JPS5528231A - Specimen device for scanning electron microscope or the like - Google Patents
Specimen device for scanning electron microscope or the likeInfo
- Publication number
- JPS5528231A JPS5528231A JP10047378A JP10047378A JPS5528231A JP S5528231 A JPS5528231 A JP S5528231A JP 10047378 A JP10047378 A JP 10047378A JP 10047378 A JP10047378 A JP 10047378A JP S5528231 A JPS5528231 A JP S5528231A
- Authority
- JP
- Japan
- Prior art keywords
- specimen
- unit
- objective lens
- lens
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent the specimen moving device and objective lens for an electron microscope from damaging due to collision by detecting the fact that the specimen moving device tends to contact the objective lens via light.
CONSTITUTION: An oblique unit 3 is mounted under an objective lens 1, and a specimen holder 5 for holding a specimen 2 and specimen stage 4 are placed on the unit 3. Slit-like light is generated via a filament 6 as light source, an optical lens 7, a filter 9 and a slite 10a, etc. to allow a photodetector 11 to detect the light to thereby detect the fact that the unit 3 approaches the lens 1. Thus, it can detect the abnormal approach of the specimen holder or the like to the lens so as to prevent the specimen moving unit and objective lens from damaging due to their collision.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10047378A JPS5528231A (en) | 1978-08-18 | 1978-08-18 | Specimen device for scanning electron microscope or the like |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10047378A JPS5528231A (en) | 1978-08-18 | 1978-08-18 | Specimen device for scanning electron microscope or the like |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5528231A true JPS5528231A (en) | 1980-02-28 |
Family
ID=14274871
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10047378A Pending JPS5528231A (en) | 1978-08-18 | 1978-08-18 | Specimen device for scanning electron microscope or the like |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5528231A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5264705A (en) * | 1991-04-04 | 1993-11-23 | Jeol Ltd. | Specimen-driving apparatus for electron microscope which tilts and translates while preventing contact damage |
CN107437487A (en) * | 2016-05-25 | 2017-12-05 | 宝山钢铁股份有限公司 | One kind is used for sample platform of scanning electronic microscope lifting anticollision device, collision-prevention device |
CN110006766A (en) * | 2019-04-04 | 2019-07-12 | 中国科学院金属研究所 | A kind of protective device of micro Vickers object lens |
-
1978
- 1978-08-18 JP JP10047378A patent/JPS5528231A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5264705A (en) * | 1991-04-04 | 1993-11-23 | Jeol Ltd. | Specimen-driving apparatus for electron microscope which tilts and translates while preventing contact damage |
CN107437487A (en) * | 2016-05-25 | 2017-12-05 | 宝山钢铁股份有限公司 | One kind is used for sample platform of scanning electronic microscope lifting anticollision device, collision-prevention device |
CN110006766A (en) * | 2019-04-04 | 2019-07-12 | 中国科学院金属研究所 | A kind of protective device of micro Vickers object lens |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE68929553D1 (en) | Confocal scanning microscope | |
ATE89671T1 (en) | COMBINED BRIGHTFIELD-DARKFIELD RESPONSE ILLUMINATION DEVICE. | |
ES8505480A1 (en) | Device for the detection of faults. | |
DE3778406D1 (en) | OPTICAL HEAD DEVICES FOR TURNTABLE. | |
JPS5542185A (en) | Detecting device for arc welding or the like | |
JPS5594145A (en) | Method of and device for inspecting surface of article | |
JPS5528231A (en) | Specimen device for scanning electron microscope or the like | |
JPS5687818A (en) | Reflex type position detector | |
WO2001044852A3 (en) | Microscopy method and device | |
CA2210801A1 (en) | Method and apparatus for three-dimensional microscopy with enhanced depth resolution | |
JPS5639516A (en) | Comparative inspecting mechanism of photomask | |
DE69106683D1 (en) | Device for the detection of irregularities in the diameter of a thread. | |
JPS5454056A (en) | Photoelectric detector | |
JPS564004A (en) | System for detecting minute defects of body | |
JPS54103362A (en) | Optical observation apparatus | |
JPS51132757A (en) | Optical observation device | |
JPS56132508A (en) | Pattern measuring device | |
JPS56146112A (en) | Optical microscope | |
JPS57207850A (en) | Monitoring apparatus of plasma luminous distribution | |
SE9601800D0 (en) | Device and method for detecting defects | |
JPS641129A (en) | Light beam spot observing device | |
JPS53131857A (en) | Measuring device of optical fiber cut-off wavelength | |
JPS56116259A (en) | Transmissive electron microscope | |
JPS54133395A (en) | Detecting method and apparatus for carck on substrate | |
JPS5745230A (en) | Inspecting device for photomask dry plate |