JPS57117256A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS57117256A JPS57117256A JP320481A JP320481A JPS57117256A JP S57117256 A JPS57117256 A JP S57117256A JP 320481 A JP320481 A JP 320481A JP 320481 A JP320481 A JP 320481A JP S57117256 A JPS57117256 A JP S57117256A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- metal silicide
- single crystal
- completely separated
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE:To make a high density wiring with low resistance by composing a part of LSI wiring with metal silicide layer completely separated from an insulator. CONSTITUTION:A single crystal silicon thin film region 120 comprises a source diffusion layer 121 of an MOS transistor, a drain diffusion layer 123 and a substrate 122. The single crystal silicon thin film region 120 and the metal silicide film 131-134 that make wiring material are completely separated by a porous silicon oxide film 109. The metal silicide layer 131-134 are solely used for wiring.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP320481A JPS57117256A (en) | 1981-01-14 | 1981-01-14 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP320481A JPS57117256A (en) | 1981-01-14 | 1981-01-14 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57117256A true JPS57117256A (en) | 1982-07-21 |
Family
ID=11550901
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP320481A Pending JPS57117256A (en) | 1981-01-14 | 1981-01-14 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57117256A (en) |
-
1981
- 1981-01-14 JP JP320481A patent/JPS57117256A/en active Pending
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