JPS627494B2 - - Google Patents

Info

Publication number
JPS627494B2
JPS627494B2 JP53128419A JP12841978A JPS627494B2 JP S627494 B2 JPS627494 B2 JP S627494B2 JP 53128419 A JP53128419 A JP 53128419A JP 12841978 A JP12841978 A JP 12841978A JP S627494 B2 JPS627494 B2 JP S627494B2
Authority
JP
Japan
Prior art keywords
defect
face plate
pulse
signal
minute
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53128419A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5555206A (en
Inventor
Hiroshi Nakajima
Norio Endo
Kensaku Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP12841978A priority Critical patent/JPS5555206A/ja
Publication of JPS5555206A publication Critical patent/JPS5555206A/ja
Publication of JPS627494B2 publication Critical patent/JPS627494B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP12841978A 1978-10-20 1978-10-20 Inspection data processing system for defect on face plate Granted JPS5555206A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12841978A JPS5555206A (en) 1978-10-20 1978-10-20 Inspection data processing system for defect on face plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12841978A JPS5555206A (en) 1978-10-20 1978-10-20 Inspection data processing system for defect on face plate

Publications (2)

Publication Number Publication Date
JPS5555206A JPS5555206A (en) 1980-04-23
JPS627494B2 true JPS627494B2 (Direct) 1987-02-17

Family

ID=14984286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12841978A Granted JPS5555206A (en) 1978-10-20 1978-10-20 Inspection data processing system for defect on face plate

Country Status (1)

Country Link
JP (1) JPS5555206A (Direct)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56132549A (en) * 1980-03-24 1981-10-16 Hitachi Ltd Apparatus for inspecting face plate
JPS57161642A (en) * 1981-03-31 1982-10-05 Olympus Optical Co Ltd Inspecting device for defect of surface
JPS57161640A (en) * 1981-03-31 1982-10-05 Olympus Optical Co Ltd Inspecting device for surface
JPS57161641A (en) * 1981-03-31 1982-10-05 Olympus Optical Co Ltd Inspecting device for defect of surface
JPH0669060B2 (ja) * 1984-02-17 1994-08-31 株式会社日立製作所 検査装置
JPS61111151U (Direct) * 1984-12-25 1986-07-14
JPS6290526A (ja) * 1985-10-17 1987-04-25 Hitachi Electronics Eng Co Ltd 表面検査装置
JPS6369244A (ja) * 1986-09-10 1988-03-29 Hitachi Electronics Eng Co Ltd ウエハ異物検査装置
JPS63122937A (ja) * 1986-11-13 1988-05-26 Hitachi Electronics Eng Co Ltd レーザスポットによる面板走査方法および面板走査制御装置
JPS63122936A (ja) * 1986-11-13 1988-05-26 Hitachi Electronics Eng Co Ltd 面板欠陥検出信号のサンプリング方法およびサンプリング装置
CN112864038A (zh) * 2021-01-26 2021-05-28 上海华力微电子有限公司 晶圆密集缺陷源头检测方法及其检测系统

Also Published As

Publication number Publication date
JPS5555206A (en) 1980-04-23

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