JPH0289823U - - Google Patents
Info
- Publication number
- JPH0289823U JPH0289823U JP16835488U JP16835488U JPH0289823U JP H0289823 U JPH0289823 U JP H0289823U JP 16835488 U JP16835488 U JP 16835488U JP 16835488 U JP16835488 U JP 16835488U JP H0289823 U JPH0289823 U JP H0289823U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- wafer
- disk
- indicate
- edge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案の実施例を示す図、第２図は従
来の半導体ウエハを示す図である。 図において、１は半導体ウエハ、３は小孔、を
示す。
来の半導体ウエハを示す図である。 図において、１は半導体ウエハ、３は小孔、を
示す。
Claims (1)
- 円板状の半導体ウエハ１の縁部近傍に、該ウエ
ハの結晶方位を表示するための小径な小孔３を設
けたことを特徴とする半導体ウエハ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16835488U JPH0289823U (ja) | 1988-12-28 | 1988-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16835488U JPH0289823U (ja) | 1988-12-28 | 1988-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0289823U true JPH0289823U (ja) | 1990-07-17 |
Family
ID=31457461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16835488U Pending JPH0289823U (ja) | 1988-12-28 | 1988-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0289823U (ja) |
-
1988
- 1988-12-28 JP JP16835488U patent/JPH0289823U/ja active Pending