JPS5892235A - 集積回路素子の製造方法 - Google Patents

集積回路素子の製造方法

Info

Publication number
JPS5892235A
JPS5892235A JP19115281A JP19115281A JPS5892235A JP S5892235 A JPS5892235 A JP S5892235A JP 19115281 A JP19115281 A JP 19115281A JP 19115281 A JP19115281 A JP 19115281A JP S5892235 A JPS5892235 A JP S5892235A
Authority
JP
Japan
Prior art keywords
heat
metal wiring
insulating film
semiconductor substrate
dielectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19115281A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6246064B2 (enrdf_load_stackoverflow
Inventor
Shigeo Uotani
魚谷　重雄
Masao Nagatomo
長友　正男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP19115281A priority Critical patent/JPS5892235A/ja
Publication of JPS5892235A publication Critical patent/JPS5892235A/ja
Publication of JPS6246064B2 publication Critical patent/JPS6246064B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP19115281A 1981-11-27 1981-11-27 集積回路素子の製造方法 Granted JPS5892235A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19115281A JPS5892235A (ja) 1981-11-27 1981-11-27 集積回路素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19115281A JPS5892235A (ja) 1981-11-27 1981-11-27 集積回路素子の製造方法

Publications (2)

Publication Number Publication Date
JPS5892235A true JPS5892235A (ja) 1983-06-01
JPS6246064B2 JPS6246064B2 (enrdf_load_stackoverflow) 1987-09-30

Family

ID=16269759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19115281A Granted JPS5892235A (ja) 1981-11-27 1981-11-27 集積回路素子の製造方法

Country Status (1)

Country Link
JP (1) JPS5892235A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5526619A (en) * 1978-08-15 1980-02-26 Toshiba Corp Method of producing semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5526619A (en) * 1978-08-15 1980-02-26 Toshiba Corp Method of producing semiconductor device

Also Published As

Publication number Publication date
JPS6246064B2 (enrdf_load_stackoverflow) 1987-09-30

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