JPS57204128A - Precise shifter - Google Patents

Precise shifter

Info

Publication number
JPS57204128A
JPS57204128A JP8818681A JP8818681A JPS57204128A JP S57204128 A JPS57204128 A JP S57204128A JP 8818681 A JP8818681 A JP 8818681A JP 8818681 A JP8818681 A JP 8818681A JP S57204128 A JPS57204128 A JP S57204128A
Authority
JP
Japan
Prior art keywords
origin
moving
light source
moving table
rest frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8818681A
Other languages
Japanese (ja)
Inventor
Shigeo Moriyama
Yoshio Hokotani
Satoshi Ido
Fujio Komata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Hitachi Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Nippon Telegraph and Telephone Corp filed Critical Hitachi Ltd
Priority to JP8818681A priority Critical patent/JPS57204128A/en
Publication of JPS57204128A publication Critical patent/JPS57204128A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Abstract

PURPOSE:To position a two-dimensional moving table accurately at an origin by mounting the light source or one of light receivers of a detector detecting the quantity of the moving table moved to the moving table and the other to a rest frame. CONSTITUTION:The moving table consisting of an X table 1 with a driving motor 8 and a Y table 4 is positioned at the origin by means of the detector, in which a wafer 4' is attached onto the moving table while the light source 10 with a lens system 11 is mounted, a position sensor 12 is arranged to the rest frame at a position corresponding to the light source 10 and these are combined. On the other hand, the quantity of the table moved is detected by means of a laser interference measuring machine 7. Accordingly, the table can easily be positioned with the accuracy of + or -1mum without depending upon the mechanical accuracy of the moving base because the position of the origin can be defined from direct relationship between the Y table and the rest frame.
JP8818681A 1981-06-10 1981-06-10 Precise shifter Pending JPS57204128A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8818681A JPS57204128A (en) 1981-06-10 1981-06-10 Precise shifter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8818681A JPS57204128A (en) 1981-06-10 1981-06-10 Precise shifter

Publications (1)

Publication Number Publication Date
JPS57204128A true JPS57204128A (en) 1982-12-14

Family

ID=13935863

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8818681A Pending JPS57204128A (en) 1981-06-10 1981-06-10 Precise shifter

Country Status (1)

Country Link
JP (1) JPS57204128A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62158341A (en) * 1985-12-30 1987-07-14 Hoya Corp Mobile stage
US5914774A (en) * 1994-12-15 1999-06-22 Nikon Corporation Projection exposure apparatus with function to measure imaging characteristics of projection optical system
CN102540765A (en) * 2012-02-13 2012-07-04 志圣科技（广州）有限公司 Device and method for positioning printed circuit board (PCB) of high-accuracy parallel light exposure machine

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5356975A (en) * 1976-11-01 1978-05-23 Hitachi Ltd Exposure apparatus
JPS5837546U (en) * 1981-09-04 1983-03-11 三菱電機株式会社 environmental test equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5356975A (en) * 1976-11-01 1978-05-23 Hitachi Ltd Exposure apparatus
JPS5837546U (en) * 1981-09-04 1983-03-11 三菱電機株式会社 environmental test equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62158341A (en) * 1985-12-30 1987-07-14 Hoya Corp Mobile stage
US5914774A (en) * 1994-12-15 1999-06-22 Nikon Corporation Projection exposure apparatus with function to measure imaging characteristics of projection optical system
CN102540765A (en) * 2012-02-13 2012-07-04 志圣科技（广州）有限公司 Device and method for positioning printed circuit board (PCB) of high-accuracy parallel light exposure machine

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