JPS64635A - Sample setting device - Google Patents
Sample setting deviceInfo
- Publication number
- JPS64635A JPS64635A JP62155043A JP15504387A JPS64635A JP S64635 A JPS64635 A JP S64635A JP 62155043 A JP62155043 A JP 62155043A JP 15504387 A JP15504387 A JP 15504387A JP S64635 A JPS64635 A JP S64635A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- thickness
- height
- pin
- constitution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 abstract 1
Landscapes
- Electron Beam Exposure (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
PURPOSE: To obtain an electron beam drawing device on which a large-sized sample can be easily set by providing a mechanism for measuring the thickness of a sample and a mechanism for adjusting the height of a reference pin.
CONSTITUTION: A thickness measuring mechanism 81, in which a sensor 84 such as a noncontact sensor or the like is attached to respective one-side ends of a pair of arms 83, arranged with its free rotation around the center of a rotary axis 87. Firstly, the thickness of a sample 33 is measured by a measuring mechanism 81. Next, the piston rod 46A of a cylinder 46 is made to advance to relieve the clamp of a reference pin 36 followed by making a rotary knob 39 to advance in the right direction against a spring 38 to rotate an eccentric pin 37 for putting its large diameter part in the lowest position. A micrometer head 60 is rotated in this state, and the height of three pins 36 is made to accord with the thickness, that is, with the height of the sample 33 followed by rotating the pin 37 to make its large diameter part contact with the undersurface of a holder body 34. With this constitution, an electron drawing device on which a large-sized sample can be easily set can be obtained.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62155043A JP2627065B2 (en) | 1987-06-22 | 1987-06-22 | Sample setting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62155043A JP2627065B2 (en) | 1987-06-22 | 1987-06-22 | Sample setting device |
Publications (3)
Publication Number | Publication Date |
---|---|
JPH01635A JPH01635A (en) | 1989-01-05 |
JPS64635A true JPS64635A (en) | 1989-01-05 |
JP2627065B2 JP2627065B2 (en) | 1997-07-02 |
Family
ID=15597421
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62155043A Expired - Fee Related JP2627065B2 (en) | 1987-06-22 | 1987-06-22 | Sample setting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2627065B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4945156A (en) * | 1988-12-29 | 1990-07-31 | Honeywell Inc. | Solution processing of rigid chain and ladder polymers |
KR100583641B1 (en) * | 1999-04-27 | 2006-05-26 | 삼성전자주식회사 | Apparatus for moving semiconductor wafer |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54146161U (en) * | 1978-03-31 | 1979-10-11 | ||
JPS59196549A (en) * | 1983-04-22 | 1984-11-07 | Jeol Ltd | Sample device for electron ray device or the like |
JPS60207239A (en) * | 1984-03-30 | 1985-10-18 | Shimadzu Corp | Driving device for reciprocating fine movement |
JPS6170930U (en) * | 1984-10-15 | 1986-05-15 |
-
1987
- 1987-06-22 JP JP62155043A patent/JP2627065B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54146161U (en) * | 1978-03-31 | 1979-10-11 | ||
JPS59196549A (en) * | 1983-04-22 | 1984-11-07 | Jeol Ltd | Sample device for electron ray device or the like |
JPS60207239A (en) * | 1984-03-30 | 1985-10-18 | Shimadzu Corp | Driving device for reciprocating fine movement |
JPS6170930U (en) * | 1984-10-15 | 1986-05-15 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4945156A (en) * | 1988-12-29 | 1990-07-31 | Honeywell Inc. | Solution processing of rigid chain and ladder polymers |
KR100583641B1 (en) * | 1999-04-27 | 2006-05-26 | 삼성전자주식회사 | Apparatus for moving semiconductor wafer |
Also Published As
Publication number | Publication date |
---|---|
JP2627065B2 (en) | 1997-07-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
LAPS | Cancellation because of no payment of annual fees |