JPS5772050A - Goniometer such as x-ray microanalyzer - Google Patents

Abstract

PURPOSE:To enable a high-precise movement and to improve reproducibility and precision of a measurement, by a method wherein a spectral crystal and an X-ray detector are moved together with a moving piece using a rotary shaft. CONSTITUTION:If a driving pulse is fed to step motors M1 and M2 in a synchronous manner from a supply source 21, the M1 turns a rotary shaft 2 by an angle corresponding to the pulse, and a spectral crystal 12 moves along a shaft 2 together with a moving piece 5, a circular arm 6 also changing its inclination. The M2 also pivots by the same angle thereupon, and X-ray detector 17 moves along a rotary shaft 14 by the same angle thereupon, and an X-ray detector 17 moves along a rotary shaft 14 by the same moving amount as that of the crystal 12. Following said movement, a truck 18 also moves along the arm 6, an angle of the surface of the crystal 12 to the detector 17 changes as well. This constantly maintains a distance between an X-ray generating point and the crystal 12 and a distance between the crystal 12 and the detector 17 at a constant value respectively, and permits changing of an angle of the crystal 12 to the sample 1 so that the sample 1, the crystal 12, and the detector 17 are always positioned on a Rowland circle.