JPS6249753B2 - - Google Patents

Info

Publication number
JPS6249753B2
JPS6249753B2 JP56158548A JP15854881A JPS6249753B2 JP S6249753 B2 JPS6249753 B2 JP S6249753B2 JP 56158548 A JP56158548 A JP 56158548A JP 15854881 A JP15854881 A JP 15854881A JP S6249753 B2 JPS6249753 B2 JP S6249753B2
Authority
JP
Japan
Prior art keywords
electrode
film
sheet resistance
heat treatment
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56158548A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5858777A (ja
Inventor
Shinichiro Ishihara
Takashi Hirao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56158548A priority Critical patent/JPS5858777A/ja
Publication of JPS5858777A publication Critical patent/JPS5858777A/ja
Publication of JPS6249753B2 publication Critical patent/JPS6249753B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H10F77/206—Electrodes for devices having potential barriers

Landscapes

  • Photovoltaic Devices (AREA)
JP56158548A 1981-10-05 1981-10-05 半導体素子の製造方法 Granted JPS5858777A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56158548A JPS5858777A (ja) 1981-10-05 1981-10-05 半導体素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56158548A JPS5858777A (ja) 1981-10-05 1981-10-05 半導体素子の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP62003546A Division JPS62169372A (ja) 1987-01-09 1987-01-09 半導体素子の製造方法

Publications (2)

Publication Number Publication Date
JPS5858777A JPS5858777A (ja) 1983-04-07
JPS6249753B2 true JPS6249753B2 (enrdf_load_stackoverflow) 1987-10-21

Family

ID=15674109

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56158548A Granted JPS5858777A (ja) 1981-10-05 1981-10-05 半導体素子の製造方法

Country Status (1)

Country Link
JP (1) JPS5858777A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59224182A (ja) * 1983-06-03 1984-12-17 Hitachi Ltd 薄膜半導体装置
JPS60211880A (ja) * 1984-04-05 1985-10-24 Semiconductor Energy Lab Co Ltd 光電変換装置の作製方法
JPS60211817A (ja) * 1984-04-05 1985-10-24 Semiconductor Energy Lab Co Ltd 光電変換装置
JPH0693518B2 (ja) * 1984-04-05 1994-11-16 株式会社半導体エネルギー研究所 半導体装置作製方法
JPS6126268A (ja) * 1984-07-16 1986-02-05 Kanegafuchi Chem Ind Co Ltd 耐熱性アモルフアスシリコン系太陽電池およびその製法
JPH065770B2 (ja) * 1984-12-18 1994-01-19 鐘淵化学工業株式会社 耐熱性薄膜光電変換素子の製法
JPS6191973A (ja) * 1984-10-11 1986-05-10 Kanegafuchi Chem Ind Co Ltd 耐熱性薄膜光電変換素子およびその製法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55123178A (en) * 1979-03-16 1980-09-22 Sanyo Electric Co Ltd Solar cell
JPS5669874A (en) * 1979-11-13 1981-06-11 Fuji Electric Co Ltd Amorphous semiconductor solar cell
JPS6246076A (ja) * 1985-08-21 1987-02-27 日本鋼管株式会社 埋設撤去管の摩擦抵抗軽減方法

Also Published As

Publication number Publication date
JPS5858777A (ja) 1983-04-07

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