JPS6482676A - Iii-v compound semiconductor field-effect transistor and manufacture thereof - Google Patents
Iii-v compound semiconductor field-effect transistor and manufacture thereofInfo
- Publication number
- JPS6482676A JPS6482676A JP24200387A JP24200387A JPS6482676A JP S6482676 A JPS6482676 A JP S6482676A JP 24200387 A JP24200387 A JP 24200387A JP 24200387 A JP24200387 A JP 24200387A JP S6482676 A JPS6482676 A JP S6482676A
- Authority
- JP
- Japan
- Prior art keywords
- source
- plane
- drain regions
- ale
- gaas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24200387A JPS6482676A (en) | 1987-09-25 | 1987-09-25 | Iii-v compound semiconductor field-effect transistor and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24200387A JPS6482676A (en) | 1987-09-25 | 1987-09-25 | Iii-v compound semiconductor field-effect transistor and manufacture thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6482676A true JPS6482676A (en) | 1989-03-28 |
Family
ID=17082809
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24200387A Pending JPS6482676A (en) | 1987-09-25 | 1987-09-25 | Iii-v compound semiconductor field-effect transistor and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6482676A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5302842A (en) * | 1992-07-20 | 1994-04-12 | Bell Communications Research, Inc. | Field-effect transistor formed over gate electrode |
US9587310B2 (en) | 2001-03-02 | 2017-03-07 | Applied Materials, Inc. | Lid assembly for a processing system to facilitate sequential deposition techniques |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5918678A (ja) * | 1982-07-21 | 1984-01-31 | Sony Corp | 半導体装置の製法 |
-
1987
- 1987-09-25 JP JP24200387A patent/JPS6482676A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5918678A (ja) * | 1982-07-21 | 1984-01-31 | Sony Corp | 半導体装置の製法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5302842A (en) * | 1992-07-20 | 1994-04-12 | Bell Communications Research, Inc. | Field-effect transistor formed over gate electrode |
US5401665A (en) * | 1992-07-20 | 1995-03-28 | Bell Communications Research, Inc. | Method of fabricating a field-effect transistor over gate electrode |
US9587310B2 (en) | 2001-03-02 | 2017-03-07 | Applied Materials, Inc. | Lid assembly for a processing system to facilitate sequential deposition techniques |
US10280509B2 (en) | 2001-07-16 | 2019-05-07 | Applied Materials, Inc. | Lid assembly for a processing system to facilitate sequential deposition techniques |
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