JPS6442812A - Production lot number exposure device - Google Patents

Production lot number exposure device

Info

Publication number
JPS6442812A
JPS6442812A JP62200407A JP20040787A JPS6442812A JP S6442812 A JPS6442812 A JP S6442812A JP 62200407 A JP62200407 A JP 62200407A JP 20040787 A JP20040787 A JP 20040787A JP S6442812 A JPS6442812 A JP S6442812A
Authority
JP
Japan
Prior art keywords
exposure
exposed
exposure device
lot number
allows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62200407A
Other languages
Japanese (ja)
Inventor
Koichi Yoshihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62200407A priority Critical patent/JPS6442812A/en
Publication of JPS6442812A publication Critical patent/JPS6442812A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54406—Marks applied to semiconductor devices or parts comprising alphanumeric information

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To realize miniaturization and to enable incorporation into another exposure device by changing one part of optical system by providing a scanning mirror which allows the exposure position for a pair of objects to be exposed to be changed, and then by facilitating exposure of lot numbers in stage fixation. CONSTITUTION:A scanning mirror 17 for changing optical path is provided after a reduction lens 16 and then a rotary part 20 is provided to change incident angle of light into an object to be exposed in reference to the light axis L of optical system of lens in a specified angle each time. Then, the scanning width is made smaller and larger where the exposure position is closer to or away from the center of light axis, respectively. Thus, a lot number 21 is formed at an unexposed area (area of metal film 22) on mask exposure. It allows the unit to be compact, cost effective, and to be incorporated into another exposure device since the object to be exposed is fixed.
JP62200407A 1987-08-11 1987-08-11 Production lot number exposure device Pending JPS6442812A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62200407A JPS6442812A (en) 1987-08-11 1987-08-11 Production lot number exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62200407A JPS6442812A (en) 1987-08-11 1987-08-11 Production lot number exposure device

Publications (1)

Publication Number Publication Date
JPS6442812A true JPS6442812A (en) 1989-02-15

Family

ID=16423804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62200407A Pending JPS6442812A (en) 1987-08-11 1987-08-11 Production lot number exposure device

Country Status (1)

Country Link
JP (1) JPS6442812A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01160013A (en) * 1987-12-17 1989-06-22 Nec Kyushu Ltd Reduction stepper
JPH03277521A (en) * 1990-03-28 1991-12-09 Mitsubishi Heavy Ind Ltd Injection driving device of injection molding machine
JPH04104659U (en) * 1991-02-18 1992-09-09 コニカ株式会社 photographic material

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01160013A (en) * 1987-12-17 1989-06-22 Nec Kyushu Ltd Reduction stepper
JPH03277521A (en) * 1990-03-28 1991-12-09 Mitsubishi Heavy Ind Ltd Injection driving device of injection molding machine
JPH04104659U (en) * 1991-02-18 1992-09-09 コニカ株式会社 photographic material

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