JPS6253764B2 - - Google Patents

Info

Publication number
JPS6253764B2
JPS6253764B2 JP6867478A JP6867478A JPS6253764B2 JP S6253764 B2 JPS6253764 B2 JP S6253764B2 JP 6867478 A JP6867478 A JP 6867478A JP 6867478 A JP6867478 A JP 6867478A JP S6253764 B2 JPS6253764 B2 JP S6253764B2
Authority
JP
Japan
Prior art keywords
interference
valleys
peaks
flatness
photodiode array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6867478A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54159258A (en
Inventor
Toshiaki Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Sumitomo Special Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Special Metals Co Ltd filed Critical Sumitomo Special Metals Co Ltd
Priority to JP6867478A priority Critical patent/JPS54159258A/ja
Publication of JPS54159258A publication Critical patent/JPS54159258A/ja
Publication of JPS6253764B2 publication Critical patent/JPS6253764B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP6867478A 1978-06-06 1978-06-06 Method of measuring flatness Granted JPS54159258A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6867478A JPS54159258A (en) 1978-06-06 1978-06-06 Method of measuring flatness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6867478A JPS54159258A (en) 1978-06-06 1978-06-06 Method of measuring flatness

Publications (2)

Publication Number Publication Date
JPS54159258A JPS54159258A (en) 1979-12-15
JPS6253764B2 true JPS6253764B2 (enrdf_load_stackoverflow) 1987-11-12

Family

ID=13380488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6867478A Granted JPS54159258A (en) 1978-06-06 1978-06-06 Method of measuring flatness

Country Status (1)

Country Link
JP (1) JPS54159258A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4627733A (en) * 1981-12-25 1986-12-09 Sumitomo Special Metals Co., Ltd. Flatness measuring apparatus
JPS58111709A (ja) * 1981-12-25 1983-07-02 Sumitomo Special Metals Co Ltd 平面度測定装置
JPS5960505U (ja) * 1982-10-14 1984-04-20 株式会社山武 形状認識装置
JP4529227B2 (ja) * 2000-04-19 2010-08-25 Ｎｏｋ株式会社 平面検査装置および平面検査方法

Also Published As

Publication number Publication date
JPS54159258A (en) 1979-12-15

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