JPH0353774B2 - - Google Patents

Info

Publication number
JPH0353774B2
JPH0353774B2 JP56190354A JP19035481A JPH0353774B2 JP H0353774 B2 JPH0353774 B2 JP H0353774B2 JP 56190354 A JP56190354 A JP 56190354A JP 19035481 A JP19035481 A JP 19035481A JP H0353774 B2 JPH0353774 B2 JP H0353774B2
Authority
JP
Japan
Prior art keywords
gate
forming
pattern
gate pattern
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56190354A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5892265A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP56190354A priority Critical patent/JPS5892265A/ja
Publication of JPS5892265A publication Critical patent/JPS5892265A/ja
Publication of JPH0353774B2 publication Critical patent/JPH0353774B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Junction Field-Effect Transistors (AREA)
JP56190354A 1981-11-27 1981-11-27 半導体装置の製造方法 Granted JPS5892265A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56190354A JPS5892265A (ja) 1981-11-27 1981-11-27 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56190354A JPS5892265A (ja) 1981-11-27 1981-11-27 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5892265A JPS5892265A (ja) 1983-06-01
JPH0353774B2 true JPH0353774B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-16

Family

ID=16256790

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56190354A Granted JPS5892265A (ja) 1981-11-27 1981-11-27 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5892265A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0713976B2 (ja) * 1984-04-05 1995-02-15 日本電信電話株式会社 電界効果トランジスタの製法
US4792531A (en) * 1987-10-05 1988-12-20 Menlo Industries, Inc. Self-aligned gate process
JPH088266B2 (ja) * 1989-01-20 1996-01-29 住友電気工業株式会社 電界効果トランジスタの製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5860574A (ja) * 1981-10-06 1983-04-11 Nippon Telegr & Teleph Corp <Ntt> 電界効果トランジスタの製造方法

Also Published As

Publication number Publication date
JPS5892265A (ja) 1983-06-01

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