JPS62132775A - 窒化珪素焼結体の製造方法 - Google Patents

窒化珪素焼結体の製造方法

Info

Publication number
JPS62132775A
JPS62132775A JP60275672A JP27567285A JPS62132775A JP S62132775 A JPS62132775 A JP S62132775A JP 60275672 A JP60275672 A JP 60275672A JP 27567285 A JP27567285 A JP 27567285A JP S62132775 A JPS62132775 A JP S62132775A
Authority
JP
Japan
Prior art keywords
nitriding
rate
gas
vol
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60275672A
Other languages
English (en)
Japanese (ja)
Other versions
JPS644985B2 (enExample
Inventor
関　八千穂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60275672A priority Critical patent/JPS62132775A/ja
Publication of JPS62132775A publication Critical patent/JPS62132775A/ja
Publication of JPS644985B2 publication Critical patent/JPS644985B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP60275672A 1985-12-06 1985-12-06 窒化珪素焼結体の製造方法 Granted JPS62132775A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60275672A JPS62132775A (ja) 1985-12-06 1985-12-06 窒化珪素焼結体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60275672A JPS62132775A (ja) 1985-12-06 1985-12-06 窒化珪素焼結体の製造方法

Publications (2)

Publication Number Publication Date
JPS62132775A true JPS62132775A (ja) 1987-06-16
JPS644985B2 JPS644985B2 (enExample) 1989-01-27

Family

ID=17558736

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60275672A Granted JPS62132775A (ja) 1985-12-06 1985-12-06 窒化珪素焼結体の製造方法

Country Status (1)

Country Link
JP (1) JPS62132775A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0248468A (ja) * 1988-08-09 1990-02-19 Nissan Motor Co Ltd 窒化珪素質焼結体およびその製造方法
US5733498A (en) * 1994-02-28 1998-03-31 Honda Giken Kogyo Kabushiki Kaisha Method for producing silicon nitride reaction-sintered body
US5928601A (en) * 1994-02-28 1999-07-27 Honda Giken Kogyo Kabushiki Kaisha Method for producing silicon nitride reaction sintered body
JP2023149329A (ja) * 2022-03-31 2023-10-13 株式会社プロテリアル 窒化珪素基板の製造方法、窒化珪素基板の製造装置および窒化珪素基板

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0248468A (ja) * 1988-08-09 1990-02-19 Nissan Motor Co Ltd 窒化珪素質焼結体およびその製造方法
US5733498A (en) * 1994-02-28 1998-03-31 Honda Giken Kogyo Kabushiki Kaisha Method for producing silicon nitride reaction-sintered body
US5928601A (en) * 1994-02-28 1999-07-27 Honda Giken Kogyo Kabushiki Kaisha Method for producing silicon nitride reaction sintered body
JP2023149329A (ja) * 2022-03-31 2023-10-13 株式会社プロテリアル 窒化珪素基板の製造方法、窒化珪素基板の製造装置および窒化珪素基板

Also Published As

Publication number Publication date
JPS644985B2 (enExample) 1989-01-27

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