JPS6248393B2 - - Google Patents
Info
- Publication number
- JPS6248393B2 JPS6248393B2 JP56064050A JP6405081A JPS6248393B2 JP S6248393 B2 JPS6248393 B2 JP S6248393B2 JP 56064050 A JP56064050 A JP 56064050A JP 6405081 A JP6405081 A JP 6405081A JP S6248393 B2 JPS6248393 B2 JP S6248393B2
- Authority
- JP
- Japan
- Prior art keywords
- gate electrode
- silicon compound
- semiconductor substrate
- compound
- compound semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28575—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising AIIIBV compounds
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56064050A JPS57180184A (en) | 1981-04-30 | 1981-04-30 | Manufacturing method for fet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56064050A JPS57180184A (en) | 1981-04-30 | 1981-04-30 | Manufacturing method for fet |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57180184A JPS57180184A (en) | 1982-11-06 |
| JPS6248393B2 true JPS6248393B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-10-13 |
Family
ID=13246873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56064050A Granted JPS57180184A (en) | 1981-04-30 | 1981-04-30 | Manufacturing method for fet |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57180184A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60219765A (ja) * | 1984-04-16 | 1985-11-02 | Mitsubishi Electric Corp | シヨツトキ−障壁電極 |
| JPS61220376A (ja) * | 1985-03-26 | 1986-09-30 | Sumitomo Electric Ind Ltd | ショットキゲート電界効果トランジスタの製造方法 |
| DE3751278T2 (de) * | 1986-12-11 | 1996-01-25 | Gte Laboratories Inc | Transistor mit Zusammensetzung aus Halbleitermaterial und aus leitendem Material. |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5194775A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1975-02-19 | 1976-08-19 | ||
| JPS5197383A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1975-02-21 | 1976-08-26 |
-
1981
- 1981-04-30 JP JP56064050A patent/JPS57180184A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57180184A (en) | 1982-11-06 |
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