JPS6214089B2 - - Google Patents

Info

Publication number
JPS6214089B2
JPS6214089B2 JP56033676A JP3367681A JPS6214089B2 JP S6214089 B2 JPS6214089 B2 JP S6214089B2 JP 56033676 A JP56033676 A JP 56033676A JP 3367681 A JP3367681 A JP 3367681A JP S6214089 B2 JPS6214089 B2 JP S6214089B2
Authority
JP
Japan
Prior art keywords
scale
boundary
line
lines
exposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56033676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57148347A (en
Inventor
Hitoshi Takemura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP56033676A priority Critical patent/JPS57148347A/ja
Publication of JPS57148347A publication Critical patent/JPS57148347A/ja
Publication of JPS6214089B2 publication Critical patent/JPS6214089B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP56033676A 1981-03-09 1981-03-09 Measurement of connection accuracy for electron beam exposure Granted JPS57148347A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56033676A JPS57148347A (en) 1981-03-09 1981-03-09 Measurement of connection accuracy for electron beam exposure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56033676A JPS57148347A (en) 1981-03-09 1981-03-09 Measurement of connection accuracy for electron beam exposure

Publications (2)

Publication Number Publication Date
JPS57148347A JPS57148347A (en) 1982-09-13
JPS6214089B2 true JPS6214089B2 (enrdf_load_stackoverflow) 1987-03-31

Family

ID=12393049

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56033676A Granted JPS57148347A (en) 1981-03-09 1981-03-09 Measurement of connection accuracy for electron beam exposure

Country Status (1)

Country Link
JP (1) JPS57148347A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01118074U (enrdf_load_stackoverflow) * 1988-02-02 1989-08-09

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5834731U (ja) * 1981-08-28 1983-03-07 三洋電機株式会社 電子ビ−ム露光用マスク
JPS604216A (ja) * 1983-06-21 1985-01-10 Mitsubishi Electric Corp 電子ビ−ム露光方法
JP2726411B2 (ja) * 1986-05-09 1998-03-11 三菱電機株式会社 パターン描画方法
JPH07111951B2 (ja) * 1988-06-22 1995-11-29 日本電気株式会社 電子線描画用接続精度測定方法
JP2870461B2 (ja) * 1995-12-18 1999-03-17 日本電気株式会社 フォトマスクの目合わせマーク及び半導体装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01118074U (enrdf_load_stackoverflow) * 1988-02-02 1989-08-09

Also Published As

Publication number Publication date
JPS57148347A (en) 1982-09-13

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