JPS5546163A - Detector for test piece location at microscope and so on - Google Patents

Detector for test piece location at microscope and so on

Info

Publication number
JPS5546163A
JPS5546163A JP11994578A JP11994578A JPS5546163A JP S5546163 A JPS5546163 A JP S5546163A JP 11994578 A JP11994578 A JP 11994578A JP 11994578 A JP11994578 A JP 11994578A JP S5546163 A JPS5546163 A JP S5546163A
Authority
JP
Japan
Prior art keywords
test piece
amount
motor
pulse
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11994578A
Other languages
Japanese (ja)
Other versions
JPS6042882B2 (en
Inventor
Yoichi Obara
Yoshiaki Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP53119945A priority Critical patent/JPS6042882B2/en
Publication of JPS5546163A publication Critical patent/JPS5546163A/en
Publication of JPS6042882B2 publication Critical patent/JPS6042882B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Microscoopes, Condenser (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Transform (AREA)

Abstract

PURPOSE: To enable the position detection of coarse and fine operation and to move the image on the fluorescent plate in the same speed at the alteration of magnification of observation, by detecting the amount of movement of test piece through the use of the number of slits from the detector and the input pulse amount to the pulse motor.
CONSTITUTION: The disc 15 providing slits with equal distance is fitted to the linear moving shaft 18 of the holding rod 19 of the test piece 3, and the pulse motor 10 smaller in the amount of shift to one pulse than the slit distance and the variable speed gear 11 changing the revolving speed of the motor 10 depencing on the test piece observing magnification 9 are coupled with 13 the moving shaft 18. Further, depending on the test piece observing magnification 9, the number of pulses to the motor 10 is changed. The light source 16 and the photo electric detector 17 are provided by clipping the disc 15, the amount of test piece movement is calculated based on the number of pulse substracting the changed part depending on the observing magnification 9 from the number of pulses fed to the motor 10 or the detected amount of the detector 17, to detect the position of test piece.
COPYRIGHT: (C)1980,JPO&Japio
JP53119945A 1978-09-29 1978-09-29 Sample position detection device for microscopes, etc. Expired JPS6042882B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53119945A JPS6042882B2 (en) 1978-09-29 1978-09-29 Sample position detection device for microscopes, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53119945A JPS6042882B2 (en) 1978-09-29 1978-09-29 Sample position detection device for microscopes, etc.

Publications (2)

Publication Number Publication Date
JPS5546163A true JPS5546163A (en) 1980-03-31
JPS6042882B2 JPS6042882B2 (en) 1985-09-25

Family

ID=14774058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53119945A Expired JPS6042882B2 (en) 1978-09-29 1978-09-29 Sample position detection device for microscopes, etc.

Country Status (1)

Country Link
JP (1) JPS6042882B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5012092A (en) * 1988-12-27 1991-04-30 Hitachi, Ltd. Method and apparatus for fine movement of specimen stage of electron microscope

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5111405U (en) * 1974-07-12 1976-01-28

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5111405U (en) * 1974-07-12 1976-01-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5012092A (en) * 1988-12-27 1991-04-30 Hitachi, Ltd. Method and apparatus for fine movement of specimen stage of electron microscope

Also Published As

Publication number Publication date
JPS6042882B2 (en) 1985-09-25

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