CN102560372A - Multilayer thin film preparation system and method thereof - Google Patents
Multilayer thin film preparation system and method thereof Download PDFInfo
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- CN102560372A CN102560372A CN2010105973305A CN201010597330A CN102560372A CN 102560372 A CN102560372 A CN 102560372A CN 2010105973305 A CN2010105973305 A CN 2010105973305A CN 201010597330 A CN201010597330 A CN 201010597330A CN 102560372 A CN102560372 A CN 102560372A
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Abstract
The invention provides a multilayer thin film preparation system and a method thereof. The multilayer thin film preparation system comprises a first ring-shaped revolving unit, a second ring-shaped revolving unit, a first rotating unit and a second rotating unit. One or more work pieces are circularly revolved by utilizing the first ring-shaped and the second ring-shaped revolving units, and transferred and rapidly rotated by utilizing the first and the second rotating units, so as to cool the work pieces plated with films or conduct a coating process on the work pieces, improve the elasticity of a film plating step and improve the process efficiency.
Description
Technical field
The invention relates to a kind of system and method thereof of preparing, particularly prepare system and method thereof relevant for a kind of multilayer film.
Background technology
In the prior art, industry normally adopts the processing procedure that sprays paint to the plated film of workpiece, mainly is that the outside surface of this workpiece is coated shades of colour.Yet the jet-plating metallization processing procedure replaces the processing procedure that sprays paint gradually in recent years, is widely used in all kinds of electronic product shell and is coated with and loads onto the for example application of the products such as shell of the shell of notebook computer and mobile phone.
With reference to figure 1, it illustrates the synoptic diagram that plated film in the prior art prepares system 100.This plated film prepares system 100 and comprises workpiece pan feeding board 102, filming equipment 104 and workpiece discharging board 106; This workpiece pan feeding board 102, filming equipment 104 and workpiece discharging board 106 are a straight line in regular turn and arrange; In order to plate the thicker rete of one deck, must utilize 104 pairs of workpiece surface of this filming equipment to carry out the processing procedure of continuous coating, yet continuously this workpiece carried out plated film; Elapsed-time standards is more of a specified duration; So the workpiece shell produces the workpiece shell of distortion, particularly plastic material easily because of high temperature, more easily because of the softer gross distortion that produces of the material of plastics.
In addition; When the stratified film of desiring to plate various unlike materials during in workpiece surface; This stratified film for example is high sense of touch coatings, abrasion resisting rete, colored rete and metallic diaphragm; Because the thicknesses of layers of storehouse is bigger, the time that makes this workpiece shell rest in this filming equipment 104 is more of a specified duration, causes this workpiece to be prone to produce distortion because of high temperature; And; During the plated film of two-layer rete, need earlier the workpiece shell to be taken out from this filming equipment 104 to cool off; Skim layer under the sputter again; Yet the equipment that this filming equipment 104 only is a single kind of function (for example can only as the usefulness of sputter) can't satisfy and carry out multicoating and a plurality of cooling step simultaneously and intert the process requirement of using alternately.
Therefore, this plated film prepares system when forming multicoating, and the elasticity of its fabrication steps is selected to receive very big restriction, so that production cost is higher, and production efficiency is lower.Therefore need a kind of new-type system for preparing of development, to overcome above-mentioned problem.
Summary of the invention
The object of the present invention is to provide a kind of multilayer film to prepare system and method thereof, utilize two groups of ring-like turning units to carry out multicoating step and cooling step, to improve the elasticity of this multicoating step, to improve the efficient of fabrication steps in the surface of workpiece.
Another object of the present invention is to provide a kind of multilayer film to prepare system and method thereof, utilize two groups of ring-like turning units to form thicker multicoating, and solve the problem of this workpiece deformation in the surface of this workpiece.
For reaching above-mentioned purpose, the present invention provides a kind of multilayer film to prepare system and method thereof.In first embodiment, this multilayer film system of preparing comprises the first ring-like turning unit, the second ring-like turning unit, first rotary unit and second rotary unit.This first ring-like turning unit has some first type worktable of ring-like arrangement in regular turn, and those first type worktable are in order to locate a workpiece, and those first type worktable have the function that can carry out different process requirement to this workpiece.This second ring-like turning unit is adjacent to this first ring-like turning unit, and this second ring-like turning unit has some second type worktable of ring-like arrangement in regular turn, and those second type worktable have the function that can carry out different process requirement to this workpiece.This first rotary unit is arranged between the periphery of this first ring-like turning unit and this second ring-like turning unit; Utilize the first clamping module between this first ring-like turning unit and this second ring-like turning unit, to transmit this workpiece mutually; And utilize this first clamping module is positioned at this first ring-like turning unit and this second ring-like turning unit with clamping this workpiece to this first rotary unit; So that this first rotary unit is carried out a rotation processing procedure of this workpiece, also can carry out transmit this workpiece and rotate this workpiece wherein both or carry out wherein any one.This second rotary unit is arranged between the periphery of this first ring-like turning unit and this second ring-like turning unit; And this second rotary unit and this first rotary unit are oppositely arranged; Utilize one second clamping module between this first ring-like turning unit and this second ring-like turning unit, to transmit this workpiece mutually; And utilize this second clamping module is positioned at this first ring-like turning unit and this second ring-like turning unit with clamping this workpiece to this second rotary unit; So that this second rotary unit is carried out another rotation processing procedure of this workpiece; Also can carry out transmit this workpiece and rotate this workpiece wherein both or carry out wherein any one, to form multicoating on this workpiece.
This first ring-like turning unit and this second ring-like turning unit for example are that an intermittent type rotates; This intermittent type rotates to this first ring-like turning unit and this second ring-like turning unit be the revolution spacing of each two first type worktable of rotation and two second type worktable, so that this workpiece is in the state that processing procedure hockets between the processing procedure of the processing procedure of this first ring-like turning unit and this second ring-like turning unit and this first rotary unit and this second rotary unit.
In a second embodiment; This multilayer film system of preparing comprises one first ring-like turning unit; Some first type worktable with ring-like arrangement in regular turn; Those first type worktable are in order to locate a workpiece, and those first type worktable have the function that can carry out some first process requirement inequality to this workpiece; One second ring-like turning unit; Be adjacent to this first ring-like turning unit; This second ring-like turning unit has some second type worktable of ring-like arrangement in regular turn, and those second type worktable have the function that can carry out some second process requirement inequality to this workpiece; One first turntable module; Be adjacent to this first ring-like turning unit and this second ring-like turning unit; This first turntable module has some the 3rd type worktable of ring-like arrangement in regular turn, and those the 3rd type worktable have the function that can carry out some the 3rd process requirement inequality to this workpiece; And one first rotary unit; Be arranged between the periphery of this first ring-like turning unit, this second ring-like turning unit and this first turntable module; Utilize one first clamping module to transmit this workpiece each other mutually this first ring-like turning unit, this second ring-like turning unit and this first turntable module three; And utilize this workpiece that this first clamping module is positioned at this first ring-like turning unit, this second ring-like turning unit and this first turntable module with clamping to this first rotary unit, so that this first rotary unit is carried out a rotation processing procedure of this workpiece.
Compared to prior art; Multilayer film of the present invention prepare system and method is utilized the first ring-like turning unit and the second ring-like turning unit circulation revolution one or a plurality of workpiece; This first rotary unit and this second rotary unit transmit workpiece and this workpiece of fast rotational; With the workpiece after the cooling plated film,, improve processing procedure efficient to improve the elasticity of this plated film step.And the surface in this workpiece forms thicker multicoating, and solves the problem of this workpiece deformation.
For letting the foregoing of the present invention can be more obviously understandable, hereinafter is special lifts preferred embodiment, and cooperates appended graphicly, elaborates as follows.
Description of drawings
Fig. 1 illustrates the synoptic diagram that plated film in the prior art prepares system.
Fig. 2 illustrates the planar configuration synoptic diagram of the system for preparing according to multilayer film in the first embodiment of the invention.
Fig. 3 illustrates the planar configuration synoptic diagram of the system for preparing according to multilayer film in the second embodiment of the invention.
Fig. 4 illustrates the schema of the method for preparing according to multilayer film in the embodiment of the invention.
Embodiment
With reference to figure 2, it illustrates the planar configuration synoptic diagram for preparing system 200 according to multilayer film in the first embodiment of the invention.These multilayer film prepare system 200 and mainly comprise the ring-like turning unit of the first ring-like turning unit 202, second 204, first rotary unit 206 and second rotary unit 208.This first ring-like turning unit 202 has some first type worktable 210 (for example shown in label 210a ~ 210e) of ring-like arrangement in regular turn; Those first type worktable 210 are in order to locate a workpiece 212, this workpiece 212 is carried out the function of some first process requirement inequality.This second ring-like turning unit 204 is adjacent to this first ring-like turning unit 202; This second ring-like turning unit 204 has some second type worktable 211 (for example shown in label 211a ~ 211e) of ring-like arrangement in regular turn, this workpiece 212 is carried out the function of some second process requirement inequality.This first rotary unit 206 is arranged between the periphery of this first ring-like turning unit 202 and this second ring-like turning unit 204; Utilize the first clamping module 206b between this first ring-like turning unit 202 and this second ring-like turning unit 204, to transmit this workpiece mutually; And utilize this workpiece that this first clamping module 206b is positioned at this first ring-like turning unit 202 and this second ring-like turning unit 204 with clamping to this first rotary unit 206; So that this first rotary unit 206 is carried out a rotation processing procedure of these workpiece 212, also can carry out transmit this workpiece 212 and rotate this workpiece 212 wherein both; Or carry out wherein any one, and for example first rotary unit 206 can be and only carries out spinning movement, carrying out the rotation processing procedure of this workpiece 212, and the action of not transmitting workpiece 212.This second rotary unit 208 is arranged between the periphery of this first ring-like turning unit 202 and this second ring-like turning unit 204; And this second rotary unit 208 is oppositely arranged with this first rotary unit 206; Utilize the second clamping module 208b between this first ring-like turning unit 202 and this second ring-like turning unit 204, to transmit this workpiece mutually; And utilize this workpiece 212 that this second clamping module 208b is positioned at this first ring-like turning unit 202 and this second ring-like turning unit 204 with clamping to this second rotary unit 208; So that this second rotary unit 208 is carried out another rotation processing procedure of these workpiece 212, also can carry out transmit this workpiece 212 and rotate this workpiece 212 wherein both; Or carry out wherein any one, and for example second rotary unit 208 can be and only carries out spinning movement, carrying out the rotation processing procedure of this workpiece 212, and the action of not transmitting workpiece 212.First ring-like turning unit 202, the second ring-like turning unit 204 for example is large-scale rotating disk.This first clamping module 206b and the second clamping module 208b for example are mechanical arms.Those first process requirement and second process requirement for example are processing procedures such as pan feeding, sputter rete, cleaning and coating.It should be noted that this is 212 to be example with a job, multilayer film of the present invention prepare the coating film treatment that system 200 can handle a plurality of workpiece 212 simultaneously, for example on each worktable 210,211, handle a workpiece 212.
In one embodiment; This first ring-like turning unit 202 and this second ring-like turning unit 204 are that an intermittent type rotates; It is that this first ring-like turning unit 202 and this second ring-like turning unit 204 are each revolution spacing of rotating two first type worktable 210 and two second type worktable 211 that this intermittent type rotates; That is rotate two worktable spacings, so that this workpiece 212 is in the state that hockets between the processing procedure of the processing procedure of this first ring-like turning unit 202 and this second ring-like turning unit 204 and this first rotary unit 206 and this second rotary unit 208 at every turn.
Multilayer film of the present invention prepare system 200; Comprise that more some first types are handled board 216 (for example shown in label 216a, the 216b) and some second types are handled board 218 (for example shown in label 218a, the 218b); Those first types are handled those first type worktable (210b, 210c) that board (216a, 216b) corresponds to a part; Those second types are handled those second type worktable (211b, 211c) that board (218a, 218b) corresponds to a part; So that this workpiece 212 is handled board (216,218) and those second types processing board 218 those first process requirement of execution and those second process requirement in those first types, or carry out those first process requirement and those second process requirement at those first type worktable (210b, 210c) of a part and those second type worktable (211b, 211c) of a part.Be the standard setting interface, the junctor (connector) that this standard setting interface for example is standard signal protocol interface and standard between those first type worktable (210b, 210c) of those first types processing boards (216a, 216b) and those second a types processing board (218a, 218b) and a part and those second type worktable (211b, 211c) of a part.
In one embodiment; This first ring-like turning unit 202 has the first worktable 210a to the, the five worktable 210e of several ring-like arrangements in regular turn; This first worktable 210a to the 5th worktable 210e in order to the location workpiece 212; This first worktable 210a corresponds to a pan feeding board 214, first respectively to the 5th worktable 210e and handles board 216a, the second processing board 216b, this first rotary unit 206 and this second rotary unit 208; This first ring-like turning unit 202 by this this workpiece 212 of pan feeding board 214 clampings to this first worktable 210a, to carry out the pan feeding step.This first ring-like turning unit 202 rotates with the workpiece 212 that moves this first worktable 210a and second handles board 216b to this; So that this workpiece 212 is carried out the first filming step; And this first ring-like turning unit 202 rotates to move this workpiece 212 to this first processing board 216a, so that this workpiece 212 is carried out one second plated film step.In one embodiment; This first is handled board 216a and this second and handles board 216b and be selected from sputter (sputtering) board, vapor deposition board, chemical vapour deposition (chemical vapor deposition, CVD) group that forms of board, plating (electroplating) board and arc coating deposition (arc coating) board.
This second ring-like turning unit 204 is adjacent to this first ring-like turning unit 202; This second ring-like turning unit 204 has the 6th worktable 211a to the ten worktable 211e of some ring-like arrangements in regular turn; The 6th worktable 211a to the tenth worktable 211e in order to locate this workpiece 212; The 6th worktable 211a corresponds to this first rotary unit the 206, the 3rd respectively to the tenth worktable 211e and handles board 218a, the and manage board 218b, discharging board 220 and second rotary unit 208 everywhere; This second ring-like turning unit 204 rotates with the workpiece 212 that moves the 6th worktable 211a and the manages board 218b everywhere to this, to carry out the cure step of this workpiece 212.In one embodiment; This second ring-like turning unit 204 rotates with the workpiece 212 to the 3rd that moves this second rotary unit 208 handles board 218a; Detect step to carry out one of this workpiece 212; And this second ring-like turning unit 208 rotate with move the 3rd handle board 218a workpiece 212 to this discharging board 220, to carry out a discharging step of this workpiece.In one embodiment; Rotary module (fixture type or sucked type) that this first rotary unit 206 and this second rotary unit 208 for example are rotary chill station and/or spraying spin coating device (spray spin coater) are with as cooling off or the purposes of rotary coating coating.
This first rotary unit 206 is arranged between the periphery of this first ring-like turning unit 202 and this second ring-like turning unit 204; This first rotary unit 206 corresponds to the 4th worktable 210d and the 6th worktable 211a respectively; After this first processing board 216a carries out these second plated film steps to this workpiece 212; This first rotary unit 206 utilizes this workpiece 212 of this first clamping module 206b gripping to this first rotary unit 206; With by rotating this first rotary unit 206; This workpiece 212 being carried out second cooling steps and second application step both one of them, and this first rotary unit 206 transmits the 6th worktable 211a of this workpiece 212 to these second ring-like turning units 204, and tool dish for example capable of using transmits this workpiece 212 to this second ring-like turning unit 204.
This second rotary unit 208 is arranged between the periphery of this first ring-like turning unit 202 and this second ring-like turning unit 204; And this second rotary unit 208 is oppositely arranged with this first rotary unit 206; This first rotary unit 206 corresponds to the 5th worktable 210e and the tenth worktable 211e respectively; After this second processing board 216b carries out these the first filming steps to this workpiece 212; This second rotary unit 208 utilizes this workpiece 212 of this second clamping module 208b gripping to this second rotary unit 208; With by rotating this second rotary unit 208, this workpiece 212 is carried out one first cooling steps and first application step both one of them.When this is managed after board 218b carries out these cure step to this workpiece 212 everywhere; This second rotary unit 208 utilizes this workpiece 212 of this second clamping module 208b gripping to this second rotary unit 208; With by rotating this second rotary unit 208, this workpiece 212 is carried out the 3rd cooling steps and the 3rd application step both one of them.In a preferred embodiment; This first rotary unit 206 and this second rotary unit 208 are arranged at this first ring-like turning unit 202 and one of this second ring-like turning unit 204 online different both sides, center respectively, are beneficial between this first ring-like turning unit 202 and this second ring-like turning unit 204, transmit this workpiece 212.
Specifically; Multilayer film of the present invention prepare system 200 and carry out interspersed respectively afterwards this first cooling step and the application step carried out of this first filming step; And after carrying out this second plated film step, intert respectively and carry out this second cooling step and application step; And after this cure step, carry out the 3rd cooling step and application step, to form multicoating in this workpiece.That is this first ring-like turning unit 202 and this second ring-like turning unit, 204 each intervals of rotating two worktable make workpiece 212 can utilize each to handle board (216,218) and handle this workpiece 212.And each processing board (216,218) has same standard setting structure and electrical specification; In order to conveniently will handle board is replaced with different machines equipment; For example sputter machine, ultraviolet equipment, defective scan equipment (scanner) and roasting plant, increase the processing procedure elasticity that multilayer film prepares.
In addition, according to the needs of processing procedure, this first ring-like turning unit 202 and this second ring-like turning unit 204 can clockwise rotate or rotate counterclockwise, and see through those processing boards (216,218) with this workpiece 212 of elasticity adjustment and handle.For example can use two axial platforms (for example X-Y table) at pan feeding board 212 and discharging board 220, with quick carrying workpiece 212.It should be noted; The worktable of the of the present invention first ring-like turning unit 202 and this second ring-like turning unit 204 (210a ~ 210e, 211a ~ 211e) except above-mentioned respectively be five; Also can be seven or nine worktable, or odd number value arbitrarily, to hold more workpiece 212.Multilayer film of the present invention prepare system's 200 series connection or the parallel connection plural first ring-like turning unit 202 and the second ring-like turning unit 204; Four ring-like turning units (202,204) for example; And can do two at same ring-like turning unit (202,204) and enclose or the rotation more than two circles, to form multicoating on this workpiece 212.
In one embodiment; This first rotary unit 206 comprises the first rotary module 206a and the first clamping module 206b; The first rotary module 206a of these first rotary unit, 206 this workpiece 212 of this first clamping module of control 206b gripping to these first rotary units 206; By rotating this first rotary module 206a, with this workpiece 212 is carried out rotary coating steps and cooling step both one of.This second rotary unit 208 comprises the second rotary module 208a and the second clamping module 208b; The second rotary module 208a of these second rotary unit, 208 this workpiece 212 of this second clamping module of control 208b gripping to these second rotary units 208; And by rotating this second rotary module 208a, with this workpiece 212 is carried out rotary coating steps and cooling step both one of.This clamping module 206b and this second clamping module 208b for example are twin shaft clip claw mechanism or three axle clamp pawl mechanisms.
According to above-mentioned; Multilayer film of the present invention prepare system 200 and utilize two groups of ring-like turning units (202,204) to form multicoating step and cooling step in the surface of workpiece 212; To improve the elasticity of this plated film step; Improve processing procedure efficient, mainly utilize two groups of ring-like turning units (202,204) circulation to turn round and utilize this first rotary unit 206 and 208 conducts of this second rotary unit to transmit workpiece 212, rotation and cool off plated film workpiece 212 afterwards fast.Therefore, multilayer film of the present invention prepare system 200 and utilize two groups of ring-like turning units (202,204) to form thicker multicoating in the surface of this workpiece 212, and solve the problem of these workpiece 212 generation distortion.
With reference to figure 3, it illustrates the planar configuration synoptic diagram for preparing system 200 according to multilayer film in the second embodiment of the invention.These multilayer film prepare system 200 and mainly comprise the ring-like turning unit of the first ring-like turning unit 202, second 204, first turntable module 205 and first rotary unit 206.This first ring-like turning unit 202 has some first type worktable 210 of ring-like arrangement in regular turn; Those first type worktable 210 are in order to locate a workpiece 212, and 210 pairs of these workpiece 212 of those first type worktable have the function that can carry out some first process requirement inequality.This second ring-like turning unit 204 is adjacent to this first ring-like turning unit 202; This second ring-like turning unit 204 has some second type worktable 211 of ring-like arrangement in regular turn, and 211 pairs of these workpiece 212 of those second type worktable have the function that can carry out some second process requirement inequality.This first turntable module 205 is adjacent to this first ring-like turning unit 202 and this second ring-like turning unit 204; This first turntable module 205 has some the 3rd type worktable 213 of ring-like arrangement in regular turn; 213 pairs of these workpiece 212 of those the 3rd type worktable have the function that can carry out some the 3rd process requirement inequality, like fabrication process board 229.
This first rotary unit 206 is arranged between the periphery of this first ring-like turning unit 202, this second ring-like turning unit 204 and this first turntable module 205; Utilize one first clamping module 206b to transmit this workpiece 212 each other mutually this first ring-like turning unit 202, this second ring-like turning unit 204 and this first turntable module 205 threes; And utilize this workpiece 212 that this first clamping module 206b is positioned at this first ring-like turning unit 202, this second ring-like turning unit 204 and this first turntable module 205 with clamping to this first rotary unit 206, so that this first rotary unit 206 is carried out a rotation processing procedure of these workpiece 212.
These multilayer film prepare system 200 and comprise that more some first types are handled board 216 (for example shown in label 216a, the 216b) and some second types are handled board 218 (for example shown in label 218a, 218b, 218c, the 218d); Those first types are handled those first type worktable 210 that board 216 corresponds to a part; Those second types are handled those second type worktable 211 that board 218 corresponds to a part; So that this workpiece 212 is handled board 216 and those second types processing board 218 those first process requirement of execution and those second process requirement in those first types, or carry out those first process requirement and those second process requirement at those first type worktable 210 and those second type worktable 211.
Those first type worktable 210 of this first ring-like turning unit 202 correspond to a pan feeding board 214, one first respectively and handle board 216a, one second processing board 216b and this first rotary unit 206; This first ring-like turning unit 202 by this this workpiece 212 of pan feeding board 214 clampings to this pan feeding board 214 to carry out the pan feeding step; Rotate this first ring-like turning unit 202 and first handle board 216a to this to move corresponding to this workpiece 212 of this first type worktable 210 of this pan feeding board 214; So that this workpiece 212 is carried out a first filming step; And rotate this first ring-like turning unit 202 in order to move this workpiece 212 to this second processing board 216b, so that this workpiece 212 is carried out one second plated film step.
Those second type worktable 211 of this second ring-like turning unit 204 correspond to this first rotary unit 206, one the 3rd respectively and handle board 218a, a discharging board 220 and this first rotary unit 206; This second ring-like turning unit 204 rotates in order to this workpiece 212 to the 3rd that moves this second type worktable 211 handles board 218a, to carry out a cure step of this workpiece 212.
After this first processing board 216a carries out these the first filming steps to this workpiece 212; This first rotary unit 206 utilizes this workpiece 212 of this first clamping module 206b gripping to this first turntable module 205; With by rotating this first turntable module 205, this workpiece 212 is carried out one first cooling steps and one first application step both one of them.
After this second processing board 216b carries out these second plated film steps to this workpiece 212; This first rotary unit 206 utilizes this workpiece 212 of this first clamping module 206b gripping to this first turntable module 205; With by rotating this first turntable module 205; This workpiece 212 being carried out one second cooling steps and one second application step both one of them, and this first rotary unit 206 transmits this second type worktable 211 of this workpiece 212 to these second ring-like turning units 204.
Continuation is with reference to figure 3; These multilayer film prepare system 200 and more comprise tricyclic turning unit 226, second turntable module 228 and second rotary unit 208; Some the 4th type worktable 215, the five processing board 218c and the 6th processing board 218d that this tricyclic turning unit 226 has ring-like arrangement in regular turn can carry out some the 4th process requirement inequality in 215 pairs of these workpiece 212 of those the 4th type worktable.
In one embodiment, this workpiece 212 uses pallet as transmitting carrier, to avoid direct grabbing workpiece 212, causes workpiece 212 surfaces stained.This first is handled board and the manages board everywhere and be selected from sputtering machine table, vapor deposition board, chemical vapour deposition board, electroplate the group that board and arc coating deposition board are formed to this.This first clamping module 206b and the second clamping module 208b are mechanical arm; For example be that the three-jaw circulation picks and places arm; Will transmit carrier is done circulation, refluxed between this ring-like turning unit (202,204,226) processing procedure, to reach the purpose that continuous operation is produced.
According to the above; Several rotary units (205,228) are set between this ring-like turning unit (202,204,226); So that this workpiece 212 is independently rotated processing procedure; Wherein this ring-like turning unit (202,204,226) can expand according to the length and the demand of processing procedure, and this rotary unit (205,228) also can expand between each ring-like turning unit (202,204,226) according to process requirement.
Therefore; Multilayer film of the present invention prepare system 200 and utilize the ring-like turning units of at least two groups (202,204) to form multicoating step and cooling step in the surface of workpiece 212; To improve the elasticity of this plated film step; Improve processing procedure efficient, mainly utilize ring-like turning unit (202,204,226) serial circulation to turn round and utilize this first rotary unit 206 and 208 conducts of this second rotary unit to transmit workpiece 212, rotation and cool off plated film workpiece 212 afterwards fast.Therefore, multilayer film of the present invention prepare system 200 and utilize ring-like turning unit (202,204,208) to form thicker multicoating in the surface of this workpiece 212, and solve the problem of these workpiece 212 distortion.
With reference to figure 1 and Fig. 4; Fig. 4 illustrates the schema of the method for preparing according to multilayer film in the embodiment of the invention; This multilayer film method of preparing is used for multilayer film and prepares system 200; These multilayer film prepare system 200 and comprise the ring-like turning unit of the first ring-like turning unit 202, second 204, first rotary unit 206 and second rotary unit 208; This first ring-like turning unit 202 has the first worktable 210a to the, the five worktable 210e of some ring-like arrangements in regular turn; This first worktable 210a corresponds to pan feeding board 214, first respectively to the 5th worktable 210e and handles board 216a, the second processing board 216b, first rotary unit 206 and second rotary unit 208; This second ring-like turning unit 204 has the 6th worktable 211a to the ten worktable 211e of some ring-like arrangements in regular turn; The 6th worktable 211a corresponds to first rotary unit 206, the 3rd respectively to the tenth worktable 211e and handles board 218a, the and manage board 218b, discharging board 220 and this second rotary unit 208 everywhere, and this multilayer film method of preparing comprises the following steps:
In step S300, carry out the pan feeding step, by the first worktable 210a of this pan feeding board 214 clampings one workpiece 212 to this first ring-like turning unit 202.
In step S302, rotate this first ring-like turning unit 202, second handle board 216b with the workpiece 212 that moves this first worktable 210a to this, so that this workpiece 212 is carried out the first filming steps.
In step S304, rotate this first ring-like turning unit 202, with move this second handle board 216b workpiece 212 to this second rotary unit 208, this workpiece 212 is carried out first cooling steps and first application step both one of them.In one embodiment, after this step S304, more comprise the following steps: to utilize the second rotary module 208a of second this workpiece 212 of clamping module 208b gripping to this second rotary unit 208 of this second rotary unit 208; And by rotating this second rotary module 208a, this workpiece 212 is carried out rotary coating (spin coating) steps and cooling step both one of them.
In step S306, rotate this first ring-like turning unit 202, first handle board 216a with the workpiece 212 that moves this first rotary unit 206 to this, so that this workpiece 212 is carried out the second plated film step.
In step S308; Rotate this first ring-like turning unit 202, with move this first handle board 216a workpiece 212 to this first rotary unit 206, and by rotating this first rotary unit 206; This workpiece 212 is carried out second cooling steps and second application step both one of them; Be back to step S302, repeated execution of steps S302 is to step S308, to form multicoating on this workpiece 212.In one embodiment, after step S308, more comprise the following steps: to utilize the first rotary module 206a of first this workpiece 212 of clamping module 206b gripping to this first rotary unit 206 of this first rotary unit 206; And by rotating this first rotary module 206a, this workpiece 212 is carried out rotary coating steps and cooling step both one of them.
In step S310,, transmit the 6th worktable 211a of the workpiece 212 of this first rotary unit 206 to this second ring-like turning unit 204 when forming multicoating after this workpiece.
In step S312, rotate this second ring-like turning unit 204, manage board 224 with the workpiece 212 that moves the 6th worktable 211a everywhere to the, to carry out a cure step of this workpiece.
In step S314, rotate this second ring-like turning unit 204, with move this manage board 218b everywhere workpiece 212 to this second rotary unit 208, this workpiece 212 is carried out the 3rd cooling steps and the 3rd application step both one of them.
In step S316, rotate this second ring-like turning unit 204, handle board 218a with the workpiece 212 to the 3rd that moves this second rotary unit 208, to carry out the detection step of this workpiece 212.
In step S318, rotate this second ring-like turning unit 204, with move the 3rd handle board 218a workpiece 212 to this discharging board 220, to carry out the discharging step of this workpiece 212.
In sum; The present invention provides a kind of multilayer film to prepare system and method thereof, comprises the first ring-like turning unit, the second ring-like turning unit, first rotary unit and second rotary unit, utilizes the first ring-like turning unit and the second ring-like turning unit circulation revolution one or a plurality of workpiece; This first rotary unit and this second rotary unit transmit workpiece and this workpiece of fast rotational; With the workpiece after the cooling plated film,, improve processing procedure efficient to improve the elasticity of this plated film step.And the surface in this workpiece forms thicker multicoating, and solves the problem of this workpiece deformation.
Claims (30)
1. multilayer film prepare system, it is characterized in that, this multilayer film system of preparing comprises:
One first ring-like turning unit has some first type worktable of ring-like arrangement in regular turn, and those first type worktable are in order to locating a workpiece, and those first type worktable have the function that can carry out some first process requirement inequality to this workpiece;
One second ring-like turning unit; Be adjacent to this first ring-like turning unit; This second ring-like turning unit has some second type worktable of ring-like arrangement in regular turn, and those second type worktable have the function that can carry out some second process requirement inequality to this workpiece;
One first rotary unit; Be arranged between the periphery of this first ring-like turning unit and this second ring-like turning unit; Utilize one first clamping module between this first ring-like turning unit and this second ring-like turning unit, to transmit this workpiece mutually; And utilize this first clamping module is positioned at this first ring-like turning unit and this second ring-like turning unit with clamping this workpiece to this first rotary unit, so that this first rotary unit is carried out a rotation processing procedure of this workpiece; And
One second rotary unit; Be arranged between the periphery of this first ring-like turning unit and this second ring-like turning unit; And this second rotary unit and this first rotary unit are oppositely arranged; Utilize one second clamping module between this first ring-like turning unit and this second ring-like turning unit, to transmit this workpiece mutually; And utilize this second clamping module is positioned at this first ring-like turning unit and this second ring-like turning unit with clamping this workpiece to this second rotary unit, so that this second rotary unit is carried out another rotation processing procedure of this workpiece, to form multicoating on this workpiece.
2. multilayer film according to claim 1 prepare system, it is characterized in that, this first ring-like turning unit and this second ring-like turning unit are that an intermittent type rotates.
3. multilayer film according to claim 2 prepare system; It is characterized in that; This intermittent type rotates to this first ring-like turning unit and this second ring-like turning unit are each revolution spacing of rotating two first type worktable and two second type worktable respectively, so that this workpiece is in the state that processing procedure hockets between the processing procedure of the processing procedure of this first ring-like turning unit and this second ring-like turning unit and this first rotary unit and this second rotary unit.
4. multilayer film according to claim 1 prepare system; It is characterized in that; These multilayer film system for preparing comprises that also some first types are handled board and some second types are handled board; Those first types are handled those first type worktable that board corresponds to a part; Those second types are handled those second type worktable that board corresponds to a part, so that this workpiece is handled board and those second types processing board those first process requirement of execution and those second process requirement in those first types, and carry out those first process requirement and those second process requirement at those first type worktable and those second type worktable.
5. multilayer film according to claim 4 prepare system; It is characterized in that those first types are handled those first type worktable and those second types that boards correspond to a part, and to handle between those second type worktable that board corresponds to a part be a standard setting interface.
6. multilayer film according to claim 1 prepare system; It is characterized in that; Those first type worktable of this first ring-like turning unit comprise one first worktable to the 5th worktable; This first worktable to the 5th worktable corresponds to a pan feeding board, one first respectively and handles board, one second processing board, this first rotary unit and this second rotary unit; This first ring-like turning unit, is rotated this first ring-like turning unit and second handles board with this workpiece of moving this first worktable to this, this workpiece is carried out a first filming step to carry out the pan feeding step by this this workpiece of pan feeding board clamping to this first worktable; And rotate this first ring-like turning unit in order to move this workpiece to this first processing board, this workpiece is carried out one second plated film step.
7. multilayer film according to claim 6 prepare system; It is characterized in that; Those second type worktable of this second ring-like turning unit comprise one the 6th worktable to the tenth worktable; The 6th worktable to the tenth worktable corresponds to this first rotary unit, the 3rd respectively and handles board, one the and manage board, a discharging board and this second rotary unit everywhere; This second ring-like turning unit rotates in order to this workpiece of moving the 6th worktable and the manages board everywhere to this, to carry out a cure step of this workpiece.
8. multilayer film according to claim 7 prepare system; It is characterized in that; After this second processing board is carried out this first filming step to this workpiece; This second rotary unit utilizes this this workpiece of second clamping module gripping to this second rotary unit, with by rotating this second rotary unit, this workpiece is carried out one first cooling step and one first application step both one of them.
9. multilayer film according to claim 8 prepare system; It is characterized in that; After this first processing board is carried out this second plated film step to this workpiece; This first rotary unit utilizes this this workpiece of first clamping module gripping to this first rotary unit; With by rotating this first rotary unit, this workpiece being carried out one second cooling step and one second application step both one of them, and this first rotary unit transmits the 6th worktable of this workpiece to this second ring-like turning unit.
10. multilayer film according to claim 9 prepare system; It is characterized in that; When this is managed after board carries out this cure step to this workpiece everywhere; This second rotary unit utilizes this this workpiece of second clamping module gripping to this second rotary unit, with by rotating this second rotary unit, this workpiece is carried out one the 3rd cooling step and one the 3rd application step both one of them.
11. multilayer film according to claim 10 prepare system; It is characterized in that; This second ring-like turning unit rotates in order to this workpiece of moving this second rotary unit and handles board to the 3rd; Detect step to carry out one of this workpiece, and this second ring-like turning unit rotate in order to move the 3rd handle board this workpiece to this discharging board, to carry out a discharging step of this workpiece.
12. multilayer film according to claim 7 prepare system; It is characterized in that this first is handled board and the manage board everywhere and be selected from sputtering machine table, vapor deposition board, chemical vapour deposition board, electroplate the group that board and arc coating deposition board are formed to this.
13. multilayer film according to claim 7 prepare system, it is characterized in that, this pan feeding board and this discharging board are two shaft platforms.
14. multilayer film according to claim 1 prepare system, it is characterized in that, this first rotary unit and this second rotary unit are arranged at the online different both sides, a center of this first ring-like turning unit and this second ring-like turning unit respectively.
15. multilayer film according to claim 1 prepare system, it is characterized in that, this first clamping module and the second clamping module are mechanical arm.
16. multilayer film prepare system, it is characterized in that, comprising:
One first ring-like turning unit has some first type worktable of ring-like arrangement in regular turn, and those first type worktable are in order to locating a workpiece, and those first type worktable have the function that can carry out some first process requirement inequality to this workpiece;
One second ring-like turning unit; Be adjacent to this first ring-like turning unit; This second ring-like turning unit has some second type worktable of ring-like arrangement in regular turn, and those second type worktable have the function that can carry out some second process requirement inequality to this workpiece;
One first turntable module; Be adjacent to this first ring-like turning unit and this second ring-like turning unit; This first turntable module has some the 3rd type worktable of ring-like arrangement in regular turn, and those the 3rd type worktable have the function that can carry out some the 3rd process requirement inequality to this workpiece; And
One first rotary unit; Be arranged between the periphery of this first ring-like turning unit, this second ring-like turning unit and this first turntable module; Utilize one first clamping module to transmit this workpiece each other mutually this first ring-like turning unit, this second ring-like turning unit and this first turntable module three; And utilize this workpiece that this first clamping module is positioned at this first ring-like turning unit, this second ring-like turning unit and this first turntable module with clamping to this first rotary unit, so that this first rotary unit is carried out a rotation processing procedure of this workpiece.
17. multilayer film according to claim 16 prepare system; It is characterized in that; Comprise that more some first types are handled board and some second types are handled board; Those first types are handled those first type worktable that board corresponds to a part; Those second types are handled those second type worktable that board corresponds to a part, so that this workpiece is handled board and those second types processing board those first process requirement of execution and those second process requirement in those first types, or carry out those first process requirement and those second process requirement at those first type worktable and those second type worktable.
18. multilayer film according to claim 16 prepare system; It is characterized in that; Those first type worktable of this first ring-like turning unit correspond to a pan feeding board, one first respectively and handle board, one second processing board and this first rotary unit; This first ring-like turning unit by this this workpiece of pan feeding board clamping to this pan feeding board to carry out the pan feeding step; Rotate this first ring-like turning unit and first handle board to this to move corresponding to this workpiece of this first type worktable of this pan feeding board; This workpiece being carried out a first filming step, and rotate this first ring-like turning unit and second handle board to this, this workpiece is carried out one second plated film step in order to move this workpiece.
19. multilayer film according to claim 18 prepare system; It is characterized in that; Those second type worktable of this second ring-like turning unit correspond to this first rotary unit, the 3rd respectively and handle board, one the and manage board, a discharging board and this first rotary unit everywhere; This second ring-like turning unit rotates in order to this workpiece of moving this second type worktable and the manages board everywhere to this, to carry out a cure step of this workpiece.
20. multilayer film according to claim 19 prepare system; It is characterized in that; After this first processing board is carried out this first filming step to this workpiece; This first rotary unit utilizes this this workpiece of first clamping module gripping to this first turntable module, with by rotating this first turntable module, this workpiece is carried out one first cooling step and one first application step both one of them.
21. multilayer film according to claim 20 prepare system; It is characterized in that; After this second processing board is carried out this second plated film step to this workpiece; This first rotary unit utilizes this this workpiece of first clamping module gripping to this first turntable module; With by rotating this first turntable module, this workpiece being carried out one second cooling step and one second application step both one of them, and this first rotary unit transmits this second type worktable of this workpiece to this second ring-like turning unit.
22. multilayer film according to claim 21 prepare system, it is characterized in that, more comprise:
One tricyclic turning unit has some the 4th type worktable of ring-like arrangement in regular turn, and those the 4th type worktable have the function that can carry out some the 4th process requirement inequality to this workpiece;
One second turntable module; Be adjacent to this second ring-like turning unit and this tricyclic turning unit; This second turntable module has some the 5th type worktable of ring-like arrangement in regular turn, and those the 5th type worktable have the function that can carry out some the 5th process requirement inequality to this workpiece; And
One second rotary unit; Be arranged between the periphery of this second ring-like turning unit, this tricyclic turning unit and this second turntable module; Utilize one second clamping module to transmit this workpiece each other mutually this second ring-like turning unit, this tricyclic turning unit and this second turntable module three; And utilize this workpiece that this second clamping module is positioned at this second ring-like turning unit, this tricyclic turning unit and this second turntable module with clamping to this second rotary unit, so that this second rotary unit is carried out a rotation processing procedure of this workpiece.
23. multilayer film according to claim 22 prepare system; It is characterized in that; This tricyclic turning unit rotates in order to move this workpiece of this second rotary unit; Detect step to carry out one of this workpiece, and this tricyclic turning unit rotates in order to move this workpiece to this discharging board, to carry out a discharging step of this workpiece.
24. multilayer film according to claim 22 prepare system, it is characterized in that, this workpiece uses pallet as transmitting carrier.
25. multilayer film according to claim 19 prepare system; It is characterized in that this first is handled board and the manage board everywhere and be selected from sputtering machine table, vapor deposition board, chemical vapour deposition board, electroplate the group that board and arc coating deposition board are formed to this.
26. multilayer film according to claim 16 prepare system, it is characterized in that, this first clamping module and the second clamping module are mechanical arm.
27. multilayer film prepare method; Be used for multilayer film and prepare system; It is characterized in that; This multilayer film system of preparing comprises one first ring-like turning unit, one second ring-like turning unit, one first rotary unit and one second rotary unit; This first ring-like turning unit has one first worktable to the 5th worktable of some ring-like arrangements in regular turn; This first worktable to the 5th worktable corresponds to a pan feeding board, one first respectively and handles board, one second processing board, one first rotary unit and one second rotary unit; This second ring-like turning unit has one the 6th worktable to the tenth worktable of some ring-like arrangements in regular turn, and the 6th worktable to the tenth worktable corresponds to this first rotary unit, the 3rd respectively and handles board, one the and manage board, a discharging board and this second rotary unit everywhere, and this multilayer film method of preparing comprises the following steps:
(a) carry out the pan feeding step, by one first worktable of this pan feeding board clamping one workpiece to this first ring-like turning unit;
(b) rotate this first ring-like turning unit, second handle board with this workpiece of moving this first worktable to this, this workpiece is carried out a first filming step;
(c) rotate this first ring-like turning unit, with move this second handle board this workpiece to this second rotary unit, this workpiece is carried out one first cooling step and one first application step both one of them;
(d) rotate this first ring-like turning unit, first handle board with this workpiece of moving this first rotary unit to this, this workpiece is carried out one second plated film step;
(e) rotate this first ring-like turning unit; With move this first handle board this workpiece to this first rotary unit; And by rotating this first rotary unit,, be back to step (b) this workpiece is carried out one second cooling step and one second application step both one of them; Repeated execution of steps (b) is to step (e), to form multicoating on this workpiece;
(f) when forming multicoating after this workpiece, transmit the 6th worktable of this workpiece of this first rotary unit to this second ring-like turning unit;
(g) rotate this second ring-like turning unit, manage board everywhere with this workpiece to one of moving the 6th worktable the, to carry out a cure step of this workpiece; And
(h) rotate this second ring-like turning unit, with move this manage board everywhere this workpiece to this second rotary unit, this workpiece is carried out one the 3rd cooling step and one the 3rd application step both one of them.
28. multilayer film according to claim 27 prepare method, it is characterized in that, in step (h) afterwards, more comprise the following steps:
(i) rotate this second ring-like turning unit, handle board to the 3rd, detect step to carry out one of this workpiece with this workpiece of moving this second rotary unit; And
(j) rotate this second ring-like turning unit, with move the 3rd handle board this workpiece to this discharging board, to carry out a discharging step of this workpiece.
29. multilayer film according to claim 27 prepare method, it is characterized in that, in step (c) afterwards, more comprise the following steps:
(c1) utilize one second rotary module of one second this workpiece of clamping module gripping to this second rotary unit of this second rotary unit; And
(c2) rotate this second rotary module, this workpiece is carried out a rotary coating step and a cooling step both one of them.
30. multilayer film according to claim 27 prepare method, it is characterized in that, in step (e) afterwards, more comprise the following steps:
(e1) utilize one first rotary module of one first this workpiece of clamping module gripping to this first rotary unit of this first rotary unit; And
(e2) rotate this first rotary module, this workpiece is carried out a rotary coating step and a cooling step both one of them.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105973305A CN102560372A (en) | 2010-12-21 | 2010-12-21 | Multilayer thin film preparation system and method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105973305A CN102560372A (en) | 2010-12-21 | 2010-12-21 | Multilayer thin film preparation system and method thereof |
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| JPS57207570A (en) * | 1981-06-12 | 1982-12-20 | Matsushita Electric Works Ltd | Article holding jig |
| JPS58144471A (en) * | 1982-02-19 | 1983-08-27 | Ulvac Corp | Apparatus for holding substrate in vacuum treating apparatus |
| US4606806A (en) * | 1984-05-17 | 1986-08-19 | Varian Associates, Inc. | Magnetron sputter device having planar and curved targets |
| CN101139699A (en) * | 2007-08-07 | 2008-03-12 | 北京实力源科技开发有限责任公司 | Batch production of vacuum coating system architecture and work-piece transmission system |
| CN201284371Y (en) * | 2008-09-24 | 2009-08-05 | 向熙科技股份有限公司 | Continuous appearance multi-layer filming equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57207570A (en) * | 1981-06-12 | 1982-12-20 | Matsushita Electric Works Ltd | Article holding jig |
| JPS58144471A (en) * | 1982-02-19 | 1983-08-27 | Ulvac Corp | Apparatus for holding substrate in vacuum treating apparatus |
| US4606806A (en) * | 1984-05-17 | 1986-08-19 | Varian Associates, Inc. | Magnetron sputter device having planar and curved targets |
| CN101139699A (en) * | 2007-08-07 | 2008-03-12 | 北京实力源科技开发有限责任公司 | Batch production of vacuum coating system architecture and work-piece transmission system |
| CN201284371Y (en) * | 2008-09-24 | 2009-08-05 | 向熙科技股份有限公司 | Continuous appearance multi-layer filming equipment |
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Application publication date: 20120711 |