JPS6246064B2 - - Google Patents

Info

Publication number
JPS6246064B2
JPS6246064B2 JP56191152A JP19115281A JPS6246064B2 JP S6246064 B2 JPS6246064 B2 JP S6246064B2 JP 56191152 A JP56191152 A JP 56191152A JP 19115281 A JP19115281 A JP 19115281A JP S6246064 B2 JPS6246064 B2 JP S6246064B2
Authority
JP
Japan
Prior art keywords
integrated circuit
insulating film
metal wiring
semiconductor substrate
circuit element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56191152A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5892235A (ja
Inventor
Shigeo Uotani
Masao Nagatomo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP19115281A priority Critical patent/JPS5892235A/ja
Publication of JPS5892235A publication Critical patent/JPS5892235A/ja
Publication of JPS6246064B2 publication Critical patent/JPS6246064B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP19115281A 1981-11-27 1981-11-27 集積回路素子の製造方法 Granted JPS5892235A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19115281A JPS5892235A (ja) 1981-11-27 1981-11-27 集積回路素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19115281A JPS5892235A (ja) 1981-11-27 1981-11-27 集積回路素子の製造方法

Publications (2)

Publication Number Publication Date
JPS5892235A JPS5892235A (ja) 1983-06-01
JPS6246064B2 true JPS6246064B2 (enrdf_load_stackoverflow) 1987-09-30

Family

ID=16269759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19115281A Granted JPS5892235A (ja) 1981-11-27 1981-11-27 集積回路素子の製造方法

Country Status (1)

Country Link
JP (1) JPS5892235A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5526619A (en) * 1978-08-15 1980-02-26 Toshiba Corp Method of producing semiconductor device

Also Published As

Publication number Publication date
JPS5892235A (ja) 1983-06-01

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