JPS5528231A - Specimen device for scanning electron microscope or the like - Google Patents

Specimen device for scanning electron microscope or the like

Info

Publication number
JPS5528231A
JPS5528231A JP10047378A JP10047378A JPS5528231A JP S5528231 A JPS5528231 A JP S5528231A JP 10047378 A JP10047378 A JP 10047378A JP 10047378 A JP10047378 A JP 10047378A JP S5528231 A JPS5528231 A JP S5528231A
Authority
JP
Japan
Prior art keywords
specimen
unit
objective lens
lens
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10047378A
Other languages
Japanese (ja)
Inventor
Shojiro Tagata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP10047378A priority Critical patent/JPS5528231A/en
Publication of JPS5528231A publication Critical patent/JPS5528231A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent the specimen moving device and objective lens for an electron microscope from damaging due to collision by detecting the fact that the specimen moving device tends to contact the objective lens via light.
CONSTITUTION: An oblique unit 3 is mounted under an objective lens 1, and a specimen holder 5 for holding a specimen 2 and specimen stage 4 are placed on the unit 3. Slit-like light is generated via a filament 6 as light source, an optical lens 7, a filter 9 and a slite 10a, etc. to allow a photodetector 11 to detect the light to thereby detect the fact that the unit 3 approaches the lens 1. Thus, it can detect the abnormal approach of the specimen holder or the like to the lens so as to prevent the specimen moving unit and objective lens from damaging due to their collision.
COPYRIGHT: (C)1980,JPO&Japio
JP10047378A 1978-08-18 1978-08-18 Specimen device for scanning electron microscope or the like Pending JPS5528231A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10047378A JPS5528231A (en) 1978-08-18 1978-08-18 Specimen device for scanning electron microscope or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10047378A JPS5528231A (en) 1978-08-18 1978-08-18 Specimen device for scanning electron microscope or the like

Publications (1)

Publication Number Publication Date
JPS5528231A true JPS5528231A (en) 1980-02-28

Family

ID=14274871

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10047378A Pending JPS5528231A (en) 1978-08-18 1978-08-18 Specimen device for scanning electron microscope or the like

Country Status (1)

Country Link
JP (1) JPS5528231A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5264705A (en) * 1991-04-04 1993-11-23 Jeol Ltd. Specimen-driving apparatus for electron microscope which tilts and translates while preventing contact damage
CN107437487A (en) * 2016-05-25 2017-12-05 宝山钢铁股份有限公司 One kind is used for sample platform of scanning electronic microscope lifting anticollision device, collision-prevention device
CN110006766A (en) * 2019-04-04 2019-07-12 中国科学院金属研究所 A kind of protective device of micro Vickers object lens

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5264705A (en) * 1991-04-04 1993-11-23 Jeol Ltd. Specimen-driving apparatus for electron microscope which tilts and translates while preventing contact damage
CN107437487A (en) * 2016-05-25 2017-12-05 宝山钢铁股份有限公司 One kind is used for sample platform of scanning electronic microscope lifting anticollision device, collision-prevention device
CN110006766A (en) * 2019-04-04 2019-07-12 中国科学院金属研究所 A kind of protective device of micro Vickers object lens

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