JPS625344B2 - - Google Patents

Info

Publication number
JPS625344B2
JPS625344B2 JP55171606A JP17160680A JPS625344B2 JP S625344 B2 JPS625344 B2 JP S625344B2 JP 55171606 A JP55171606 A JP 55171606A JP 17160680 A JP17160680 A JP 17160680A JP S625344 B2 JPS625344 B2 JP S625344B2
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
film
silicon film
capacitor
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55171606A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5795658A (en
Inventor
Keimei Mikoshiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP55171606A priority Critical patent/JPS5795658A/ja
Publication of JPS5795658A publication Critical patent/JPS5795658A/ja
Publication of JPS625344B2 publication Critical patent/JPS625344B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00—Three-dimensional [3D] integrated devices

Landscapes

  • Semiconductor Memories (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP55171606A 1980-12-05 1980-12-05 Manufacture of semiconductor device Granted JPS5795658A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55171606A JPS5795658A (en) 1980-12-05 1980-12-05 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55171606A JPS5795658A (en) 1980-12-05 1980-12-05 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5795658A JPS5795658A (en) 1982-06-14
JPS625344B2 true JPS625344B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-02-04

Family

ID=15926275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55171606A Granted JPS5795658A (en) 1980-12-05 1980-12-05 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5795658A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5846666A (ja) * 1981-09-14 1983-03-18 Seiko Epson Corp 半導体装置の製造方法
JPS61226951A (ja) * 1985-04-01 1986-10-08 Hitachi Ltd キヤパシタ
JP2621137B2 (ja) * 1986-05-13 1997-06-18 富士通株式会社 半導体装置の製造方法
CN1112731C (zh) * 1997-04-30 2003-06-25 三星电子株式会社 制造用于模拟功能的电容器的方法

Also Published As

Publication number Publication date
JPS5795658A (en) 1982-06-14

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