JPS5639516A - Comparative inspecting mechanism of photomask - Google Patents
Comparative inspecting mechanism of photomaskInfo
- Publication number
- JPS5639516A JPS5639516A JP11509879A JP11509879A JPS5639516A JP S5639516 A JPS5639516 A JP S5639516A JP 11509879 A JP11509879 A JP 11509879A JP 11509879 A JP11509879 A JP 11509879A JP S5639516 A JPS5639516 A JP S5639516A
- Authority
- JP
- Japan
- Prior art keywords
- patterns
- light
- masks
- inspecting
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To magnify patterns of different sizes at the same magnification and enable these to be easily comparatively inspected by constituting an exposure optical system of irradiating inspecting light with a zoom lens system.
CONSTITUTION: Light from a single light source S is irradiated to the retrieval stages 22, 24 which are movable in the axial directions by motors 26, 28 and are placed with masks for comparison, through a scanning mirror 34, mirrors 38, 36 and objective microscopes 30, 32. The light passed through the masks passes through condensing lenses 40, 42 and the signals corresponding to the mask pattern shapes are emitted from photocells 44, 46, and are amplified in amplifiers 48, 50, after which these are compared and contrasted in a signal processing circuit 52. A zoom lens system which is movable by a motor 68 is provided to one 32 of the objective microscopes of such inspecting mechanism and the zoom action is performed automatically or manually. Since the patterns are magnified to the same magnification in this way, the patterns converted to the electric signals may be easily comparatively inspected.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11509879A JPS5639516A (en) | 1979-09-10 | 1979-09-10 | Comparative inspecting mechanism of photomask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11509879A JPS5639516A (en) | 1979-09-10 | 1979-09-10 | Comparative inspecting mechanism of photomask |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5639516A true JPS5639516A (en) | 1981-04-15 |
| JPS6138448B2 JPS6138448B2 (en) | 1986-08-29 |
Family
ID=14654153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11509879A Granted JPS5639516A (en) | 1979-09-10 | 1979-09-10 | Comparative inspecting mechanism of photomask |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5639516A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57212404A (en) * | 1981-06-24 | 1982-12-27 | Hitachi Ltd | Comparison type inspector |
| JPS58168228A (en) * | 1982-08-24 | 1983-10-04 | Fujitsu Ltd | Comparison and inspection of photomask and apparatus thereof |
| JP2015014756A (en) * | 2013-07-08 | 2015-01-22 | 株式会社東芝 | Mask distortion measuring apparatus and method thereof |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01263435A (en) * | 1988-04-13 | 1989-10-19 | Harman Co Ltd | Method for installing hot water feeding device for bath |
| JPH0579353U (en) * | 1992-03-23 | 1993-10-29 | 日本ユプロ株式会社 | Pipe connection structure to the bath adapter |
-
1979
- 1979-09-10 JP JP11509879A patent/JPS5639516A/en active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57212404A (en) * | 1981-06-24 | 1982-12-27 | Hitachi Ltd | Comparison type inspector |
| JPH0247859B2 (en) * | 1981-06-24 | 1990-10-23 | Hitachi Ltd | |
| JPS58168228A (en) * | 1982-08-24 | 1983-10-04 | Fujitsu Ltd | Comparison and inspection of photomask and apparatus thereof |
| JPS632136B2 (en) * | 1982-08-24 | 1988-01-18 | Fujitsu Ltd | |
| JP2015014756A (en) * | 2013-07-08 | 2015-01-22 | 株式会社東芝 | Mask distortion measuring apparatus and method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6138448B2 (en) | 1986-08-29 |
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