JPS6315048U - - Google Patents

Info

Publication number
JPS6315048U
JPS6315048U JP10892586U JP10892586U JPS6315048U JP S6315048 U JPS6315048 U JP S6315048U JP 10892586 U JP10892586 U JP 10892586U JP 10892586 U JP10892586 U JP 10892586U JP S6315048 U JPS6315048 U JP S6315048U
Authority
JP
Japan
Prior art keywords
wafer
semiconductor
liquid tank
processing liquid
storage section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10892586U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10892586U priority Critical patent/JPS6315048U/ja
Publication of JPS6315048U publication Critical patent/JPS6315048U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す概略構成断面
図、第２図乃至第４図は第１図の装置の動作状態
を示す説明図である。第５図及び第６図は従来の
半導体製造装置を示す概略構成断面図である。 １…半導体ウエーハ、１２…ウエーハ搬送機構
、１４…ガイド板、１５…ウエーハ収納溝、１６
…処理液槽（洗浄槽）、１７…薬液（純水）、２
０…ウエーハ収納部、２５…移替部材。

Claims (1)

  1. 【実用新案登録請求の範囲】 内面にウエーハ収納溝が定ピツチで形成された
    回動自在な１対のガイド板を対向配置し、このガ
    イド板間に複数の半導体ウエーハを整列保持する
    ウエーハ搬送機構と、 上記半導体ウエーハを液処理する薬液が収容さ
    れた処理液槽と、 該処理液槽内の薬液中に配設され、半導体ウエ
    ーハを定ピツチで整列収納するウエーハ収納部と
    、 上記処理液槽の薬液中及び液上方で昇降動可能
    に配置され、ウエーハ搬送機構にて移送された半
    導体ウエーハを薬液中のウエーハ収納部に移し替
    える移替部材とからなることを特徴とする半導体
    製造装置。
JP10892586U 1986-07-16 1986-07-16 Pending JPS6315048U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10892586U JPS6315048U (ja) 1986-07-16 1986-07-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10892586U JPS6315048U (ja) 1986-07-16 1986-07-16

Publications (1)

Publication Number Publication Date
JPS6315048U true JPS6315048U (ja) 1988-02-01

Family

ID=30986564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10892586U Pending JPS6315048U (ja) 1986-07-16 1986-07-16

Country Status (1)

Country Link
JP (1) JPS6315048U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02291128A (ja) * 1989-02-27 1990-11-30 Philips Gloeilampenfab:Nv 液体での処理後基板を乾燥する方法及びその装置
KR100359228B1 (ko) * 2000-03-15 2002-11-04 네오세미테크 주식회사 반도체 웨이퍼의 표면 평탄화용 에칭장치 및 이를 이용한표면 평탄화 에칭방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02291128A (ja) * 1989-02-27 1990-11-30 Philips Gloeilampenfab:Nv 液体での処理後基板を乾燥する方法及びその装置
KR100359228B1 (ko) * 2000-03-15 2002-11-04 네오세미테크 주식회사 반도체 웨이퍼의 표면 평탄화용 에칭장치 및 이를 이용한표면 평탄화 에칭방법

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