JPS6256662B2 - - Google Patents

Info

Publication number
JPS6256662B2
JPS6256662B2 JP9970776A JP9970776A JPS6256662B2 JP S6256662 B2 JPS6256662 B2 JP S6256662B2 JP 9970776 A JP9970776 A JP 9970776A JP 9970776 A JP9970776 A JP 9970776A JP S6256662 B2 JPS6256662 B2 JP S6256662B2
Authority
JP
Japan
Prior art keywords
wiring
spacing
holes
adjacent
lattice
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9970776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5325382A (en
Inventor
Hiroshi Kano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9970776A priority Critical patent/JPS5325382A/ja
Publication of JPS5325382A publication Critical patent/JPS5325382A/ja
Publication of JPS6256662B2 publication Critical patent/JPS6256662B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Design And Manufacture Of Integrated Circuits (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP9970776A 1976-08-23 1976-08-23 Wiring method of lsi Granted JPS5325382A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9970776A JPS5325382A (en) 1976-08-23 1976-08-23 Wiring method of lsi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9970776A JPS5325382A (en) 1976-08-23 1976-08-23 Wiring method of lsi

Publications (2)

Publication Number Publication Date
JPS5325382A JPS5325382A (en) 1978-03-09
JPS6256662B2 true JPS6256662B2 (US07993877-20110809-P00003.png) 1987-11-26

Family

ID=14254526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9970776A Granted JPS5325382A (en) 1976-08-23 1976-08-23 Wiring method of lsi

Country Status (1)

Country Link
JP (1) JPS5325382A (US07993877-20110809-P00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0482265U (US07993877-20110809-P00003.png) * 1990-11-28 1992-07-17

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6028242A (ja) * 1983-07-27 1985-02-13 Hitachi Ltd 多層配線構造
JPH0622256B2 (ja) * 1988-06-24 1994-03-23 株式会社日立製作所 半導体集積回路装置の製造方法
JPS6427241A (en) * 1988-06-24 1989-01-30 Hitachi Ltd Semiconductor integrated circuit device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0482265U (US07993877-20110809-P00003.png) * 1990-11-28 1992-07-17

Also Published As

Publication number Publication date
JPS5325382A (en) 1978-03-09

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