JPS624132U - - Google Patents
Info
- Publication number
- JPS624132U JPS624132U JP9627185U JP9627185U JPS624132U JP S624132 U JPS624132 U JP S624132U JP 9627185 U JP9627185 U JP 9627185U JP 9627185 U JP9627185 U JP 9627185U JP S624132 U JPS624132 U JP S624132U
- Authority
- JP
- Japan
- Prior art keywords
- jig
- housed
- semiconductor manufacturing
- jigs
- ingredients
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004615 ingredient Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図は本考案による一実施例の半導体製造治
具を示す分解斜視図、第２図は第１図のＡ―Ａ線
に沿う断面図である。第３図は従来の半導体製造
治具の斜視図である。 ５……半導体ウエーハ、６……第１治具、７…
…第２治具。
具を示す分解斜視図、第２図は第１図のＡ―Ａ線
に沿う断面図である。第３図は従来の半導体製造
治具の斜視図である。 ５……半導体ウエーハ、６……第１治具、７…
…第２治具。
Claims (1)
- １枚の半導体ウエーハがその周縁部が保持され
て納められる第１治具と、この第１治具の複数を
整列させて収納する第２治具とを具えたことを特
徴とする半導体製造治具。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9627185U JPS624132U (ja) | 1985-06-24 | 1985-06-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9627185U JPS624132U (ja) | 1985-06-24 | 1985-06-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS624132U true JPS624132U (ja) | 1987-01-12 |
Family
ID=30655679
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9627185U Pending JPS624132U (ja) | 1985-06-24 | 1985-06-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS624132U (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63276239A (ja) * | 1987-05-08 | 1988-11-14 | Hitachi Ltd | ウエハキャリア治具 |
| JP2012156234A (ja) * | 2011-01-25 | 2012-08-16 | Shin Etsu Chem Co Ltd | 太陽電池基板の保持方法、太陽電池の製造方法、及びそれに用いる保持板 |
| CN103283012A (zh) * | 2010-11-11 | 2013-09-04 | 齐默尔曼和席尔普搬运技术有限责任公司 | 用于工艺盒的装载和卸载方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5343875B2 (ja) * | 1975-04-14 | 1978-11-24 |
-
1985
- 1985-06-24 JP JP9627185U patent/JPS624132U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5343875B2 (ja) * | 1975-04-14 | 1978-11-24 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63276239A (ja) * | 1987-05-08 | 1988-11-14 | Hitachi Ltd | ウエハキャリア治具 |
| CN103283012A (zh) * | 2010-11-11 | 2013-09-04 | 齐默尔曼和席尔普搬运技术有限责任公司 | 用于工艺盒的装载和卸载方法 |
| JP2012156234A (ja) * | 2011-01-25 | 2012-08-16 | Shin Etsu Chem Co Ltd | 太陽電池基板の保持方法、太陽電池の製造方法、及びそれに用いる保持板 |