JPS6252933U - - Google Patents

Info

Publication number
JPS6252933U
JPS6252933U JP14469385U JP14469385U JPS6252933U JP S6252933 U JPS6252933 U JP S6252933U JP 14469385 U JP14469385 U JP 14469385U JP 14469385 U JP14469385 U JP 14469385U JP S6252933 U JPS6252933 U JP S6252933U
Authority
JP
Japan
Prior art keywords
self
propelled vehicle
vehicle body
wafers
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14469385U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14469385U priority Critical patent/JPS6252933U/ja
Publication of JPS6252933U publication Critical patent/JPS6252933U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す自走車の側面
図、第２図はウエハの立替説明図、第３図は別実
施例のウエハの立替説明図である。 １……自走車体、３……キヤリア、４……ウエ
ハ保持機構、５……昇降機構、６……ウエハ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 自走車と、この自走車体上に並置された多数の
    ウエハを収容したキヤリヤおよび空キヤリアと、
    自走車体に配備された前記ウエハをキヤリヤ間で
    立替るための立替機構とを有することを特徴とす
    る半導体素子製造用自走車。
JP14469385U 1985-09-21 1985-09-21 Pending JPS6252933U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14469385U JPS6252933U (ja) 1985-09-21 1985-09-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14469385U JPS6252933U (ja) 1985-09-21 1985-09-21

Publications (1)

Publication Number Publication Date
JPS6252933U true JPS6252933U (ja) 1987-04-02

Family

ID=31055533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14469385U Pending JPS6252933U (ja) 1985-09-21 1985-09-21

Country Status (1)

Country Link
JP (1) JPS6252933U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03133151A (ja) * 1989-10-18 1991-06-06 Fujitsu Ltd 基板カセット用搬送車

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03133151A (ja) * 1989-10-18 1991-06-06 Fujitsu Ltd 基板カセット用搬送車

Similar Documents

Publication Publication Date Title
JPH0184434U (ja)
JPS6252933U (ja)
JPS63144953U (ja)
JPS62106867U (ja)
JPS6351445U (ja)
JPH0272546U (ja)
JPS6426831U (ja)
JPS61102044U (ja)
JPS61117254U (ja)
JPH01179889U (ja)
JPS6179681U (ja)
JPS63200332U (ja)
JPS63111462U (ja)
JPH0363937U (ja)
JPS6171366U (ja)
JPS63187338U (ja)
JPH01129835U (ja)
JPS6132077U (ja) 半導体ウエハ−の運搬用トレイ
JPS63177047U (ja)
JPH01129837U (ja)
JPH0170354U (ja)
JPS627853U (ja)
JPS61164041U (ja)
JPS63164229U (ja)
JPS6170937U (ja)