JPS61102044U - - Google Patents

Info

Publication number
JPS61102044U
JPS61102044U JP18678684U JP18678684U JPS61102044U JP S61102044 U JPS61102044 U JP S61102044U JP 18678684 U JP18678684 U JP 18678684U JP 18678684 U JP18678684 U JP 18678684U JP S61102044 U JPS61102044 U JP S61102044U
Authority
JP
Japan
Prior art keywords
wafer
wafer transfer
wafer chuck
transfer device
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18678684U
Other languages
English (en)
Other versions
JPH0610685Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984186786U priority Critical patent/JPH0610685Y2/ja
Publication of JPS61102044U publication Critical patent/JPS61102044U/ja
Application granted granted Critical
Publication of JPH0610685Y2 publication Critical patent/JPH0610685Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)

Description

【図面の簡単な説明】
第１図は、本考案の実施例を示す側面図、第２
図は第１図の要部平面図、第３図は第１図、第２
図の連結アームの平面図である。 １……ウエハチヤツク、２……駆動装置。

Claims (1)

  1. 【実用新案登録請求の範囲】 １ ウエハチヤツクの側面に駆動装置を設けたこ
    とを特徴とするウエハ移し換え装置。 ２ 駆動装置が、ウエハチヤツクの開閉装置と平
    行移動装置と上下動装置とからなることを特徴と
    する実用新案登録請求の範囲第１項記載のウエハ
    移し換え装置。
JP1984186786U 1984-12-11 1984-12-11 ウエハ移し換え装置 Expired - Lifetime JPH0610685Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984186786U JPH0610685Y2 (ja) 1984-12-11 1984-12-11 ウエハ移し換え装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984186786U JPH0610685Y2 (ja) 1984-12-11 1984-12-11 ウエハ移し換え装置

Publications (2)

Publication Number Publication Date
JPS61102044U true JPS61102044U (ja) 1986-06-28
JPH0610685Y2 JPH0610685Y2 (ja) 1994-03-16

Family

ID=30744255

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984186786U Expired - Lifetime JPH0610685Y2 (ja) 1984-12-11 1984-12-11 ウエハ移し換え装置

Country Status (1)

Country Link
JP (1) JPH0610685Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112635377A (zh) * 2020-12-25 2021-04-09 上海广川科技有限公司 一种等间距调节模组

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61131465A (ja) * 1984-11-30 1986-06-19 Tomuko:Kk ウエハ移換え装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61131465A (ja) * 1984-11-30 1986-06-19 Tomuko:Kk ウエハ移換え装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112635377A (zh) * 2020-12-25 2021-04-09 上海广川科技有限公司 一种等间距调节模组

Also Published As

Publication number Publication date
JPH0610685Y2 (ja) 1994-03-16

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