JPS63122937A - レーザスポットによる面板走査方法および面板走査制御装置 - Google Patents

レーザスポットによる面板走査方法および面板走査制御装置

Info

Publication number
JPS63122937A
JPS63122937A JP27049286A JP27049286A JPS63122937A JP S63122937 A JPS63122937 A JP S63122937A JP 27049286 A JP27049286 A JP 27049286A JP 27049286 A JP27049286 A JP 27049286A JP S63122937 A JPS63122937 A JP S63122937A
Authority
JP
Japan
Prior art keywords
face plate
scanning
laser spot
radius
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27049286A
Other languages
English (en)
Japanese (ja)
Other versions
JPH052264B2 (Direct
Inventor
Hiroshi Tsuzuki
都築　広
Tadashi Hasegawa
正 長谷川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP27049286A priority Critical patent/JPS63122937A/ja
Publication of JPS63122937A publication Critical patent/JPS63122937A/ja
Publication of JPH052264B2 publication Critical patent/JPH052264B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP27049286A 1986-11-13 1986-11-13 レーザスポットによる面板走査方法および面板走査制御装置 Granted JPS63122937A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27049286A JPS63122937A (ja) 1986-11-13 1986-11-13 レーザスポットによる面板走査方法および面板走査制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27049286A JPS63122937A (ja) 1986-11-13 1986-11-13 レーザスポットによる面板走査方法および面板走査制御装置

Publications (2)

Publication Number Publication Date
JPS63122937A true JPS63122937A (ja) 1988-05-26
JPH052264B2 JPH052264B2 (Direct) 1993-01-12

Family

ID=17487033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27049286A Granted JPS63122937A (ja) 1986-11-13 1986-11-13 レーザスポットによる面板走査方法および面板走査制御装置

Country Status (1)

Country Link
JP (1) JPS63122937A (Direct)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0427848A (ja) * 1990-05-23 1992-01-30 Hitachi Electron Eng Co Ltd 異物検査装置の試料走査方式
WO2019167151A1 (ja) * 2018-02-28 2019-09-06 株式会社日立ハイテクノロジーズ 検査装置、およびその検査方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5555206A (en) * 1978-10-20 1980-04-23 Hitachi Electronics Eng Co Ltd Inspection data processing system for defect on face plate
JPS55133551A (en) * 1979-04-06 1980-10-17 Hitachi Ltd Device for driving circular face plate
JPS60113938A (ja) * 1983-11-26 1985-06-20 Toshiba Corp 表面検査装置
JPS61133843A (ja) * 1984-12-05 1986-06-21 Hitachi Electronics Eng Co Ltd 表面検査装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5555206A (en) * 1978-10-20 1980-04-23 Hitachi Electronics Eng Co Ltd Inspection data processing system for defect on face plate
JPS55133551A (en) * 1979-04-06 1980-10-17 Hitachi Ltd Device for driving circular face plate
JPS60113938A (ja) * 1983-11-26 1985-06-20 Toshiba Corp 表面検査装置
JPS61133843A (ja) * 1984-12-05 1986-06-21 Hitachi Electronics Eng Co Ltd 表面検査装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0427848A (ja) * 1990-05-23 1992-01-30 Hitachi Electron Eng Co Ltd 異物検査装置の試料走査方式
WO2019167151A1 (ja) * 2018-02-28 2019-09-06 株式会社日立ハイテクノロジーズ 検査装置、およびその検査方法
CN111727369A (zh) * 2018-02-28 2020-09-29 株式会社日立高新技术 检查装置及其检查方法
US11346791B2 (en) 2018-02-28 2022-05-31 Hitachi High-Tech Corporation Inspection device and inspection method thereof
CN111727369B (zh) * 2018-02-28 2022-12-20 株式会社日立高新技术 检查装置及其检查方法

Also Published As

Publication number Publication date
JPH052264B2 (Direct) 1993-01-12

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