JPS57207570A - Article holding jig - Google Patents

Article holding jig

Info

Publication number
JPS57207570A
JPS57207570A JP9134181A JP9134181A JPS57207570A JP S57207570 A JPS57207570 A JP S57207570A JP 9134181 A JP9134181 A JP 9134181A JP 9134181 A JP9134181 A JP 9134181A JP S57207570 A JPS57207570 A JP S57207570A
Authority
JP
Japan
Prior art keywords
driving shaft
rotated
vaporization
treated
changing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9134181A
Other languages
Japanese (ja)
Other versions
JPS6020065B2 (en
Inventor
Takahiro Miyano
Kunji Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP9134181A priority Critical patent/JPS6020065B2/en
Publication of JPS57207570A publication Critical patent/JPS57207570A/en
Publication of JPS6020065B2 publication Critical patent/JPS6020065B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Spray Control Apparatus (AREA)
  • Coating Apparatus (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE: To perform vaporization and coating of many kinds of articles to be treated by changing the driving shaft of an article holding part that makes revolution around others and rotation on its axis and enabling changing of distance from the source of vaporization according to the shape and dimension of an object to be treated.
CONSTITUTION: A revolving gear 4 is driven by rotation of a motor and a rotating gear 13 that engages with a fixed gear 2 is driven and rotated. Consequently, an upper driving shaft 14 is rotated through the first and second bevel gears 20, 22, 26. A driving shaft 10 is rotated on its axis and revolved by a rotary disk 3, and an object 16 to be treated lying at the lower end of the driving shaft undergoes treatment such as vacuum vaporization etc. When the object 16 is changed to other one, it is held by changing the angle of the lower driving shaft 14 by operating a set pin 27, and revolved and rotated by the motor. Thus, the distance from the vaporization source is changed according to the shape and dimension of the object and a uniform coating film can be formed.
COPYRIGHT: (C)1982,JPO&Japio
JP9134181A 1981-06-12 1981-06-12 Article holding jig Expired JPS6020065B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9134181A JPS6020065B2 (en) 1981-06-12 1981-06-12 Article holding jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9134181A JPS6020065B2 (en) 1981-06-12 1981-06-12 Article holding jig

Publications (2)

Publication Number Publication Date
JPS57207570A true JPS57207570A (en) 1982-12-20
JPS6020065B2 JPS6020065B2 (en) 1985-05-20

Family

ID=14023712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9134181A Expired JPS6020065B2 (en) 1981-06-12 1981-06-12 Article holding jig

Country Status (1)

Country Link
JP (1) JPS6020065B2 (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60116775A (en) * 1983-11-28 1985-06-24 Pioneer Electronic Corp Treatment device for vapor deposition
JPH03229870A (en) * 1989-07-18 1991-10-11 Optical Coating Lab Inc Coating of thin film having optical property on planar and nonplanar supporting body
US5618388A (en) * 1988-02-08 1997-04-08 Optical Coating Laboratory, Inc. Geometries and configurations for magnetron sputtering apparatus
JP2009022920A (en) * 2007-07-23 2009-02-05 Origin Electric Co Ltd Apparatus and method for spreading coating material
CN102312203A (en) * 2010-07-01 2012-01-11 向熙科技股份有限公司 Vacuum coating system capable of swinging workpiece and swinging carrier
CN102560372A (en) * 2010-12-21 2012-07-11 向熙科技股份有限公司 Multilayer thin film preparation system and method thereof
CN103920615A (en) * 2014-04-30 2014-07-16 常州君合科技有限公司 Transmission device of multi-basket planetary coating machine
CN104549877A (en) * 2014-12-24 2015-04-29 苏州用朴合金工具有限公司 Numerical control blade lubricator
CN104588234A (en) * 2014-12-10 2015-05-06 苏州欣航微电子有限公司 Fan base plate coating protecting and processing device
CN110882876A (en) * 2019-12-21 2020-03-17 谷玉芝 Automatic workpiece coloring equipment
CN111001543A (en) * 2019-12-05 2020-04-14 西安双德喜信息科技有限公司 Electronic components is with electronic components adhesive deposite device

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60116775A (en) * 1983-11-28 1985-06-24 Pioneer Electronic Corp Treatment device for vapor deposition
JPH0350833B2 (en) * 1983-11-28 1991-08-02 Pioneer Electronic Corp
US5618388A (en) * 1988-02-08 1997-04-08 Optical Coating Laboratory, Inc. Geometries and configurations for magnetron sputtering apparatus
JPH03229870A (en) * 1989-07-18 1991-10-11 Optical Coating Lab Inc Coating of thin film having optical property on planar and nonplanar supporting body
JP2695514B2 (en) * 1989-07-18 1997-12-24 オプチカル コーティング ラボラトリー インコーポレーテッド Method of depositing thin films with optical performance on planar and non-planar supports
JP2009022920A (en) * 2007-07-23 2009-02-05 Origin Electric Co Ltd Apparatus and method for spreading coating material
CN102312203A (en) * 2010-07-01 2012-01-11 向熙科技股份有限公司 Vacuum coating system capable of swinging workpiece and swinging carrier
CN102560372A (en) * 2010-12-21 2012-07-11 向熙科技股份有限公司 Multilayer thin film preparation system and method thereof
CN103920615A (en) * 2014-04-30 2014-07-16 常州君合科技有限公司 Transmission device of multi-basket planetary coating machine
CN104588234A (en) * 2014-12-10 2015-05-06 苏州欣航微电子有限公司 Fan base plate coating protecting and processing device
CN104549877A (en) * 2014-12-24 2015-04-29 苏州用朴合金工具有限公司 Numerical control blade lubricator
CN111001543A (en) * 2019-12-05 2020-04-14 西安双德喜信息科技有限公司 Electronic components is with electronic components adhesive deposite device
CN110882876A (en) * 2019-12-21 2020-03-17 谷玉芝 Automatic workpiece coloring equipment
CN110882876B (en) * 2019-12-21 2021-09-10 江苏武专科技有限公司 Automatic workpiece coloring equipment

Also Published As

Publication number Publication date
JPS6020065B2 (en) 1985-05-20

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