に水を加え再沈精製し、次いで石油エーテルにて再沈精製し、真空乾燥し、共重合体1の239gを得た。数平均分子量は2320であった。
温度計、撹拌機、加熱装置を備えた内容量300mLのガラス製フラスコに、共重合体1(100g)、BEI(76.3g)、DBTDL(0.31g)、BHT(3.8g)及びアセトン(100g)を仕込み、撹拌しながら、30℃で48時間反応させ、含フッ素重合体(A−1)の溶液を得た。得られた含フッ素重合体(A−1)のアセトン溶液に水を加え再沈精製し、次いで石油エーテルにて再沈精製し、真空乾燥し、含フッ素重合体(A−1)の182gを得た。数平均分子量は4300であった。含フッ素重合体(A−1)の赤外分光分析を行ったところ、アクリロイル基のC=C伸縮振動に由来する吸収帯(1635cm−1)、アクリロイル基のCH2面内変角振動に由来する吸収帯(1409cm−1)、およびアクリロイル基のCH2面外変角振動に由来する吸収帯(810cm−1)が存在すること、またBEIのNCO伸縮振動に由来する吸収帯(2274cm−1)が消失していたことから、含フッ素重合体(A−1)中にアクリロイル基が存在することが確認された。
共重合体1の合成において、原料の配合を表1のように変更した他は同様の重合反応により、共重合体2〜5を得た。次に、含フッ素重合体(A−1)の合成において、原料の配合を表2のように変更した他は同様の反応により、含フッ素重合体(A−2)、(A−3)、(A−4)、(R−1)を得た。得られた含フッ素重合体の数平均分子量、含フッ素重合体におけるフッ素原子の含有率、1分子中のC=C数、酸価(mgKOH/g)を表2に示した。
表3及び表4に示す割合(質量部)で、含フッ素重合体(A−1〜4及びR−1)、感光性樹脂(B)、光重合開始剤(C)、ラジカル架橋剤(D)、熱架橋剤(E)、シランカップリング剤(F)、希釈剤(G)を配合してネガ型感光性組成物を得た。
上記ガラス基板(1)について、完全に現像できたものを○、現像されない部分があったものを×と記載した。
[基材密着性]
上記ガラス基板(2)について、JIS K 5400記載の碁盤目テープ法により評価した。塗膜硬化物をカッターにて、2mm間隔でます目の数が25個となるように、碁盤目状に傷を付けた。次に粘着テープを貼り、剥がした。目視により、ます目が剥がれなかったものを○、ます目が殆ど剥がれたものを×として塗膜硬化物の付着状態を評価した。
撥水撥油性は、上記ガラス基板(2)の塗膜硬化物表面の水及びキシレンの接触角(度)により評価した。接触角とは、固体と液体が接触する点における液体表面に対する接線と固体表面がなす角で、液体を含む方の角度で定義した。この角度が大きいほど塗膜硬化物の撥水撥油性が優れることを意味する。水の接触角95度以上を○、90度以上95度未満を△、90度未満を×と表記した。キシレンの接触角40度以上を○、35度以上40度未満を△、35度未満を×と表記した。なお、表3及び表4では、(水の接触角)/(キシレンの接触角)=○/○のように表記した。
上記ガラス基板(1)について、インクジェットにてポリ3,4−エチレンジオキシチオフェンとポリスチレンスルホン酸塩の1%溶液(水/エタノール=75/25)を、隔壁であるライン部分(30μm)に約30pL滴下し、ライン部分に残留するインク残渣に関して評価した。超深度形状測定顕微鏡VK−8500(キーエンス社製)による写真を見て、ドットであるスペース部分(30μm)に注入されたインク面積に比べて、ライン部分に残ったインク残渣の面積が、1/10未満の場合を○、1/10以上の場合を×と評価した。
上記ガラス基板(1)について、インクジェットにてポリ3,4−エチレンジオキシチオフェンとポリスチレンスルホン酸塩の1%溶液(水/エタノール=75/25)を、スペース部分に約30pL滴下し、スペース部分に塗装されたインク層の膜厚を測定した。膜厚は、超深度形状測定顕微鏡VK−8500(キーエンス社製)により測定した。インク層の中央部の膜厚をH、インク層の隔壁(ライン)際の膜厚をH’とした場合、0.8H≦H’≦1.2Hとなる場合を○、H’<0.8H、又は1.2H<H’となる場合を×と評価した。
なお、2005年12月15日に出願された日本特許出願2005−361910号の明細書、特許請求の範囲、及び要約書の全内容をここに引用し、本発明の明細書の開示として、取り入れるものである。
Claims (9)
- エチレン性二重結合を有する単量体の2種以上の共重合体であって、水素原子の少なくとも1つがフッ素原子に置換された炭素数20以下のアルキル基(ただし、該アルキル基は炭素原子間にエーテル性酸素原子を有していてもよい。)を有する側鎖と、側鎖1つにエチレン性二重結合を2つ以上有する側鎖とを有する含フッ素重合体。
- フッ素原子含有率が5〜35質量%である、請求項1に記載の含フッ素重合体。
- さらに酸性基を有する側鎖を有する重合体である、請求項1又は2に記載の含フッ素重合体。
- エチレン性二重結合を有する単量体の2種以上の共重合体であって、水素原子の少なくとも1つがフッ素原子に置換された炭素数20以下のアルキル基(ただし、該アルキル基は炭素原子間にエーテル性酸素原子を有していてもよい。)を有する単量体と反応性基を有する単量体とを含む2種以上の単量体を共重合した後に、当該反応性基と結合し得る官能基と2つ以上のエチレン性二重結合とを有する化合物を反応させて形成された含フッ素重合体。
- 水素原子の少なくとも1つがフッ素原子に置換された炭素数20以下のアルキル基(ただし、該アルキル基は炭素原子間にエーテル性酸素原子を有していてもよい。)を有する単量体(a1)と反応性基を有する単量体(a2)とを含む2種以上の単量体を共重合し、次いで得られた共重合体と当該反応性基と結合し得る官能基と2つ以上のエチレン性二重結合とを有する化合物(z1)とを反応させる、側鎖1つにエチレン性二重結合を2つ以上有する側鎖を有する含フッ素重合体の製造方法。
- 単量体(a1)が式1で表される単量体である、請求項5に記載の製造方法。
CH2=CH(R1)COOXRf ・・・式1
式中、R1は水素原子、メチル基又はトリフルオロメチル基を示し、Xは単結合又は炭素数1〜8のフッ素原子を含まない2価有機基を示し、Rfは水素原子の少なくとも1つがフッ素原子に置換された炭素数20以下のアルキル基を示す。 - 請求項1〜4のいずれかに記載の含フッ素重合体(A)と、1分子内に酸性基とエチレン性二重結合とを有する感光性樹脂(B)と、光重合開始剤(C)とを含有する組成物であって、組成物の全固形分における含フッ素重合体(A)の割合が0.1〜30質量%であることを特徴とするネガ型感光性組成物。
- 2つ以上のエチレン性二重結合を有し、酸性基を有しないラジカル架橋剤(D)をさらに含む請求項7に記載の組成物。
- 請求項7又は8に記載の組成物の塗膜硬化物からなる隔壁。
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