JPS5478967A - Test piece fine moving unit of scanning type electronic microscope - Google Patents

Test piece fine moving unit of scanning type electronic microscope

Info

Publication number
JPS5478967A
JPS5478967A JP14603277A JP14603277A JPS5478967A JP S5478967 A JPS5478967 A JP S5478967A JP 14603277 A JP14603277 A JP 14603277A JP 14603277 A JP14603277 A JP 14603277A JP S5478967 A JPS5478967 A JP S5478967A
Authority
JP
Japan
Prior art keywords
test piece
center
moving
point
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14603277A
Other languages
Japanese (ja)
Other versions
JPS5952513B2 (en
Inventor
Naotake Saito
Yukichi Ueno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14603277A priority Critical patent/JPS5952513B2/en
Publication of JPS5478967A publication Critical patent/JPS5478967A/en
Publication of JPS5952513B2 publication Critical patent/JPS5952513B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To establish the unit suitable for the observation of large sized test piece with small volume of test chamber, by providing the moving mechanism moving toward a direction through mounting the test piece and the rotary mechanism rotating the moving stand having the rotation center on the extension line of electron beam.
CONSTITUTION: The circular test piece 1 D in diameter is placed at the location deviated from the center of field point A, and it is moved to the position of 1C with the shift by D/2 toward X. The point B is the rotation center of the test piece 1 and all the range of test piece can be observed with the rotation taking the point B as the center and the deviation by D/2 toward X. The size of the test chamber 2 is sufficient for the width D and the length 1.5 D, and the detection sensitivity can be increased since the detector 3 is close to the center of observation A. The rotary driven body 20, independently of the drive toward X, is revolved with the revolution of the rotating drive shaft 21 via the rotating moving body 21, allowing to move to the field with a given speed. The X direction moving stand 4 is shifted with the X driving axis 7.
COPYRIGHT: (C)1979,JPO&Japio
JP14603277A 1977-12-07 1977-12-07 Scanning electron microscope sample fine movement device Expired JPS5952513B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14603277A JPS5952513B2 (en) 1977-12-07 1977-12-07 Scanning electron microscope sample fine movement device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14603277A JPS5952513B2 (en) 1977-12-07 1977-12-07 Scanning electron microscope sample fine movement device

Publications (2)

Publication Number Publication Date
JPS5478967A true JPS5478967A (en) 1979-06-23
JPS5952513B2 JPS5952513B2 (en) 1984-12-20

Family

ID=15398556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14603277A Expired JPS5952513B2 (en) 1977-12-07 1977-12-07 Scanning electron microscope sample fine movement device

Country Status (1)

Country Link
JP (1) JPS5952513B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59123150A (en) * 1982-12-28 1984-07-16 Jeol Ltd Sample-moving device in electron ray device
JP2001066231A (en) * 1999-08-31 2001-03-16 Hitachi Ltd Apparatus and method for forming sample

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59123150A (en) * 1982-12-28 1984-07-16 Jeol Ltd Sample-moving device in electron ray device
JP2001066231A (en) * 1999-08-31 2001-03-16 Hitachi Ltd Apparatus and method for forming sample

Also Published As

Publication number Publication date
JPS5952513B2 (en) 1984-12-20

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