JPS6336048U - - Google Patents

Info

Publication number
JPS6336048U
JPS6336048U JP13041286U JP13041286U JPS6336048U JP S6336048 U JPS6336048 U JP S6336048U JP 13041286 U JP13041286 U JP 13041286U JP 13041286 U JP13041286 U JP 13041286U JP S6336048 U JPS6336048 U JP S6336048U
Authority
JP
Japan
Prior art keywords
wafer
setting
tray
holder
tweezers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13041286U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13041286U priority Critical patent/JPS6336048U/ja
Publication of JPS6336048U publication Critical patent/JPS6336048U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の平面図、第２図は第１図Ａ―
Ａ′の断面図である。 １……トレー、２……ホルダー、３……ホルダ
ー穴、４……ピンセツト用溝、 第３図は従来のトレーの平面図、第４図は第３
図Ｂ―Ｂ′の断面図である。 １……トレー、２……ホルダー、３……ホルダ
ー穴。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体基板（以下ウエハーと呼ぶ）をトレーに
    セツトする半導体製造装置において、ウエハーを
    保持するホルダーに、ウエハーをセツトしやすい
    ようにピンセツト用の溝を設けたことを特徴とす
    る半導体製造装置。
JP13041286U 1986-08-26 1986-08-26 Pending JPS6336048U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13041286U JPS6336048U (ja) 1986-08-26 1986-08-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13041286U JPS6336048U (ja) 1986-08-26 1986-08-26

Publications (1)

Publication Number Publication Date
JPS6336048U true JPS6336048U (ja) 1988-03-08

Family

ID=31027886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13041286U Pending JPS6336048U (ja) 1986-08-26 1986-08-26

Country Status (1)

Country Link
JP (1) JPS6336048U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002231795A (ja) * 2001-02-05 2002-08-16 Sony Corp サセプタ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5323080U (ja) * 1976-08-05 1978-02-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5323080U (ja) * 1976-08-05 1978-02-27

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002231795A (ja) * 2001-02-05 2002-08-16 Sony Corp サセプタ
JP4507414B2 (ja) * 2001-02-05 2010-07-21 ソニー株式会社 サセプタ

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