JPS6321351B2 - - Google Patents
Info
- Publication number
- JPS6321351B2 JPS6321351B2 JP58025682A JP2568283A JPS6321351B2 JP S6321351 B2 JPS6321351 B2 JP S6321351B2 JP 58025682 A JP58025682 A JP 58025682A JP 2568283 A JP2568283 A JP 2568283A JP S6321351 B2 JPS6321351 B2 JP S6321351B2
- Authority
- JP
- Japan
- Prior art keywords
- forming
- gate electrode
- active region
- film
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims 4
- 238000000151 deposition Methods 0.000 claims 1
- 230000005669 field effect Effects 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 15
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 15
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000006386 memory function Effects 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
Landscapes
- Semiconductor Memories (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58025682A JPS58169960A (ja) | 1983-02-18 | 1983-02-18 | 容量素子を含む集積回路 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58025682A JPS58169960A (ja) | 1983-02-18 | 1983-02-18 | 容量素子を含む集積回路 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP51016703A Division JPS5838939B2 (ja) | 1976-02-18 | 1976-02-18 | 集積回路 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58169960A JPS58169960A (ja) | 1983-10-06 |
| JPS6321351B2 true JPS6321351B2 (ko) | 1988-05-06 |
Family
ID=12172553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58025682A Granted JPS58169960A (ja) | 1983-02-18 | 1983-02-18 | 容量素子を含む集積回路 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58169960A (ko) |
Cited By (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10620704B2 (en) | 2018-01-19 | 2020-04-14 | Cirrus Logic, Inc. | Haptic output systems |
| US10667051B2 (en) | 2018-03-26 | 2020-05-26 | Cirrus Logic, Inc. | Methods and apparatus for limiting the excursion of a transducer |
| US10732714B2 (en) | 2017-05-08 | 2020-08-04 | Cirrus Logic, Inc. | Integrated haptic system |
| US10795443B2 (en) | 2018-03-23 | 2020-10-06 | Cirrus Logic, Inc. | Methods and apparatus for driving a transducer |
| US10820100B2 (en) | 2018-03-26 | 2020-10-27 | Cirrus Logic, Inc. | Methods and apparatus for limiting the excursion of a transducer |
| US10832537B2 (en) | 2018-04-04 | 2020-11-10 | Cirrus Logic, Inc. | Methods and apparatus for outputting a haptic signal to a haptic transducer |
| US10828672B2 (en) | 2019-03-29 | 2020-11-10 | Cirrus Logic, Inc. | Driver circuitry |
| US10848886B2 (en) | 2018-01-19 | 2020-11-24 | Cirrus Logic, Inc. | Always-on detection systems |
| US10860202B2 (en) | 2018-10-26 | 2020-12-08 | Cirrus Logic, Inc. | Force sensing system and method |
| US10976825B2 (en) | 2019-06-07 | 2021-04-13 | Cirrus Logic, Inc. | Methods and apparatuses for controlling operation of a vibrational output system and/or operation of an input sensor system |
| US10992297B2 (en) | 2019-03-29 | 2021-04-27 | Cirrus Logic, Inc. | Device comprising force sensors |
| US11069206B2 (en) | 2018-05-04 | 2021-07-20 | Cirrus Logic, Inc. | Methods and apparatus for outputting a haptic signal to a haptic transducer |
| US11139767B2 (en) | 2018-03-22 | 2021-10-05 | Cirrus Logic, Inc. | Methods and apparatus for driving a transducer |
| US11150733B2 (en) | 2019-06-07 | 2021-10-19 | Cirrus Logic, Inc. | Methods and apparatuses for providing a haptic output signal to a haptic actuator |
| US11259121B2 (en) | 2017-07-21 | 2022-02-22 | Cirrus Logic, Inc. | Surface speaker |
| US11263877B2 (en) | 2019-03-29 | 2022-03-01 | Cirrus Logic, Inc. | Identifying mechanical impedance of an electromagnetic load using a two-tone stimulus |
| US11269415B2 (en) | 2018-08-14 | 2022-03-08 | Cirrus Logic, Inc. | Haptic output systems |
| US11283337B2 (en) | 2019-03-29 | 2022-03-22 | Cirrus Logic, Inc. | Methods and systems for improving transducer dynamics |
| US11380175B2 (en) | 2019-10-24 | 2022-07-05 | Cirrus Logic, Inc. | Reproducibility of haptic waveform |
| US11408787B2 (en) | 2019-10-15 | 2022-08-09 | Cirrus Logic, Inc. | Control methods for a force sensor system |
| US11509292B2 (en) | 2019-03-29 | 2022-11-22 | Cirrus Logic, Inc. | Identifying mechanical impedance of an electromagnetic load using least-mean-squares filter |
| US11545951B2 (en) | 2019-12-06 | 2023-01-03 | Cirrus Logic, Inc. | Methods and systems for detecting and managing amplifier instability |
| US11552649B1 (en) | 2021-12-03 | 2023-01-10 | Cirrus Logic, Inc. | Analog-to-digital converter-embedded fixed-phase variable gain amplifier stages for dual monitoring paths |
| US11644370B2 (en) | 2019-03-29 | 2023-05-09 | Cirrus Logic, Inc. | Force sensing with an electromagnetic load |
-
1983
- 1983-02-18 JP JP58025682A patent/JPS58169960A/ja active Granted
Cited By (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10732714B2 (en) | 2017-05-08 | 2020-08-04 | Cirrus Logic, Inc. | Integrated haptic system |
| US11500469B2 (en) | 2017-05-08 | 2022-11-15 | Cirrus Logic, Inc. | Integrated haptic system |
| US11259121B2 (en) | 2017-07-21 | 2022-02-22 | Cirrus Logic, Inc. | Surface speaker |
| US10848886B2 (en) | 2018-01-19 | 2020-11-24 | Cirrus Logic, Inc. | Always-on detection systems |
| US10969871B2 (en) | 2018-01-19 | 2021-04-06 | Cirrus Logic, Inc. | Haptic output systems |
| US10620704B2 (en) | 2018-01-19 | 2020-04-14 | Cirrus Logic, Inc. | Haptic output systems |
| US11139767B2 (en) | 2018-03-22 | 2021-10-05 | Cirrus Logic, Inc. | Methods and apparatus for driving a transducer |
| US10795443B2 (en) | 2018-03-23 | 2020-10-06 | Cirrus Logic, Inc. | Methods and apparatus for driving a transducer |
| US10667051B2 (en) | 2018-03-26 | 2020-05-26 | Cirrus Logic, Inc. | Methods and apparatus for limiting the excursion of a transducer |
| US10820100B2 (en) | 2018-03-26 | 2020-10-27 | Cirrus Logic, Inc. | Methods and apparatus for limiting the excursion of a transducer |
| US10832537B2 (en) | 2018-04-04 | 2020-11-10 | Cirrus Logic, Inc. | Methods and apparatus for outputting a haptic signal to a haptic transducer |
| US11636742B2 (en) | 2018-04-04 | 2023-04-25 | Cirrus Logic, Inc. | Methods and apparatus for outputting a haptic signal to a haptic transducer |
| US11069206B2 (en) | 2018-05-04 | 2021-07-20 | Cirrus Logic, Inc. | Methods and apparatus for outputting a haptic signal to a haptic transducer |
| US11269415B2 (en) | 2018-08-14 | 2022-03-08 | Cirrus Logic, Inc. | Haptic output systems |
| US11507267B2 (en) | 2018-10-26 | 2022-11-22 | Cirrus Logic, Inc. | Force sensing system and method |
| US10860202B2 (en) | 2018-10-26 | 2020-12-08 | Cirrus Logic, Inc. | Force sensing system and method |
| US11269509B2 (en) | 2018-10-26 | 2022-03-08 | Cirrus Logic, Inc. | Force sensing system and method |
| US11396031B2 (en) | 2019-03-29 | 2022-07-26 | Cirrus Logic, Inc. | Driver circuitry |
| US11515875B2 (en) | 2019-03-29 | 2022-11-29 | Cirrus Logic, Inc. | Device comprising force sensors |
| US11283337B2 (en) | 2019-03-29 | 2022-03-22 | Cirrus Logic, Inc. | Methods and systems for improving transducer dynamics |
| US11644370B2 (en) | 2019-03-29 | 2023-05-09 | Cirrus Logic, Inc. | Force sensing with an electromagnetic load |
| US11263877B2 (en) | 2019-03-29 | 2022-03-01 | Cirrus Logic, Inc. | Identifying mechanical impedance of an electromagnetic load using a two-tone stimulus |
| US10828672B2 (en) | 2019-03-29 | 2020-11-10 | Cirrus Logic, Inc. | Driver circuitry |
| US10992297B2 (en) | 2019-03-29 | 2021-04-27 | Cirrus Logic, Inc. | Device comprising force sensors |
| US11509292B2 (en) | 2019-03-29 | 2022-11-22 | Cirrus Logic, Inc. | Identifying mechanical impedance of an electromagnetic load using least-mean-squares filter |
| US11150733B2 (en) | 2019-06-07 | 2021-10-19 | Cirrus Logic, Inc. | Methods and apparatuses for providing a haptic output signal to a haptic actuator |
| US10976825B2 (en) | 2019-06-07 | 2021-04-13 | Cirrus Logic, Inc. | Methods and apparatuses for controlling operation of a vibrational output system and/or operation of an input sensor system |
| US11408787B2 (en) | 2019-10-15 | 2022-08-09 | Cirrus Logic, Inc. | Control methods for a force sensor system |
| US11380175B2 (en) | 2019-10-24 | 2022-07-05 | Cirrus Logic, Inc. | Reproducibility of haptic waveform |
| US11545951B2 (en) | 2019-12-06 | 2023-01-03 | Cirrus Logic, Inc. | Methods and systems for detecting and managing amplifier instability |
| US11552649B1 (en) | 2021-12-03 | 2023-01-10 | Cirrus Logic, Inc. | Analog-to-digital converter-embedded fixed-phase variable gain amplifier stages for dual monitoring paths |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58169960A (ja) | 1983-10-06 |
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