JPS6417470A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS6417470A
JPS6417470A JP17283987A JP17283987A JPS6417470A JP S6417470 A JPS6417470 A JP S6417470A JP 17283987 A JP17283987 A JP 17283987A JP 17283987 A JP17283987 A JP 17283987A JP S6417470 A JPS6417470 A JP S6417470A
Authority
JP
Japan
Prior art keywords
titanium
layer
atoms
silicon layer
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17283987A
Other languages
English (en)
Inventor
Tatsuzo Kawaguchi
Shigeki Sugimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP17283987A priority Critical patent/JPS6417470A/ja
Publication of JPS6417470A publication Critical patent/JPS6417470A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP17283987A 1987-07-13 1987-07-13 Semiconductor device Pending JPS6417470A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17283987A JPS6417470A (en) 1987-07-13 1987-07-13 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17283987A JPS6417470A (en) 1987-07-13 1987-07-13 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS6417470A true JPS6417470A (en) 1989-01-20

Family

ID=15949290

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17283987A Pending JPS6417470A (en) 1987-07-13 1987-07-13 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS6417470A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6774023B1 (en) * 1992-05-30 2004-08-10 Samsung Electronics Co., Ltd. Method of manufacturing a semiconductor device having a multilayer structure including a dual-layer silicide

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6774023B1 (en) * 1992-05-30 2004-08-10 Samsung Electronics Co., Ltd. Method of manufacturing a semiconductor device having a multilayer structure including a dual-layer silicide

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