JPS5546163A - Detector for test piece location at microscope and so on - Google Patents
Detector for test piece location at microscope and so onInfo
- Publication number
- JPS5546163A JPS5546163A JP11994578A JP11994578A JPS5546163A JP S5546163 A JPS5546163 A JP S5546163A JP 11994578 A JP11994578 A JP 11994578A JP 11994578 A JP11994578 A JP 11994578A JP S5546163 A JPS5546163 A JP S5546163A
- Authority
- JP
- Japan
- Prior art keywords
- test piece
- amount
- motor
- pulse
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Microscoopes, Condenser (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Optical Transform (AREA)
Abstract
PURPOSE: To enable the position detection of coarse and fine operation and to move the image on the fluorescent plate in the same speed at the alteration of magnification of observation, by detecting the amount of movement of test piece through the use of the number of slits from the detector and the input pulse amount to the pulse motor.
CONSTITUTION: The disc 15 providing slits with equal distance is fitted to the linear moving shaft 18 of the holding rod 19 of the test piece 3, and the pulse motor 10 smaller in the amount of shift to one pulse than the slit distance and the variable speed gear 11 changing the revolving speed of the motor 10 depencing on the test piece observing magnification 9 are coupled with 13 the moving shaft 18. Further, depending on the test piece observing magnification 9, the number of pulses to the motor 10 is changed. The light source 16 and the photo electric detector 17 are provided by clipping the disc 15, the amount of test piece movement is calculated based on the number of pulse substracting the changed part depending on the observing magnification 9 from the number of pulses fed to the motor 10 or the detected amount of the detector 17, to detect the position of test piece.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53119945A JPS6042882B2 (en) | 1978-09-29 | 1978-09-29 | Sample position detection device for microscopes, etc. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53119945A JPS6042882B2 (en) | 1978-09-29 | 1978-09-29 | Sample position detection device for microscopes, etc. |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5546163A true JPS5546163A (en) | 1980-03-31 |
JPS6042882B2 JPS6042882B2 (en) | 1985-09-25 |
Family
ID=14774058
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53119945A Expired JPS6042882B2 (en) | 1978-09-29 | 1978-09-29 | Sample position detection device for microscopes, etc. |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6042882B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5012092A (en) * | 1988-12-27 | 1991-04-30 | Hitachi, Ltd. | Method and apparatus for fine movement of specimen stage of electron microscope |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5111405U (en) * | 1974-07-12 | 1976-01-28 |
-
1978
- 1978-09-29 JP JP53119945A patent/JPS6042882B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5111405U (en) * | 1974-07-12 | 1976-01-28 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5012092A (en) * | 1988-12-27 | 1991-04-30 | Hitachi, Ltd. | Method and apparatus for fine movement of specimen stage of electron microscope |
Also Published As
Publication number | Publication date |
---|---|
JPS6042882B2 (en) | 1985-09-25 |
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