JPS55133551A - Device for driving circular face plate - Google Patents

Device for driving circular face plate

Info

Publication number
JPS55133551A
JPS55133551A JP4109879A JP4109879A JPS55133551A JP S55133551 A JPS55133551 A JP S55133551A JP 4109879 A JP4109879 A JP 4109879A JP 4109879 A JP4109879 A JP 4109879A JP S55133551 A JPS55133551 A JP S55133551A
Authority
JP
Japan
Prior art keywords
rotary
locus
detecting
constant
speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4109879A
Other languages
Japanese (ja)
Other versions
JPS6136702B2 (en
Inventor
Nobuyuki Akiyama
Mitsuyoshi Koizumi
Yoshimasa Oshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4109879A priority Critical patent/JPS55133551A/en
Publication of JPS55133551A publication Critical patent/JPS55133551A/en
Publication of JPS6136702B2 publication Critical patent/JPS6136702B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To retain the locus of a detection point into spiral with a constant pitch interval and a tangent scanning speed constant by maintaining the peripheral speed of the locus of the detection point constant as well as detecting the rotary angle to control a rotary base into one direction movement. CONSTITUTION:A pulse motor 32 is used as a motor for driving an X table 6 and driven by a rotary angle information from an angular detector for detecting the rotary angle of a rotary base 4 so that the locus of the detecting point may become spiral with a constant pitch interval on a specimen. The position of the table 6 is calculated from the feeding mount of the table 6 to control the rotary speed of a variable speed motor 27 for driving the rotary base using the position value. Even if any disturbance occurs, it can be thus inspected without fail on the entire surface of the specimen, and it does not decelerate the peripheral speed even at the center so as to shorten the inspecting time.
JP4109879A 1979-04-06 1979-04-06 Device for driving circular face plate Granted JPS55133551A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4109879A JPS55133551A (en) 1979-04-06 1979-04-06 Device for driving circular face plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4109879A JPS55133551A (en) 1979-04-06 1979-04-06 Device for driving circular face plate

Publications (2)

Publication Number Publication Date
JPS55133551A true JPS55133551A (en) 1980-10-17
JPS6136702B2 JPS6136702B2 (en) 1986-08-20

Family

ID=12598996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4109879A Granted JPS55133551A (en) 1979-04-06 1979-04-06 Device for driving circular face plate

Country Status (1)

Country Link
JP (1) JPS55133551A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4614427A (en) * 1983-05-20 1986-09-30 Hitachi, Ltd. Automatic contaminants detection apparatus
JPS63122936A (en) * 1986-11-13 1988-05-26 Hitachi Electronics Eng Co Ltd System and apparatus for sampling detection signal of surface plate defect
JPS63122937A (en) * 1986-11-13 1988-05-26 Hitachi Electronics Eng Co Ltd Surface plate scanning system and controller for laser spot
JP2005195545A (en) * 2004-01-09 2005-07-21 Olympus Corp Three-dimensional profile measuring method and system
JP2013246151A (en) * 2012-05-29 2013-12-09 Jfe Steel Corp Coil shape measuring apparatus and coil shape measuring method

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4614427A (en) * 1983-05-20 1986-09-30 Hitachi, Ltd. Automatic contaminants detection apparatus
JPS63122936A (en) * 1986-11-13 1988-05-26 Hitachi Electronics Eng Co Ltd System and apparatus for sampling detection signal of surface plate defect
JPS63122937A (en) * 1986-11-13 1988-05-26 Hitachi Electronics Eng Co Ltd Surface plate scanning system and controller for laser spot
JPH052264B2 (en) * 1986-11-13 1993-01-12 Hitachi Electr Eng
JPH052263B2 (en) * 1986-11-13 1993-01-12 Hitachi Electr Eng
JP2005195545A (en) * 2004-01-09 2005-07-21 Olympus Corp Three-dimensional profile measuring method and system
JP2013246151A (en) * 2012-05-29 2013-12-09 Jfe Steel Corp Coil shape measuring apparatus and coil shape measuring method

Also Published As

Publication number Publication date
JPS6136702B2 (en) 1986-08-20

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