JPS6143876B2 - - Google Patents
Info
- Publication number
- JPS6143876B2 JPS6143876B2 JP52146882A JP14688277A JPS6143876B2 JP S6143876 B2 JPS6143876 B2 JP S6143876B2 JP 52146882 A JP52146882 A JP 52146882A JP 14688277 A JP14688277 A JP 14688277A JP S6143876 B2 JPS6143876 B2 JP S6143876B2
- Authority
- JP
- Japan
- Prior art keywords
- element body
- layer
- resin layer
- semiconductor element
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 25
- 239000002184 metal Substances 0.000 claims description 25
- 239000011347 resin Substances 0.000 claims description 20
- 229920005989 resin Polymers 0.000 claims description 20
- 239000004065 semiconductor Substances 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 206010040844 Skin exfoliation Diseases 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000004070 electrodeposition Methods 0.000 description 3
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Hall/Mr Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14688277A JPS5478094A (en) | 1977-12-02 | 1977-12-02 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14688277A JPS5478094A (en) | 1977-12-02 | 1977-12-02 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5478094A JPS5478094A (en) | 1979-06-21 |
| JPS6143876B2 true JPS6143876B2 (th) | 1986-09-30 |
Family
ID=15417697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14688277A Granted JPS5478094A (en) | 1977-12-02 | 1977-12-02 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5478094A (th) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4922878A (th) * | 1972-06-21 | 1974-02-28 | ||
| JPS4934784A (th) * | 1972-08-01 | 1974-03-30 | ||
| JPS5110778A (en) * | 1974-07-17 | 1976-01-28 | Naito Densei Kogyo Co Ltd | Jidenhenkansoshi oyobi sonoseizoho |
-
1977
- 1977-12-02 JP JP14688277A patent/JPS5478094A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4922878A (th) * | 1972-06-21 | 1974-02-28 | ||
| JPS4934784A (th) * | 1972-08-01 | 1974-03-30 | ||
| JPS5110778A (en) * | 1974-07-17 | 1976-01-28 | Naito Densei Kogyo Co Ltd | Jidenhenkansoshi oyobi sonoseizoho |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5478094A (en) | 1979-06-21 |
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