JPS54107254A - Scanning-type electron microscope - Google Patents
Scanning-type electron microscopeInfo
- Publication number
- JPS54107254A JPS54107254A JP1351978A JP1351978A JPS54107254A JP S54107254 A JPS54107254 A JP S54107254A JP 1351978 A JP1351978 A JP 1351978A JP 1351978 A JP1351978 A JP 1351978A JP S54107254 A JPS54107254 A JP S54107254A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- scanning
- electron microscope
- type electron
- standard
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To measure an image magnification with a high precision by putting one standard sample, at least, which has known dimensions and a sample side by side on the same sample stand.
CONSTITUTION: Inspected sample 3 and standard sample 6 are put side by side on sample stand 4. For example, a diffracted grid, a metallic mesh, etc., which have known dimensions are used as standard sample. Thus, the sample is inspected by an electron microcope, so that sample 3 can be directly compared with standard sample 6, and dimensions of sample 3 can be measured with a high precision.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1351978A JPS54107254A (en) | 1978-02-10 | 1978-02-10 | Scanning-type electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1351978A JPS54107254A (en) | 1978-02-10 | 1978-02-10 | Scanning-type electron microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54107254A true JPS54107254A (en) | 1979-08-22 |
Family
ID=11835395
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1351978A Pending JPS54107254A (en) | 1978-02-10 | 1978-02-10 | Scanning-type electron microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54107254A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59225310A (en) * | 1983-06-07 | 1984-12-18 | Tokyo Daigaku | Surface roughness measuring apparatus by scanning type electronic microscope |
JPH0249340A (en) * | 1987-10-30 | 1990-02-19 | Nano Quest Canada Inc | Multiplying factor regulator of scanning electron microscope |
WO2001045136A1 (en) * | 1999-12-14 | 2001-06-21 | Applied Materials, Inc. | Method and system for the examination of specimen using a charged particle beam |
CN114535122A (en) * | 2022-03-08 | 2022-05-27 | 南通立方新材料科技有限公司 | Rib trimming device for injection molding food container |
-
1978
- 1978-02-10 JP JP1351978A patent/JPS54107254A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59225310A (en) * | 1983-06-07 | 1984-12-18 | Tokyo Daigaku | Surface roughness measuring apparatus by scanning type electronic microscope |
JPH0246083B2 (en) * | 1983-06-07 | 1990-10-12 | Tokyo Daigaku | |
JPH0249340A (en) * | 1987-10-30 | 1990-02-19 | Nano Quest Canada Inc | Multiplying factor regulator of scanning electron microscope |
WO2001045136A1 (en) * | 1999-12-14 | 2001-06-21 | Applied Materials, Inc. | Method and system for the examination of specimen using a charged particle beam |
CN114535122A (en) * | 2022-03-08 | 2022-05-27 | 南通立方新材料科技有限公司 | Rib trimming device for injection molding food container |
CN114535122B (en) * | 2022-03-08 | 2024-01-19 | 南通立方新材料科技有限公司 | Rib trimming device for injection molding food container |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS54107254A (en) | Scanning-type electron microscope | |
JPS5322495A (en) | Automatic analyzer | |
JPS52123163A (en) | Reflection electron image observation unit for scanning type electroni c microscope | |
JPS51116671A (en) | Scanning type electron microscope | |
JPS5418269A (en) | Electron beam detector | |
JPS542168A (en) | Detecting method of electromagnetic field characteristic | |
JPS53140963A (en) | Scanning electronic microscope | |
JPS52149062A (en) | Scanning electronic microscope | |
JPS52104865A (en) | X-ray analysis apparatus in electronic microscope or like | |
JPS5374470A (en) | Measuring instrument for surface electric potential | |
JPS52106268A (en) | Scanning type electronic microscope and its method | |
JPS53106162A (en) | Electron beam meter | |
JPS53115494A (en) | Fuel particle distribution measurement of nuclear fuel compact | |
JPS5347889A (en) | Indicating instrument for serum subdivision | |
JPS533262A (en) | Radiation thickness meter | |
JPS5366152A (en) | Electron microscope | |
JPS52123646A (en) | Scanning type length measuring apparatus | |
JPS5339847A (en) | Scanning electronic microscope | |
JPS5263059A (en) | Method of measuring response characteristic of detector in scanning ty pe electronic microscope | |
JPS53140094A (en) | Corruption measuring system | |
JPS5636058A (en) | Measuring system for surface electric potential | |
JPS53108275A (en) | Scanning electronic microscope | |
JPS53118980A (en) | Exposing method of electron ray | |
JPS5262070A (en) | Measurement of observation waveforms of oscilloscope | |
JPS5210667A (en) | Transmission type electronic microscope processing x-ray analysis func tion |