JPH0272546U - - Google Patents
Info
- Publication number
- JPH0272546U JPH0272546U JP15275388U JP15275388U JPH0272546U JP H0272546 U JPH0272546 U JP H0272546U JP 15275388 U JP15275388 U JP 15275388U JP 15275388 U JP15275388 U JP 15275388U JP H0272546 U JPH0272546 U JP H0272546U
- Authority
- JP
- Japan
- Prior art keywords
- case
- lid
- container
- utility
- wafer carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 description 1
Description
第1図は本考案の一実施例の半断面図である。
1…ウエーハキヤリア、2…スペーサ、3…5
インチウエーハ、4…容器、5…蓋、6…ウエー
ハホルダー。
インチウエーハ、4…容器、5…蓋、6…ウエー
ハホルダー。
Claims (1)
- 容器と蓋とからなるケースと、前記ケース内に
出し入れ可能に設けられたウエーハキヤリアとを
含むことを特徴とする半導体ウエーハ用ケース。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15275388U JPH0272546U (ja) | 1988-11-22 | 1988-11-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15275388U JPH0272546U (ja) | 1988-11-22 | 1988-11-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0272546U true JPH0272546U (ja) | 1990-06-01 |
Family
ID=31427963
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15275388U Pending JPH0272546U (ja) | 1988-11-22 | 1988-11-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0272546U (ja) |
-
1988
- 1988-11-22 JP JP15275388U patent/JPH0272546U/ja active Pending