JPS62153376A - ウェハダイシング用粘着シート - Google Patents

ウェハダイシング用粘着シート

Info

Publication number
JPS62153376A
JPS62153376A JP60295189A JP29518985A JPS62153376A JP S62153376 A JPS62153376 A JP S62153376A JP 60295189 A JP60295189 A JP 60295189A JP 29518985 A JP29518985 A JP 29518985A JP S62153376 A JPS62153376 A JP S62153376A
Authority
JP
Japan
Prior art keywords
adhesive
wafer
adhesive sheet
irradiation
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60295189A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0156112B2 (https=
Inventor
Kazuyoshi Ebe
和義 江部
Hiroaki Narita
博昭 成田
Katsuhisa Taguchi
田口　克久
Yoshitaka Akeda
明田　好孝
Takanori Saito
斉藤　隆則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
F S K KK
FSK Corp
Original Assignee
F S K KK
FSK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by F S K KK, FSK Corp filed Critical F S K KK
Priority to JP60295189A priority Critical patent/JPS62153376A/ja
Priority to DE19863639266 priority patent/DE3639266A1/de
Priority to US06/932,210 priority patent/US4756968A/en
Priority to PH34523A priority patent/PH23580A/en
Priority to MYPI86000164A priority patent/MY100214A/en
Priority to KR1019860010787A priority patent/KR910007086B1/ko
Priority to FR8618037A priority patent/FR2592390B1/fr
Priority to NL8603269A priority patent/NL191241C/xx
Priority to GB8630956A priority patent/GB2184741B/en
Publication of JPS62153376A publication Critical patent/JPS62153376A/ja
Priority to US07/111,849 priority patent/US4965127A/en
Priority to MYPI89000327A priority patent/MY104709A/en
Priority to GB8916856A priority patent/GB2221469B/en
Priority to GB8916857A priority patent/GB2221470B/en
Priority to GB8916855A priority patent/GB2221468B/en
Publication of JPH0156112B2 publication Critical patent/JPH0156112B2/ja
Priority to US07/549,496 priority patent/US5187007A/en
Priority to SG1143/92A priority patent/SG114392G/en
Priority to SG1144/92A priority patent/SG114492G/en
Priority to SG1145/92A priority patent/SG114592G/en
Priority to SG1146/92A priority patent/SG114692G/en
Priority to HK1054/92A priority patent/HK105492A/xx
Priority to HK1056/92A priority patent/HK105692A/xx
Priority to HK1055/92A priority patent/HK105592A/xx
Priority to HK1057/92A priority patent/HK105792A/xx
Priority to NL9302150A priority patent/NL193617C/nl
Priority to NL9302147A priority patent/NL9302147A/nl
Priority to NL9302149A priority patent/NL9302149A/nl
Priority to NL9302148A priority patent/NL9302148A/nl
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
    • H10P72/7402—Wafer tapes, e.g. grinding or dicing support tapes
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
    • C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
    • H10P72/7416—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support used during dicing or grinding

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Adhesive Tapes (AREA)
  • Dicing (AREA)
JP60295189A 1985-12-27 1985-12-27 ウェハダイシング用粘着シート Granted JPS62153376A (ja)

Priority Applications (27)

Application Number Priority Date Filing Date Title
JP60295189A JPS62153376A (ja) 1985-12-27 1985-12-27 ウェハダイシング用粘着シート
DE19863639266 DE3639266A1 (de) 1985-12-27 1986-11-17 Haftfolie
US06/932,210 US4756968A (en) 1985-12-27 1986-11-18 Adhesive sheets
PH34523A PH23580A (en) 1985-12-27 1986-11-24 Adhesive sheet
MYPI86000164A MY100214A (en) 1985-12-27 1986-12-02 Adhesive sheet
KR1019860010787A KR910007086B1 (ko) 1985-12-27 1986-12-15 점착시이트
FR8618037A FR2592390B1 (fr) 1985-12-27 1986-12-23 Feuille adhesive utilisable notamment pour le decoupage de pastilles semiconductrices sous la forme de microplaquettes
NL8603269A NL191241C (nl) 1985-12-27 1986-12-23 Kleefvel voor halfgeleiders.
GB8630956A GB2184741B (en) 1985-12-27 1986-12-29 Adhesive sheet suitable for use in the preparation of semiconductor chips
US07/111,849 US4965127A (en) 1985-12-27 1987-10-22 Adhesive sheets
MYPI89000327A MY104709A (en) 1985-12-27 1989-05-15 Adhesive sheet.
GB8916855A GB2221468B (en) 1985-12-27 1989-07-24 Adhesive sheet suitable for use in dicing semiconductor wafers into chips
GB8916857A GB2221470B (en) 1985-12-27 1989-07-24 Adhesive sheet suitable for semiconductor wafer processing
GB8916856A GB2221469B (en) 1985-12-27 1989-07-24 Adhesive sheet suitable for use in dicing semiconductor wafers into chips
US07/549,496 US5187007A (en) 1985-12-27 1990-06-29 Adhesive sheets
SG1143/92A SG114392G (en) 1985-12-27 1992-11-02 Adhesive sheet suitable for use in dicing semiconductor wafers into chips
SG1144/92A SG114492G (en) 1985-12-27 1992-11-02 Adhesive sheet suitable for use in the preparation of semiconductor chips
SG1145/92A SG114592G (en) 1985-12-27 1992-11-02 Adhesive sheet suitable for semiconductor wafer processing
SG1146/92A SG114692G (en) 1985-12-27 1992-11-02 Adhesive sheet suitable for use in dicing semiconductor wafers into chips
HK1057/92A HK105792A (en) 1985-12-27 1992-12-31 Adhesive sheet suitable for use in the preparation of semiconductor chips
HK1055/92A HK105592A (en) 1985-12-27 1992-12-31 Adhesive sheet suitable for use in dicing semiconductor wafers into chips
HK1054/92A HK105492A (en) 1985-12-27 1992-12-31 Adhesive sheet suitable for semiconductor wafer processing
HK1056/92A HK105692A (en) 1985-12-27 1992-12-31 Adhesive sheet suitable for use in dicing semiconductor wafers into chips
NL9302150A NL193617C (nl) 1985-12-27 1993-12-09 Kleefvel voor halfgeleiders.
NL9302147A NL9302147A (nl) 1985-12-27 1993-12-09 Kleefvel voor halfgeleiders.
NL9302149A NL9302149A (nl) 1985-12-27 1993-12-09 Kleefvel voor halfgeleiders.
NL9302148A NL9302148A (nl) 1985-12-27 1993-12-09 Kleefvel voor halfgeleiders.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60295189A JPS62153376A (ja) 1985-12-27 1985-12-27 ウェハダイシング用粘着シート

Publications (2)

Publication Number Publication Date
JPS62153376A true JPS62153376A (ja) 1987-07-08
JPH0156112B2 JPH0156112B2 (https=) 1989-11-28

Family

ID=17817353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60295189A Granted JPS62153376A (ja) 1985-12-27 1985-12-27 ウェハダイシング用粘着シート

Country Status (1)

Country Link
JP (1) JPS62153376A (https=)

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6462376A (en) * 1987-09-02 1989-03-08 Iic Kagaku Kogyo Kk Ultraviolet-curing pressure-sensitive adhesive film or sheet
JPS6461208A (en) * 1987-09-01 1989-03-08 Fsk Kk Cutting method of wafer
JPH01110585A (ja) * 1987-10-22 1989-04-27 Nichiban Co Ltd シーラーテープまたはシートまたは成形物
JPH0786212A (ja) * 1993-07-27 1995-03-31 Lintec Corp ウェハ貼着用粘着シート
JPH09253964A (ja) * 1996-03-15 1997-09-30 Lintec Corp 粘着テープ用基材、該基材を用いた粘着テープ、および該基材の製造方法
JPH1161065A (ja) * 1997-08-25 1999-03-05 Sumitomo Bakelite Co Ltd 半導体ウエハ加工用粘着シート
EP0870812A3 (en) * 1997-04-11 1999-04-28 LINTEC Corporation Base material and adhesive tape using the same
JP2000044893A (ja) * 1998-07-31 2000-02-15 Nippon Synthetic Chem Ind Co Ltd:The 再剥離型粘着剤組成物
JP2000044890A (ja) * 1998-07-31 2000-02-15 Nippon Synthetic Chem Ind Co Ltd:The 再剥離型粘着剤組成物
WO2006094177A1 (en) 2005-03-02 2006-09-08 3M Innovative Properties Company (meth)acrylic film, and marking film and receptor sheet using the same
WO2008044561A1 (en) * 2006-10-03 2008-04-17 Emulsion Technology Co., Ltd. Adhesive composition and adhesive sheet
WO2008081725A1 (ja) 2007-01-05 2008-07-10 Nitto Denko Corporation 半導体基板加工用粘着シート
US7691948B2 (en) 2003-09-09 2010-04-06 3M Innovative Properties Company (Meth)acrylic film, and making film and receptor sheet using the same
US7727811B2 (en) 2006-05-12 2010-06-01 Nitto Denko Corporation Pressure-sensitive adhesive sheet for processing semiconductor wafer or semiconductor substrate
US7943235B2 (en) 2007-01-05 2011-05-17 Nitto Denko Corporation Adhesive sheet for processing semiconductor substrates
JP2012177084A (ja) * 2011-01-31 2012-09-13 Dainippon Printing Co Ltd 耐熱仮着用の粘着剤組成物及び粘着テープ
JP2017082196A (ja) * 2015-10-29 2017-05-18 日本合成化学工業株式会社 粘着剤組成物、それを用いて得られる剥離性粘着剤、剥離性粘着シート、およびその剥離性粘着シートの使用方法
KR20200060340A (ko) 2017-09-28 2020-05-29 미쯔비시 케미컬 주식회사 활성 에너지선 경화성 박리형 점착제 조성물
KR20210094468A (ko) 2020-01-21 2021-07-29 닛토덴코 가부시키가이샤 점착제 조성물 및 해당 점착제 조성물을 이용한 점착 시트
KR20210113048A (ko) 2020-03-06 2021-09-15 닛토덴코 가부시키가이샤 점착 테이프
KR20220169929A (ko) 2021-06-21 2022-12-28 닛토덴코 가부시키가이샤 반도체 웨이퍼 가공용 점착 시트

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6312800B1 (en) * 1997-02-10 2001-11-06 Lintec Corporation Pressure sensitive adhesive sheet for producing a chip

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630410A (en) * 1979-08-20 1981-03-27 Minnesota Mining & Mfg Photopolymerizable mixture
JPS60173076A (ja) * 1983-12-27 1985-09-06 チパ−ガイギ−　アクチエンゲゼルシヤフト 熱硬化性接着フイルムの製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630410A (en) * 1979-08-20 1981-03-27 Minnesota Mining & Mfg Photopolymerizable mixture
JPS60173076A (ja) * 1983-12-27 1985-09-06 チパ−ガイギ−　アクチエンゲゼルシヤフト 熱硬化性接着フイルムの製造方法

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6461208A (en) * 1987-09-01 1989-03-08 Fsk Kk Cutting method of wafer
JPS6462376A (en) * 1987-09-02 1989-03-08 Iic Kagaku Kogyo Kk Ultraviolet-curing pressure-sensitive adhesive film or sheet
JPH01110585A (ja) * 1987-10-22 1989-04-27 Nichiban Co Ltd シーラーテープまたはシートまたは成形物
JPH0786212A (ja) * 1993-07-27 1995-03-31 Lintec Corp ウェハ貼着用粘着シート
US6139953A (en) * 1996-03-15 2000-10-31 Lintec Corporation Adhesive tape, base material for adhesive tape and their manufacturing methods
JPH09253964A (ja) * 1996-03-15 1997-09-30 Lintec Corp 粘着テープ用基材、該基材を用いた粘着テープ、および該基材の製造方法
EP0870812A3 (en) * 1997-04-11 1999-04-28 LINTEC Corporation Base material and adhesive tape using the same
US6156423A (en) * 1997-04-11 2000-12-05 Lintec Corporation Base material and adhesive tape using the same
JPH1161065A (ja) * 1997-08-25 1999-03-05 Sumitomo Bakelite Co Ltd 半導体ウエハ加工用粘着シート
JP2000044893A (ja) * 1998-07-31 2000-02-15 Nippon Synthetic Chem Ind Co Ltd:The 再剥離型粘着剤組成物
JP2000044890A (ja) * 1998-07-31 2000-02-15 Nippon Synthetic Chem Ind Co Ltd:The 再剥離型粘着剤組成物
US7691948B2 (en) 2003-09-09 2010-04-06 3M Innovative Properties Company (Meth)acrylic film, and making film and receptor sheet using the same
WO2006094177A1 (en) 2005-03-02 2006-09-08 3M Innovative Properties Company (meth)acrylic film, and marking film and receptor sheet using the same
US7727811B2 (en) 2006-05-12 2010-06-01 Nitto Denko Corporation Pressure-sensitive adhesive sheet for processing semiconductor wafer or semiconductor substrate
WO2008044561A1 (en) * 2006-10-03 2008-04-17 Emulsion Technology Co., Ltd. Adhesive composition and adhesive sheet
JP5244603B2 (ja) * 2006-10-03 2013-07-24 株式会社イーテック 粘着剤組成物及び粘着シート
WO2008081725A1 (ja) 2007-01-05 2008-07-10 Nitto Denko Corporation 半導体基板加工用粘着シート
US7943235B2 (en) 2007-01-05 2011-05-17 Nitto Denko Corporation Adhesive sheet for processing semiconductor substrates
JP2012177084A (ja) * 2011-01-31 2012-09-13 Dainippon Printing Co Ltd 耐熱仮着用の粘着剤組成物及び粘着テープ
JP2017082196A (ja) * 2015-10-29 2017-05-18 日本合成化学工業株式会社 粘着剤組成物、それを用いて得られる剥離性粘着剤、剥離性粘着シート、およびその剥離性粘着シートの使用方法
KR20200060340A (ko) 2017-09-28 2020-05-29 미쯔비시 케미컬 주식회사 활성 에너지선 경화성 박리형 점착제 조성물
KR20210094468A (ko) 2020-01-21 2021-07-29 닛토덴코 가부시키가이샤 점착제 조성물 및 해당 점착제 조성물을 이용한 점착 시트
KR20210113048A (ko) 2020-03-06 2021-09-15 닛토덴코 가부시키가이샤 점착 테이프
KR20220169929A (ko) 2021-06-21 2022-12-28 닛토덴코 가부시키가이샤 반도체 웨이퍼 가공용 점착 시트
US11898071B2 (en) 2021-06-21 2024-02-13 Nitto Denko Corporation Pressure-sensitive adhesive sheet for semiconductor wafer processing

Also Published As

Publication number Publication date
JPH0156112B2 (https=) 1989-11-28

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