JPS54107254A - Scanning-type electron microscope - Google Patents

Scanning-type electron microscope

Info

Publication number
JPS54107254A
JPS54107254A JP1351978A JP1351978A JPS54107254A JP S54107254 A JPS54107254 A JP S54107254A JP 1351978 A JP1351978 A JP 1351978A JP 1351978 A JP1351978 A JP 1351978A JP S54107254 A JPS54107254 A JP S54107254A
Authority
JP
Japan
Prior art keywords
sample
scanning
electron microscope
type electron
standard
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1351978A
Other languages
Japanese (ja)
Inventor
Tadashi Otaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1351978A priority Critical patent/JPS54107254A/en
Publication of JPS54107254A publication Critical patent/JPS54107254A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To measure an image magnification with a high precision by putting one standard sample, at least, which has known dimensions and a sample side by side on the same sample stand.
CONSTITUTION: Inspected sample 3 and standard sample 6 are put side by side on sample stand 4. For example, a diffracted grid, a metallic mesh, etc., which have known dimensions are used as standard sample. Thus, the sample is inspected by an electron microcope, so that sample 3 can be directly compared with standard sample 6, and dimensions of sample 3 can be measured with a high precision.
COPYRIGHT: (C)1979,JPO&Japio
JP1351978A 1978-02-10 1978-02-10 Scanning-type electron microscope Pending JPS54107254A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1351978A JPS54107254A (en) 1978-02-10 1978-02-10 Scanning-type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1351978A JPS54107254A (en) 1978-02-10 1978-02-10 Scanning-type electron microscope

Publications (1)

Publication Number Publication Date
JPS54107254A true JPS54107254A (en) 1979-08-22

Family

ID=11835395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1351978A Pending JPS54107254A (en) 1978-02-10 1978-02-10 Scanning-type electron microscope

Country Status (1)

Country Link
JP (1) JPS54107254A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59225310A (en) * 1983-06-07 1984-12-18 Tokyo Daigaku Surface roughness measuring apparatus by scanning type electronic microscope
JPH0249340A (en) * 1987-10-30 1990-02-19 Nano Quest Canada Inc Multiplying factor regulator of scanning electron microscope
WO2001045136A1 (en) * 1999-12-14 2001-06-21 Applied Materials, Inc. Method and system for the examination of specimen using a charged particle beam
CN114535122A (en) * 2022-03-08 2022-05-27 南通立方新材料科技有限公司 Rib trimming device for injection molding food container

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59225310A (en) * 1983-06-07 1984-12-18 Tokyo Daigaku Surface roughness measuring apparatus by scanning type electronic microscope
JPH0246083B2 (en) * 1983-06-07 1990-10-12 Tokyo Daigaku
JPH0249340A (en) * 1987-10-30 1990-02-19 Nano Quest Canada Inc Multiplying factor regulator of scanning electron microscope
WO2001045136A1 (en) * 1999-12-14 2001-06-21 Applied Materials, Inc. Method and system for the examination of specimen using a charged particle beam
CN114535122A (en) * 2022-03-08 2022-05-27 南通立方新材料科技有限公司 Rib trimming device for injection molding food container
CN114535122B (en) * 2022-03-08 2024-01-19 南通立方新材料科技有限公司 Rib trimming device for injection molding food container

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