JPS637460B2 - - Google Patents

Info

Publication number
JPS637460B2
JPS637460B2 JP55181996A JP18199680A JPS637460B2 JP S637460 B2 JPS637460 B2 JP S637460B2 JP 55181996 A JP55181996 A JP 55181996A JP 18199680 A JP18199680 A JP 18199680A JP S637460 B2 JPS637460 B2 JP S637460B2
Authority
JP
Japan
Prior art keywords
bonding arm
rotating shaft
shaft
pellet
scrubbing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55181996A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57106135A (en
Inventor
Osamu Sumya
Tsutomu Mimata
Kaoru Ito
Tatsuo Sugimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55181996A priority Critical patent/JPS57106135A/ja
Publication of JPS57106135A publication Critical patent/JPS57106135A/ja
Publication of JPS637460B2 publication Critical patent/JPS637460B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/0711—
    • H10W72/073—
    • H10W72/07337—

Landscapes

  • Die Bonding (AREA)
JP55181996A 1980-12-24 1980-12-24 Pellet bonder Granted JPS57106135A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55181996A JPS57106135A (en) 1980-12-24 1980-12-24 Pellet bonder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55181996A JPS57106135A (en) 1980-12-24 1980-12-24 Pellet bonder

Publications (2)

Publication Number Publication Date
JPS57106135A JPS57106135A (en) 1982-07-01
JPS637460B2 true JPS637460B2 (enExample) 1988-02-17

Family

ID=16110494

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55181996A Granted JPS57106135A (en) 1980-12-24 1980-12-24 Pellet bonder

Country Status (1)

Country Link
JP (1) JPS57106135A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01130537A (ja) * 1987-11-17 1989-05-23 Nec Corp ダイボンディング装置

Also Published As

Publication number Publication date
JPS57106135A (en) 1982-07-01

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