JPS644985B2 - - Google Patents

Info

Publication number
JPS644985B2
JPS644985B2 JP60275672A JP27567285A JPS644985B2 JP S644985 B2 JPS644985 B2 JP S644985B2 JP 60275672 A JP60275672 A JP 60275672A JP 27567285 A JP27567285 A JP 27567285A JP S644985 B2 JPS644985 B2 JP S644985B2
Authority
JP
Japan
Prior art keywords
nitriding
rate
gas
vol
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60275672A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62132775A (ja
Inventor
Yachiho Seki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60275672A priority Critical patent/JPS62132775A/ja
Publication of JPS62132775A publication Critical patent/JPS62132775A/ja
Publication of JPS644985B2 publication Critical patent/JPS644985B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP60275672A 1985-12-06 1985-12-06 窒化珪素焼結体の製造方法 Granted JPS62132775A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60275672A JPS62132775A (ja) 1985-12-06 1985-12-06 窒化珪素焼結体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60275672A JPS62132775A (ja) 1985-12-06 1985-12-06 窒化珪素焼結体の製造方法

Publications (2)

Publication Number Publication Date
JPS62132775A JPS62132775A (ja) 1987-06-16
JPS644985B2 true JPS644985B2 (enExample) 1989-01-27

Family

ID=17558736

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60275672A Granted JPS62132775A (ja) 1985-12-06 1985-12-06 窒化珪素焼結体の製造方法

Country Status (1)

Country Link
JP (1) JPS62132775A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2642429B2 (ja) * 1988-08-09 1997-08-20 日産自動車株式会社 窒化珪素質焼結体およびその製造方法
CA2116644A1 (en) * 1994-02-28 1995-08-29 Yasunobu Kawakami Silicon nitride reaction-sintered body and method and apparatus for producing same
US5928601A (en) * 1994-02-28 1999-07-27 Honda Giken Kogyo Kabushiki Kaisha Method for producing silicon nitride reaction sintered body
JP2023149329A (ja) * 2022-03-31 2023-10-13 株式会社プロテリアル 窒化珪素基板の製造方法、窒化珪素基板の製造装置および窒化珪素基板

Also Published As

Publication number Publication date
JPS62132775A (ja) 1987-06-16

Similar Documents

Publication Publication Date Title
US4117096A (en) Process for producing powder of β-type silicon carbide
EP0170817A2 (en) A high-purity powder of hexagonal boron nitride and a method for the preparation thereof
US4235857A (en) Method of nitriding silicon
US4224073A (en) Active silicon carbide powder containing a boron component and process for producing the same
JPS62132775A (ja) 窒化珪素焼結体の製造方法
JPH0640713A (ja) 石英粉の脱水方法
JPS5839764B2 (ja) 窒化アルミニウム質粉末の製造方法
JPS6041634B2 (ja) 高密度窒化珪素反応焼結体の製造方法
JPS63183145A (ja) 高硬度チタン−アルミニウム−バナジウム系合金およびその製造方法
JPH06219715A (ja) 高α型高純度窒化ケイ素粉末の製造方法
JP3906354B2 (ja) 高表面積炭化ケイ素セラミックス多孔体の製造方法
JPS6253561B2 (enExample)
JPS5891011A (ja) α相含有率の高い窒化珪素粉末の製造方法
JPH10203808A (ja) 高α型窒化ケイ素の製造方法
JPH0345506A (ja) 高酸素高β型窒化ケイ素微粉末及びその製造方法
JPH0147427B2 (enExample)
JPS61201608A (ja) 高純度窒化アルミニウム粉末の製造方法
JPH0575688B2 (enExample)
JP2635695B2 (ja) α−窒化ケイ素粉末の製造方法
JPH0446889B2 (enExample)
JPS5891028A (ja) β型炭化ケイ素粉末の製造方法
JPH0791043B2 (ja) 窒化ケイ素の製造方法
JPS62128913A (ja) 炭化けい素粉末の製造方法
JPH0621016B2 (ja) 窒化アルミニウム粉末の製造方法
JP2743981B2 (ja) 石英発泡体の製造方法

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term