JPS6350847Y2 - - Google Patents

Info

Publication number
JPS6350847Y2
JPS6350847Y2 JP1984137486U JP13748684U JPS6350847Y2 JP S6350847 Y2 JPS6350847 Y2 JP S6350847Y2 JP 1984137486 U JP1984137486 U JP 1984137486U JP 13748684 U JP13748684 U JP 13748684U JP S6350847 Y2 JPS6350847 Y2 JP S6350847Y2
Authority
JP
Japan
Prior art keywords
developer
rotary table
wafer
outlet
discharge port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984137486U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6151733U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984137486U priority Critical patent/JPS6350847Y2/ja
Publication of JPS6151733U publication Critical patent/JPS6151733U/ja
Application granted granted Critical
Publication of JPS6350847Y2 publication Critical patent/JPS6350847Y2/ja
Expired legal-status Critical Current

Links

JP1984137486U 1984-09-10 1984-09-10 Expired JPS6350847Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984137486U JPS6350847Y2 (enExample) 1984-09-10 1984-09-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984137486U JPS6350847Y2 (enExample) 1984-09-10 1984-09-10

Publications (2)

Publication Number Publication Date
JPS6151733U JPS6151733U (enExample) 1986-04-07
JPS6350847Y2 true JPS6350847Y2 (enExample) 1988-12-27

Family

ID=30695901

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984137486U Expired JPS6350847Y2 (enExample) 1984-09-10 1984-09-10

Country Status (1)

Country Link
JP (1) JPS6350847Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07105332B2 (ja) * 1988-03-09 1995-11-13 東京エレクトロン株式会社 液処理方法
JP2002329705A (ja) * 2001-04-26 2002-11-15 Shibaura Mechatronics Corp スピン処理装置

Also Published As

Publication number Publication date
JPS6151733U (enExample) 1986-04-07

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