JPS6170930U - - Google Patents
Info
- Publication number
- JPS6170930U JPS6170930U JP15547284U JP15547284U JPS6170930U JP S6170930 U JPS6170930 U JP S6170930U JP 15547284 U JP15547284 U JP 15547284U JP 15547284 U JP15547284 U JP 15547284U JP S6170930 U JPS6170930 U JP S6170930U
- Authority
- JP
- Japan
- Prior art keywords
- elastic material
- ion implantation
- implantation apparatus
- wafer
- wafer holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013013 elastic material Substances 0.000 claims description 3
- 238000005468 ion implantation Methods 0.000 claims 2
Description
第１図は本考案の一実施例を示す断面図、第２
図は動作状態を示す断面図である。 １……デイスク、２……弾性材、３……ウエハ
ー、４……押し上げピン、５……ウエハー押え具
、６……基台。
図は動作状態を示す断面図である。 １……デイスク、２……弾性材、３……ウエハ
ー、４……押し上げピン、５……ウエハー押え具
、６……基台。
Claims (1)
- イオン注入装置に使用するウエハー保持具にお
いて、ウエハーとの接触部に弾性材を敷設し、そ
の弾性材の真下に押し上げピンを具備したことを
特徴とするイオン注入装置用ウエハー保持具。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15547284U JPS6170930U (ja) | 1984-10-15 | 1984-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15547284U JPS6170930U (ja) | 1984-10-15 | 1984-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6170930U true JPS6170930U (ja) | 1986-05-15 |
Family
ID=30713483
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15547284U Pending JPS6170930U (ja) | 1984-10-15 | 1984-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6170930U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS64635A (en) * | 1987-06-22 | 1989-01-05 | Toshiba Mach Co Ltd | Sample setting device |
| JPS6471050A (en) * | 1987-05-04 | 1989-03-16 | Varian Associates | Wafer holder |
-
1984
- 1984-10-15 JP JP15547284U patent/JPS6170930U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6471050A (en) * | 1987-05-04 | 1989-03-16 | Varian Associates | Wafer holder |
| JPS64635A (en) * | 1987-06-22 | 1989-01-05 | Toshiba Mach Co Ltd | Sample setting device |