SG114592G - Adhesive sheet suitable for semiconductor wafer processing - Google Patents
Adhesive sheet suitable for semiconductor wafer processingInfo
- Publication number
- SG114592G SG114592G SG1145/92A SG114592A SG114592G SG 114592 G SG114592 G SG 114592G SG 1145/92 A SG1145/92 A SG 1145/92A SG 114592 A SG114592 A SG 114592A SG 114592 G SG114592 G SG 114592G
- Authority
- SG
- Singapore
- Prior art keywords
- semiconductor wafer
- adhesive sheet
- wafer processing
- sheet suitable
- processing
- Prior art date
Links
- 239000000853 adhesive Substances 0.000 title 1
- 230000001070 adhesive effect Effects 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J175/00—Adhesives based on polyureas or polyurethanes; Adhesives based on derivatives of such polymers
- C09J175/04—Polyurethanes
- C09J175/14—Polyurethanes having carbon-to-carbon unsaturated bonds
- C09J175/16—Polyurethanes having carbon-to-carbon unsaturated bonds having terminal carbon-to-carbon unsaturated bonds
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J4/00—Adhesives based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; adhesives, based on monomers of macromolecular compounds of groups C09J183/00 - C09J183/16
- C09J4/06—Organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond in combination with a macromolecular compound other than an unsaturated polymer of groups C09J159/00 - C09J187/00
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/22—Plastics; Metallised plastics
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
- C09J7/38—Pressure-sensitive adhesives [PSA]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68318—Auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support
- H01L2221/68322—Auxiliary support including means facilitating the selective separation of some of a plurality of devices from the auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Dicing (AREA)
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60295188A JPS62153375A (en) | 1985-12-27 | 1985-12-27 | Pressure-sensitive adhesive sheet |
JP60295190A JPS62153377A (en) | 1985-12-27 | 1985-12-27 | Pressure-sensitive adhesive sheet |
JP60295189A JPS62153376A (en) | 1985-12-27 | 1985-12-27 | Pressure-sensitive adhesive sheet |
JP61045785A JPS62205179A (en) | 1986-03-03 | 1986-03-03 | Adhesive sheet for applying wafer |
JP61045786A JPS62205180A (en) | 1986-03-03 | 1986-03-03 | Adhesive sheet |
JP61161680A JPS6317980A (en) | 1986-07-09 | 1986-07-09 | Adhesive sheet for applying wafer |
GB8630956A GB2184741B (en) | 1985-12-27 | 1986-12-29 | Adhesive sheet suitable for use in the preparation of semiconductor chips |
Publications (1)
Publication Number | Publication Date |
---|---|
SG114592G true SG114592G (en) | 1992-12-24 |
Family
ID=27562766
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG1146/92A SG114692G (en) | 1985-12-27 | 1992-11-02 | Adhesive sheet suitable for use in dicing semiconductor wafers into chips |
SG1145/92A SG114592G (en) | 1985-12-27 | 1992-11-02 | Adhesive sheet suitable for semiconductor wafer processing |
SG1143/92A SG114392G (en) | 1985-12-27 | 1992-11-02 | Adhesive sheet suitable for use in dicing semiconductor wafers into chips |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG1146/92A SG114692G (en) | 1985-12-27 | 1992-11-02 | Adhesive sheet suitable for use in dicing semiconductor wafers into chips |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG1143/92A SG114392G (en) | 1985-12-27 | 1992-11-02 | Adhesive sheet suitable for use in dicing semiconductor wafers into chips |
Country Status (2)
Country | Link |
---|---|
GB (3) | GB2221470B (en) |
SG (3) | SG114692G (en) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3410202B2 (en) * | 1993-04-28 | 2003-05-26 | 日本テキサス・インスツルメンツ株式会社 | Adhesive sheet for attaching wafer and method for manufacturing semiconductor device using the same |
JP3521099B2 (en) * | 1994-11-29 | 2004-04-19 | リンテック株式会社 | Adhesive sheet for preventing adhesion of adhesive to dicing ring frame and wafer processing sheet provided with the adhesive sheet |
GB9523764D0 (en) * | 1995-11-21 | 1996-01-24 | Ici Plc | Polymeric film |
JPH09291258A (en) * | 1996-04-26 | 1997-11-11 | Lintec Corp | Tacky agent composition and tacky sheet using the same |
JPH10337823A (en) * | 1997-04-11 | 1998-12-22 | Lintec Corp | Base material and pressure sensitive adhesive tape using the material |
DE19921230B4 (en) * | 1999-05-07 | 2009-04-02 | Giesecke & Devrient Gmbh | Method for handling thinned chips for insertion in chip cards |
JP4230080B2 (en) | 2000-02-18 | 2009-02-25 | リンテック株式会社 | Wafer sticking adhesive sheet |
FR2830976B1 (en) | 2001-10-17 | 2004-01-09 | Ge Med Sys Global Tech Co Llc | LOW ATTENUATION ANTI-DIFFUSING GRIDS AND METHOD OF MANUFACTURING SUCH GRIDS |
JP2006522475A (en) * | 2003-04-02 | 2006-09-28 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | Flexible electronic device and method of manufacturing a flexible device |
JP5687897B2 (en) * | 2010-12-28 | 2015-03-25 | 日東電工株式会社 | Radiation curable pressure-sensitive adhesive composition and pressure-sensitive adhesive sheet |
CN106229286B (en) * | 2016-08-30 | 2020-04-14 | 浙江中纳晶微电子科技有限公司 | Processing method for temporary bonding of thin workpiece |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0616524B2 (en) * | 1984-03-12 | 1994-03-02 | 日東電工株式会社 | Adhesive thin plate for fixing semiconductor wafers |
DE3671577D1 (en) * | 1985-02-14 | 1990-06-28 | Bando Chemical Ind | METHOD FOR CUTTING A SEMICONDUCTOR DISC IN CUBE. |
EP0195767B1 (en) * | 1985-02-19 | 1993-01-27 | U C B, S.A. | Composition and method for preparing a pattern of an adhesive |
-
1989
- 1989-07-24 GB GB8916857A patent/GB2221470B/en not_active Expired - Lifetime
- 1989-07-24 GB GB8916856A patent/GB2221469B/en not_active Expired - Lifetime
- 1989-07-24 GB GB8916855A patent/GB2221468B/en not_active Expired - Lifetime
-
1992
- 1992-11-02 SG SG1146/92A patent/SG114692G/en unknown
- 1992-11-02 SG SG1145/92A patent/SG114592G/en unknown
- 1992-11-02 SG SG1143/92A patent/SG114392G/en unknown
Also Published As
Publication number | Publication date |
---|---|
GB2221468A (en) | 1990-02-07 |
GB2221469A (en) | 1990-02-07 |
GB2221470B (en) | 1990-09-05 |
GB8916856D0 (en) | 1989-09-06 |
GB8916857D0 (en) | 1989-09-06 |
SG114692G (en) | 1992-12-24 |
GB2221470A (en) | 1990-02-07 |
GB2221468B (en) | 1990-09-05 |
GB8916855D0 (en) | 1989-09-06 |
GB2221469B (en) | 1990-09-05 |
SG114392G (en) | 1992-12-24 |
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